Vacuum System Peripherals:

When ordering the mixed specifications of single and double solenoids, Specify the wiring. 11 11 stations 2 to 19 stations Both sides ... ... When creating the mixed specifications, complete the stations table on the right. 19 19 stations When creating the special specifications, complete the stations table on the right.

IDX-OM-W010

Specification for Option M 11 1 Safety instructions . 11 1 11 2 Specifications . 11 2 11 3 Installation of motor type auto drain . 11 3 11 4 Electric circuit . 11 3 Chapter 12 Specification for Option R 12 1 Safety instructions . 12 1 12 2 Specifications . 12 1 12 3 Power supply connection procedure . 12 2 12 4 Cautions for handling the GFCI . 12 3 12 5 Electric circuit . 12 3 Chapter 13

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

This could cause an auto switch malfunction. 8 6.5 N x M3 x 0.5 thread depth 4.5 Note 1) Note 2) Retraction end adjuster Extension end adjuster 3 depth 3 +0.03 0 22.5 (Extension end adjuster) 3.5 6.5 4 0.7 6.5 (Extension end adjuster) 0.3 22.2 15 17 36 24 16 32 1 12 16 F 3 depth 3 +0.03 0 5 4 x M3 x 0.5 thread depth 4 2 N 1 x F 10 30 3 x M4 x 0.7 thread depth 6 M 24 14.6 KA NA x M3 x 0.5

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

x 46) SV3000-21-3 (M4 x 53) SV2000-21-5 (M3 x 60) 10-SV1000 SX3000-57-4 10-SV2000 SY5000-11-15 10-SV3000 SY7000-11-11 10-SV4000 SY9000-11-2 264 Single Unit/Sub-plate Type [IP67 Compliant] Series 10-SV1000/2000/3000/4000 How to Order 10 W1 00 1 1 5 SV U D Clean series Series Thread type 1 2 3 4 10-SV1000 10-SV2000 10-SV3000 10-SV4000 Nil F N T Rc G NPT NPTF Actuation type Port size 2 position

Compact manifold regulator ARM5 Series

side OUT side Fitting size Straight R Elbow S Elbow T Elbow U Straight V Elbow W Elbow X Elbow Y Fitting size Straight R Elbow S Elbow T Elbow U Straight V Elbow W Elbow X Elbow Y 4, 5/32 2.5 6 11 35.5 2.5 6 11 35.5 4, 5/32 2.5 6 11 37.5 2.5 6 11 37.5 6 3 6.5 11 36 3 6.5 11 36 6 3 6.5 11 38 3 6.5 11 38 1/4 6.5 6 11.5 38.5 6.5 6 11.5 38.5 1/4 6.5 6 11.5 40.5 6.5 6 11.5 40.5 710 Regulator/

Rotary Table/

3.5 M3 x 0.5 M3 x 0.5 16 50.5 10.8 24.4 9.4 25 9.5 2H9 2 M3 x 0.5 4.8 20 22.5 2H9 2 11 2H9 2 M3 x 0.5 3.5 M4 x 0.7 M3 x 0.5 18 56 13.4 26.2 11.3 28 10 2H9 2 M3 x 0.5 5.3 21 24.5 2H9 2 11.5 2H9 2 M3 x 0.5 3.5 M5 x 0.8 M3 x 0.5 20.5 60 15.2 31 11.8 30.5 12 2H9 2 M3 x 0.5 5.3 25 27 2H9 2 13.5 2H9 2 M4 x 0.7 4.5 M6 x 1 M5 x 0.8 23 73.5 15.4 37.4 14.9 34.5 14 3H9 3 M4 x 0.7 6.5 29 32.5 3H9 3 15.5

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

0.2 28 0.2 22.7 35 37 16 6.3 5 12 2-R 3.5 2-M2.5 x 0.45 x 6l 4-M3 x 0.5 (Through-hole) 6 7 (Hexagon socket head cap screw) 2-M3 x 0.5 x 12.5l, 2-M3 x 0.5 (Hexagon bolt) (Hexagon nut) 4-M3 x 0.5 (Through-hole) W (10) 4-M3 x 0.5 thread depth 4.5 (Opposite side: Same) 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Modular F.R.L. Units

v*11 v*11 v*11 v*11 *1 Drain guide is NPT1/8 (applicable to the AF20-A) and NPT1/4 (applicable to the AF30-A to AF60-A).

