VQZ1000/2000/3000

Ported 10 10 Series VQZ1000/2000/3000 Dimensions: VQZ1000 2 position double Grommet (G): VQZ1220 1-G-C3/C4/C6/M5 300 95 (Lead wire length) 47.5 5.5 (M5: 6) 5.5 (M5: 6) 22.2 mounting hole 0.8 4 8.6 10 SMC SMC 2 R2 Cover diameter 1.6 25.8 2-C3, C4, C6, M5 Cross section 0.34 mm2 60.3 C3: One-touch fitting for 3.2 Manual override C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5

0.4

connectors, so switching from the F kit (D-sub connector) to the S kit (serial transmission) can be done simply by changing the kit section. 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 6 7 8 9 10 (Refer to the connector wiring diagram.)

Aluminum High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Battery-less

X 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

47 1 10 25.5 36 Rod end nut 12 Flat washer 14 7 10 7 15 8 39.5 + Stroke 18.5 25.5 25 58 + Stroke 13 5 36 Lead wire minimum bending radius 10 Auto switch 5.5 19 2 x 2 x 9 counterbore 2 x 2 x M6 x 1.0 effective depth 10 2 x M5 x 0.8 M5 x 0.8 (Relief port) (Piping port) 5.5 2 x 5.4 through M10 x 1.25 52 1 12 28 40 Rod end nut 15 Flat washer 19.6 10 10 17.5 7 7 28 42.5 + Stroke 22.5 40 65 +

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 11LEFS 1500 1500 1500 Mep 11LEJS 1000 1000 1000 L3 [mm] L3 [mm] L3 [mm] m 25AL3 Z 500 500 500 LEC 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] LEC S 1500 1500 1500 LEC SS-T LEC Y LEC Y L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X Motorless 500 500

Auto Switch Guide

D-Y69A/Y69B/Y7PV* D-Y7G/Y7H D-M5N/M5P/M5B D-S991/S992/S99V1/S99V2 D-S9P1/S9P2/S9PV1/S9PV2 D-T991/T992/T99V1/T99V2 D-S791/S792 D-T791/T792 D-S7P1/S7P2 D-T791C/T792C 10-20-27 Grommet 10-20-28 Connector 10-20-29 Band 10-20-30 Terminal conduit 10-20-31 10-20-32 Grommet 10-20-33 Rail 10-20-34 Connector 10-20-35 Grommet Tie-rod 10-20-36 Terminal conduit 10-20-37 10-20-40 10-20-38 10-20-41 Grommet

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Nil Standard A Both ends adjuster P Note) Axial piping CS Extension

MK

Example) M5 x 75l (MK2B) MK232/40 10 2 ML2B 6 Moment of inertia (kgm2) C J G5-S 4 MK220/25 CV 2 Mounting bolt 10 3 MVGQ 6 CC 4 Flat washer Operating range RB 2 Note) Be sure to use a flat washer to mount cylinders via through-holes. 10 4 J Model C D 75 85 80 90 90 100 80 90 105 135 105 135 Mounting bolt M5 x 75l M5 x 85l M5 X 80l M5 x 90l M5 x 90l M5 x 100l M5 x 80l M5 x 90l M6 x 105l M6

VM

One way roller lever VM123-M5-02 VM133-M5-02 VM123-M5-02S VM133-M5-02S JIS Symbol 2 port Polyacetal or hard steel roller R port (3 port only) 3 port 0.5 MPa supply 2-M5 x 0.8 depth 4 3.2 mm P.T. 10 N F.O.F. 2-4.6 mounting hole 2.3 mm O.T. 5.5 mm T.T.

Piping: 40 (Base Mounted Common SUP Common EXH), Stations: 2 Stations, A B Port Size: M5N (Base Mounted M5X0.8 NPT)

Piping: 40 (Base Mounted Common SUP Common EXH), Stations: 5 Stations, A B Port Size: M5T (M5X0.8 NPTF)

Piping: 40 (Base Mounted Common SUP Common EXH), Stations: 9 Stations, A B Port Size: M5T (M5X0.8 NPTF)

Piping: 40 (Base Mounted Common SUP Common EXH), Stations: 7 Stations, A B Port Size: M5T (M5X0.8 NPTF)

Piping: 40 (Base Mounted Common SUP Common EXH), Stations: 2 Stations, A B Port Size: M5T (M5X0.8 NPTF)

Piping: 40 (Base Mounted Common SUP Common EXH), Stations: 3 Stations, A B Port Size: M5T (M5X0.8 NPTF)

Piping: 40 (Base Mounted Common SUP Common EXH), Stations: 4 Stations, A B Port Size: M5T (M5X0.8 NPTF)

Piping: 40 (Base Mounted Common SUP Common EXH), Stations: 6 Stations, A B Port Size: M5T (M5X0.8 NPTF)

Piping: 40 (Base Mounted Common SUP Common EXH), Stations: 8 Stations, A B Port Size: M5T (M5X0.8 NPTF)

Piping: 40 (Base Mounted Common SUP Common EXH), Stations: 11 Stations, A B Port Size: M5T (M5X0.8 NPTF)