ZP

x 0.8 M8 x 1.25 1/8 (Rc, NPT, NPTF) M8 x 1.25 1/8 (Rc, NPT, NPTF) Connection thread M8 x 1 M10 x 1 M14 x 1 M5 x 0.8 Vacuum inlet M5 x 0.8 Use the connection thread.

Table of Contents

x 0.8, NPTF 1/8, M5 x 0.8 Port size R 1/8, M5 x 0.8 NPTF 1/8, M5 x 0.8 ZX ejector mounted type: M5 x 0.8 Enclosure IP40 Note 1) Instant pressure supply of 0.5 MPa has no influence on the switch.

CG5-S

x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 1/8 83 123 32 to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 35.5 1/8 85 125 40 to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x 1.5 44 1/8 93 143 50 to 1200 109 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25

MY1

) (Hexagon socket head plug) MY1BG MY1BG VV VV 2-M5 x 0.8 2-M5 x 0.8 (Hexagon socket head plug) (Hexagon socket head plug) (mm) A B C E GA GB H KK J LD L LL LW M MM N NC Model G JJ K NE 80 6 3.5 2 9 16 37 6.5 M5 x 0.8 3.5 80 40 30 6 M4 x 0.7 20 14 MY1B16 14 M4 x 0.7 10 27.8 100 7.5 4.5 2 12.5 17.5 46 10 M6 x 1 4.5 100 50 37 8 M5 x 0.8 25 17.5 MY1B20 12.5 M4 x 0.7 12 34 (mm) NW PC PD T VV

ISO Cylinder

x 0.8 19 5 16 M4 x 0.7 23 3.5, 6.5 counterbore depth 4 8 14 23.5 9.5 15 58 7 4 12 74 10 12 16 4 M5 x 0.8 19 5 16 M4 x 0.7 23 3.5, 6.5 counterbore depth 4 8 14 23.5 9.5 15 58 7 4 12 74 12 16 20 6 M5 x 0.8 25 6 21 5 M6 x 1 26 4.5, 8 counterbore depth 5 10 16 29.5 10.5 18.3 67 10 5 16 88 16 16 20 6 M5 x 0.8 25 6 21 5 M6 x 1 26 4.5, 8 counterbore depth 5 10 16 29.5 10.5 18.3 67 10 5 16 88

Hydraulic

Example: M5 x 50l 4pcs.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

16.5 20 26 32 38 50 60 8 10 12 16 20 20 25 30 5 6 6 8 11 11 13 16 26 31 38 47 58 72 89 110 6 8 10 14 18 18 22 26 5 5.5 5.5 6 7 7 10 10 M4 x 0.7 depth 7 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 M8 x 1.25 depth 16 M10 x 1.5 depth 16 M10 x 1.5 depth 22 M12 x 1.75 depth 22 12 12 12 13 14 14 20 20 2 2 2 2 2 2 3 3 12 14 18 25 30 32 40 50 77 77 79 87 102 102 122 122 18 22 22 30 35 35

CJ2

(mm) Material: Iron A 15 15 CX 3.2 6.5 BA 12 18 GB 18 23 BB 12 18 H 20 20 CD(cd) 3.3 5 CA 14 20 KA 4.2 5.2 CB 14 20 MM M4 X 0.7 M5 X 0.8 NA 5.5 5.5 NB 22.5 27.5 R 5 8 U 8 10 Part No.

1

4.5 4.5 5.5 5.5 7.5 7.5 9 9 22 25 30 23 24 4.3 4.3 5.6 5.6 6.6 6.6 8.6 8.6 10 12 13 15 20 20 22 22 8 8 9.5 9.5 11 11 14 14 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Bore size (mm) DB M5 x 0.8 M12 x 1.5 3.5 M5 x 0.8 Standard stroke (mm) HA Slide FA B C DA FB G GA GB H J K L MM ML OA GC JA JB MC NN MA A RB1007 M5 x 0.8 M14 x 1.5 3 12 72 44 3 17 3.5 4.5 M6 x 1.0 M6 x 1.0 M8

Free Mount Cylinder

Note) 16 16 19 21.5 22 22.5 7 10 11 12 15.5 19.5 13 16 16 19 23 27 13 15 20 26 32 40 10 11 14 16 20 24 22 24 32 40 50 62 17 18 25 30 38 48 3 4 6 8 10 12 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 7 7 7 9 10 11 M3 x 0.5 depth 5 M3 x 0.5 depth 5 M4 x 0.7 depth 6 M5 x 0.8 depth 8 M5 x 0.8 depth 8 M6 x 1.0 depth 9 3.2 3.2 4.5 5.5 5.5 6.6 12.5 14 18 22 5 6 8 10 4 9 9 13.5 2 4.5

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

9 4 15.5 0.5 29 22 8 14 1 5 9 24 3.5 M3 x 0.5 17 3 25 31 41 8.5 9.5 10.5 10.5 -0.004 -0.012 0 -0.043 12 5 15.5 0.5 M3 x 0.5 34 25 9 18 1.5 6 10 29 3.5 M3 x 0.5 21 3 29 36 48 11 10 11.5 11 -0.004 -0.012 0 -0.043 14 6 17 0.5 M4 x 0.7 42 34.5 10 20 1.5 7 10 36 4.5 M4 x 0.7 26 4 36 44 59 M5 x 0.8 14 13 D12 13 -0.005 -0.014 0 -0.043 16 8 1 4.5 17.5 M5 x 0.8 50 47.5 13 22 2 8 12 43 5.5 M5

