Air Cylinder

26 8 20 0 0.033 13 10.5 8 41 5 28 5 6 M8 x 1.25 24 M20 x 1.5 1/8 8 10 32 32 52 36 25 22 19.5 17 32 10 26 0 0.033 13 10.5 8 45 6 33.5 5.5 8 M10 x 1.25 30 M26 x 1.5 1/8 9 10 40 40 60 40 32 22 19.5 17 32 12 26 0 0.033 13 10.5 8 45 6 37.5 5.5 10 M10 x 1.25 34.5 M26 x 1.5 1/8 9 10 40 40 60 40 40 24 21 22 41 14 32 0 0.039 16 13.5 11 50 8 46.5 7 12 M14 x 1.5 42.5 M32 x 2 1/4 10 11 53 53 77 44.5

ZP

/Thin flat with ribs Flat with ribs Deep Bellows 6, 8, 10, 13, 16, 20, 25, 32, 40, 50 2, 4, 6, 8, 2 x 4, 3.5 x 7, 4 x 10, 10, 13, 16, 20, 25, 32, 40, 50 Pad dia.

ZP

L D 10 39.5 23.4 12.5 10 5 10 10 2 13 16 40 23.9 13 10.5 E2 2 M5 x 0.8 20 25 46.5 29.3 15.5 12.5 B5 N S U F GN GS 30 8 12 12 3 32 47 29.8 16 13 40 49.5 32.3 18.5 12.5 2.5 19 5 50 50.5 33.3 19.5 13.5 20 25 B8 (Rotating angle) 04 06 08 ZP R F 10 to 32 46.5 29.3 15.5 12.5 2 M8 x 1.25 8 12 12 3 32 47 29.8 16 13 40 49.5 32.3 18.5 12.5 2.5 19 5 50 50.5 33.3 19.5 13.5 M Width across flats H F G

Smooth Cylinder/Low Speed Cylinder

26 10.5 5 8 6.8 102 3.2 M8 x 1.25 M20 x 1.5 131 40 8 13 8 41 28 5 6 4 25 40 55 15 24 62 20 8 21 18 25 33.5 5.5 M10 x 1.25 19.5 17 32 10.5 6 8 6.8 102 3.2 M26 x 1.5 135 47 10 13 8 45 8 4 28 40 55 15 30 62 20 8 25 22 32 34.5 37.5 5.5 M10 x 1.25 19.5 17 32 10.5 6 8 6.8 104 3.2 M26 x 1.5 137 47 12 13 8 45 10 4 28 40 55 15 64 20 8 25 22 40 21 7 7 M14 x 1.5 21.5 M32 x 2 42.5 46.5 22 41 13.5 8

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

28.5 M14 x 1.5 M14 x 1.5 M18 x 1.5 28.5 28.5 33.5 Basic Style A B Bore size (mm) 32 40 50 C D E F H I J K L M N O P Q W Z 10 st 40 46.5 48.5 20 st 58.5 5 st 28 34.5 10 st 33 39.5 40.5 20 st 50.5 5 st 35 41.5 13 13 15 16 16 20 45 52 64 8.5 8.5 11 M8 x 1.25 M8 x 1.25 M10 x 1.5 60 69 86 10.5 10 13 14 14 17 7 7 8 34 40 50 5.5 5.5 6.6 9 depth 7 9 depth 7 11 depth 8 Rc 1/8 Rc 1/8 Rc 1/4 8

CM2

on page 6-4-13. 20 20 20 144 36 52 32 32 10 8 6 8.5 8 13 17.5 21.5 25 25 25 152 40 60 40 40 10 9 6 8 13 17.5 10.5 24.5 32 32 32 154 40 60 40 40 10 9 6 8 13 17.5 11.5 27 40 40 40 188 44.5 77 53 53 11 10 8 11 16 21.5 15 32.5 6-4-34 35 Series CDM2W Air Cylinder: Standard Type Double Acting, Double Rod Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height Reed