Stainless Steel One-touch Fittings Series KG

(mm) Weight (g) A D M5 0.8 KGH04-M5 KGH04-01 14 13 9.5 8 17 22 4 4 2.4 9 16 5.6 1 4 KGH04-02 19.5 13.5 14 4 4 1 8 16 18 10 5.6 M5 0.8 KGH06-M5 KGH06-01 KGH06-02 14 3.4 16 14 15 18.5 17 11.5 18.5 22.5 23 4 10 12 14 1 8 1 4 6 13.1 13.1 17 3 8 KGH06-03 22 15.5 17 27 21 19 26 19 30 1 8 1 4 3 8 1 8 1 4 KGH08-01 KGH08-02 KGH08-03 KGH10-01 KGH10-02 24 20.5 15.5 26 27.5 28 26.5 22 30 33.5 14

Table of Contents

0.28 3.4 15 0.30 3.8 14 0.30 3.8 14 0.31 3.4 14 0.26 3.4 15 0.30 4.0 14 0.30 3.7 13 0.32 3.2 13 0.25 3.0 14 0.28 3.5 13 0.29 3.4 13 0.31 3.2 14 [13] 14 [13] 0.32 [0.30] 3.6 [3.2] 14 0.30 3.7 0.32 [0.30] 3.6 [3.2] 13 [5.0] 0.27 [0.42] 3.2 [1.3] 13 0.28 3.1 15 [5.3] 0.22 [0.42] 3.7 [1.5] 13 0.28 3.3 0.30 2 position 3 position Single 5 50 or less VFR420 VFR421 VFR424 Double 5 50 or less VFR430

Stability of suction position,

ZP3EU-YF2JB10 [Weight: 209 g] ZP3EU-YF2JB30 [Weight: 225 g] ZP3EU-YF2JB50 [Weight: 237 g] Width across flats 14 Width across flats 14 ZP3 Width across flats 27 Width across flats 27 Bushing Bushing ZP3E ZP3E 35 9 9 A B 9 9 35 B A ZP2 Bushing Bushing ZP2V M18 x 1.5 M18 x 1.5 D-D D-D M5 x 0.8/ Effective thread depth 5 M5 x 0.8/ Effective thread depth 5 ZP 14 14 ZPT ZPR D D D D 17 17 16 16 24.1

Vacuum System Peripherals:

Mist separator: Series AM/AFM 13-14-13 Fittings & Tubing 1. Compact One-touch mini: Series KJ 13-14-14 2. One-touch fitting: Series KQ 13-14-14 3. One-touch fitting manifold: Series KM 13-14-14 4. Miniature fitting: Series M3/M6/R 13-14-14 5.Tubing 13-14-15 Flow Control Equipment 1. Speed controler: Series AS 13-14-15 2.

MXQ

x 16 M5 x 16 M5 x 12 4.4 4.4 4.4 M6 x 20 M6 x 18 M5 x 14 7.0 7.0 4.4 M8 x 20 M8 x 18 M6 x 18 18.0 18.0 7.0 Metal Stopper Caution 1.

Modular F.R.L. Units

Model 1 Port size A B D Applicable model E100-M5-A M5 x 0.8 10 14 14 AC10l-A E200-l01-A 1/8 Port size 29.8 23.5 28 AC20l-B E200-l02-A 1/4 E200-l03-A 3/8 E300-l02-A 1/4 B Center of F.R.L. body 31.8 30 30 AC25l-B, AC30l-B E300-l03-A 3/8 E300-l04-A 1/2 E400-l02-A 1/4 D A 31.8 36 36 AC40l-B E400-l03-A 3/8 E400-l04-A 1/2 E400-l06-A 3/4 E500-l06-A 3/4 31.8 40 44 AC40l-06-B E600-l06-A 3/4 35 48

0.4

C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 2n x C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 75 64 53 97 130 152 31 42 86 108 119 141 100 87.5 75 125 150 175 50 62.5 125 112.5 137.5 162.5 98

Series KG Stainless Steel One-touch Fittings

(mm) Weight (g) A D M5 0.8 KGH04-M5 KGH04-01 14 13 9.5 8 17 22 4 4 2.4 9 16 5.6 1 4 KGH04-02 19.5 13.5 14 4 4 1 8 16 18 10 5.6 M5 0.8 KGH06-M5 KGH06-01 KGH06-02 14 3.4 16 14 15 18.5 17 11.5 18.5 22.5 23 4 10 12 14 1 8 1 4 6 13.1 13.1 17 3 8 KGH06-03 22 15.5 17 27 21 19 26 19 30 1 8 1 4 3 8 1 8 1 4 KGH08-01 KGH08-02 KGH08-03 KGH10-01 KGH10-02 24 20.5 15.5 26 27.5 28 26.5 22 30 33.5 14

CQS

Rod end male thread 20, 25 Rod end nut Rod End Male Thread Bore size (mm) 12 16 20 25 L1 X C1 9 10 12 15 H1 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 14 10.5 15.5 12 18.5 14 22.5 17.5 Basic Style A B A B Without auto switch With auto switch Bore size (mm) Stroke range (mm) 5ST C I N OB D K OA RA E L RB F M T H 10ST 5ST 10ST 5ST 10ST 5ST 10ST 12 16 20 25 M3 x 0.5 15.5 M4 x 0.7 6 8 7 12 32 38