Air Slide Table

Metal stopper with bumper Rubber stopper Shock absorber L1 L1 L1 10 5.5 33.5 8 9 6 20 5.5 39.5 11 12 9 30 14 39.5 11 13 10 40 17 39.5 11 13 10 50 22 39.5 11 13 10 75 41 39.5 11 13 10 100 47 39.5 11 13 10 125 72 39.5 11 13 10 Stroke K MZ Low thrust with high rigidity type MXQB Single side-ported type MXQC Height interchangeable type MXQ Auto Switch Mounting Made to Order Model Selection Common

5

119 12 12 1/8 12.5 12.5 M5 x 0.8 32 79 11 11 121 12 12 1/8 10.5 10.5 1/8 40 87 12 12 139 13 13 1/8 13 10 1/8 Up to 1500 50 102 13 13 162 14 14 1/4 14 14 1/4 63 102 13 13 162 14 14 1/4 14 14 1/4 80 122 196 20 20 3/8 17.5 17.5 3/8 100 122 196 20 20 1/2 17.5 17.5 1/2 Female Rod End (mm) Bore size A1 H MM ZZ 20 8 13 M4 x 0.7 92 25 8 14 M5 x 0.8 93 32 12 14 M6 x 1 95 40 13 15 M8 x 1.25 104

Made to Order

MB, MB1 series MM Cushion valve W Width across flats Width across flats B1 E D H1 Effective thread Effective thread length Width across flats Bore size (mm) A B1 D H H1 K MM W ZZ A K 32 40 50 63 80 100 H 30 27 16 51 8 6 14 M14 x 1.5 7.2 139 22 ZZ + Stroke 35 32 20 58 11 7 18 M18 x 1.5 9.7 146 27 40 37 25 68 13 10 22 M22 x 1.5 10.5 166 32 40 37 25 68 13 10 22 M22 x 1.5 12 166 32 40 37 30 74

5 Port Solenoid Valve Series SY3000/5000/7000/9000

250 262.5 275 287.5 300 300 63.3 58.1 48.4 L3 91.5 81 102 112.5 123 133.5 144 154.5 70.5 181.5 192 202.5 213 223.5 234 42.6 34.5 7.5 L4 14 13 12 15 16 17 12 13 14 13 14 15 16 17 11.5 Two SUP/EXH blocks are provided for models with 11 stations or more.

AC Servo Motor Driver (Network card type ）

13 1 13.

Air Cylinder

PD Mounting 20 12 12 13 24.2 6 25 12 10 (12) 13 26.7 6 32 12 10 (12) 13 30.2 6 40 12 10 (12) 16 34.6 8 50 13 13 20 40.6 10 63 13 13 20 47.1 10 HH Applicable Tubing O.D./I.D. Note) ( ): Long stroke Bore size (mm) 20 25 32 40 50 63 Applicable tubing O.D. (mm) 6/4 6/4 6/4 8/6 10/7.5 10/7.5 Applicable tubing material Can be used for either nylon, soft nylon or polyurethane tubing.

Air Cylinder Series MB

13 13 54 1/8 83 45.5 40 Up to 500 14 12 27 35 10 30 22 8 52 104 38 10 14 28 16 13 14 16.5 63 1/8 91 52.5 50 Up to 600 18 15 32 40 12.5 35 27 11 65 120.5 46.5 14 20 40 20 14 15.5 19 75 1/4 104.5 58.5 63 Up to 600 18 12 32 45 17.5 35 27 11 75 134.5 56.5 14 20 40 20 14 16.5 23 90 1/4 119.5 68 80 Up to 800 22 18 37 45 22 40 32 13 95 169 72 22 30 60 25 20 19 33 102 1/4 150 81 100 Up to 800 26

CQ2

Bore (mm) P1 V W1 Z1 32 40 50 13 6 36.5 59 13 6 40.5 66 16 8 82 50 Standard Auto switch shown above is D-A73 and D-A80.

ZP

ZP2-16UCL ZP (10, 13, 16) U ZP (10, 13, 16) C ZP (10, 13, 16) B ZP (10, 16) D ZPT2-A5, A6 ZPT2-B5, B6 B01, N01 T01 P. 72 P. 73 ZP (20, 25, 32) U ZP (20, 25, 32) C ZP (20, 25, 32) B ZP25D ZP2-B25J ZP2-B30J ZP2-25UCL ZP2-32UCL ZPT3-A6, A8 ZPT3-B5, B6, B8 B01, N01 T01 P. 72 P. 73 ZP (40, 50) U ZP (40, 50) C ZP (40, 50) B ZP40D ZPT4-A6, A8 ZPT4-B6, B8 B01, N01 T01 ZP2-40UCL ZP2-50UCL P. 72 P

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Without auto switch With auto switch Stroke range (mm) Bore size (mm) J K D L C E M I H P M5 x 0.8 A A B F 5.5 Q 11.5 B P F Q 5 10 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 30 23 32 40 M8 x 1.25 4.5 33 7.5 Rc 1/8 14 10.5 16 7 13 45 34 60 Rc 1/8 10.5 7.5 40 36.5 46.5 38.5 48.5 33 29.5 39.5 30.5 40.5 40 Rc 1/8 46.5 39.5 M8 x 1.25 5 8 Rc 1/8 14 11 16 7 13 52 40 69 11 8 M10 x 1.5 50 Rc 1

Table of Contents

(inch) Applicable fitting size d (inch) Model A M Min. port size Applicable tubing Note) Weight (g) D L1 12 14 17 19 24 1 4 KQ2R05-09 KQ2R05-07 18.5 18 34.5 10.7 12.5 13.2 11.4 3 16 16.5 3.5 36.5 5 16 5 16 3 8 17 KQ2R07-09 37 40 18.5 1 4 4.6 KQ2R07-11 KQ2R09-11 19.5 3 8 5 16 40 41 18.5 14 19 6 1 2 KQ2R09-13 32 1 2 3 8 KQ2R11-13 17.9 22 44 7 21 32 Note) D: Max. diameter Applicable fitting

CV/MVGQ

8 10 32 41 32 8 18 13 5 52 15.5 13 26 5 57.5 28 M8 x 1.25 15 24 M20 x 1.5 36 20 0 0.033 26 0 0.033 26 0 0.033 32 0 0.039 9 10 40 45 40 10 22 13 5.5 60 19.5 17 32 6 63.5 33.5 M10 x 1.25 15 30 M26 x 1.5 40 9 10 40 45 40 12 22 13 5.5 60 19.5 17 32 6 68 37.5 M10 x 1.25 15 34.5 M26 x 1.5 40 10 11 53 50 53 14 24 16 7 77 21 22 41 8 76 46.5 21.5 42.5 M32 x 2 44.5 M14 x 1.5 Dimensions by Stroke Single

CV/MVGQ

AL Z TD TT H1 TX H MM TY B2 D HX A B1 Eh8 F I K NA NN TZ N 8 10 32 41 32 8 18 13 5 52 15.5 13 26 5 57.5 28 M8 x 1.25 15 24 M20 x 1.5 36 20 0 0.033 26 0 0.033 26 0 0.033 32 0 0.039 9 10 40 45 40 10 22 13 5.5 60 19.5 17 32 6 63.5 33.5 M10 x 1.25 15 30 M26 x 1.5 40 9 10 40 45 40 12 22 13 5.5 60 19.5 17 32 6 68 37.5 M10 x 1.25 15 34.5 M26 x 1.5 40 10 11 53 50 53 14 24 16 7 77 21 22 41 8 76 46.5

V100

VK VZ Note) For VQZ100, refer to page 4-14-13.