MK

P O N M S Model With arm: MK -N 12 16 MKB12-N MKB16-N 4 20 29 8 18.5 M3 x 0.5 8 5 25 36 11 21.5 M4 x 0.7 11 20, 25 18-(0 to 10) R thread Auto switch Minimum bending radius of lead wire 10 In case of connector 2-M5 x 0.8 F (2) M8 x 1.25 Effective thread depth 11 through 2 x 2counterbore depth 7 depth 3 R + Clamp stroke Q + 2 x Clamp stroke Both ends tapped style: MKA M6 x 1.0 R + Clamp

Refrigerated Air Dryer

IDFB4E to 15E AT 1.6 [40] IDF IDU Air Flow Capacity 2.36 [60] Model IDFB3E IDFB4E IDFB6E IDFB8E IDFB11E IDFA D Circuit breaker 5 SCFM (8 m3/h) 13 SCFM (23 m3/h) 17 SCFM (29 m3/h) 19 SCFM (32 m3/h) 23 SCFM (39 m3/h) Air flow capacity (ANR) IDFB IDFB A Conditions: Inlet air pressure: 100 psi (0.7 MPa), Inlet air temperature: 100F (37.8C), Outlet air temperature: 50F (10C), Ambient temperature

7.4

A 4 A 4 81 (Closed center) 14.4 3.5 2n x V2, V3, V4, M3 <4(A), 2(B) port> V2: 2 Barb fitting V3: 3.2 Barb fitting V4: 4 Barb fitting M3: M3 thread Indicator light 36.2 With plug connector/light Formula L1 = 7.5n + 8.9, L2 = 7.5n + 17.9 n: Station (Maximum 20 stations) Dimensions n L 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L1 23.9 31.4 38.9 46.4 53.9 61.4 68.9 76.4 83.9 91.4 98.9

IDX-OM-W013

Specification for Option R 11 1 Safety instructions . 11 1 11 2 Specifications . 11 1 11 3 Power supply connection procedure . 11 2 11 4 Cautions for handling the GFCI . 11 3 11 5 Electric circuit . 11 3 Chapter 12 Specification for Option S 12 1 Safety instructions . 12 1 12 2 Specifications . 12 1 12 3 Electric circuit . 12 1 Chapter 13 Specification for Option T 13 1 Safety instructions

0.55

DC 5 6 24 VDC 12 VDC Made to Order Nil AC (50/60 Hz) Pilot exhaust port with piping thread (M3) specification (Refer to page 24).

Rotary Actuator

Applicable shaft types: S, W, Y X = Q1 = M L1 = L2 = L1 Q2 = M Q1 [mm] [mm] Size Thread 30 50 63 80 100 M3 x 0.5 2.5 M5 x 0.8 4 4 M6 x 1 5 5 M8 x 1.25 6.8 6.8 6.8 M10 x 1.5 8.5 8.5 M12 x 1.75 10.3 10.3 Rc1/8 8 8 Rc1/4 11 Size Thread 30 50 63 80 100 M3 x 0.5 2.5 M5 x 0.8 4 4 M6 x 1 5 5 M8 x 1.25 6.8 6.8 6.8 M10 x 1.5 8.5 8.5 M12 x 1.75 10.3 10.3 Rc1/8 8 8 Rc1/4 11 [

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

(mm) Model CXS25-10 S SS ZZ Z 10 94 118 30 20 104 128 40 30 114 138 40 40 124 148 40 21-/2210-/11-/12CXS25-20 CXS25-30 CXS25-40 CXS25-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 134 158 60 21-/2210-/11-/12100 184 208 80 CXS25-75 CXS25-100 21-/2210-/11-/1275 159 183 60 21-/2210-/11-/12858 Dual Rod Cylinder CXSL 1221CXS / 10-/1122Basic: CXS32, CXSL32 10-/11221221S ZZ SS 38 16 14 2

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Thread M3 (2 pcs.) M3 (3 pcs.) M3 (3 pcs.) M4 (4 pcs.)

MU

-X +0.058 0 +0.058 0 +0.058 0 +0.070 0 3 4 5 6 13 14 17 23 18 22 26 32 9 11 13 16 8 10 10 14 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 8 10 10 16 21 24 27 39 8.5 10 11 16 11 14 15 20 8.5 10 11 16 19.5 24 26 36 CD-MU02 CD-MU03 CD-MU04 CD-MU05 9 11 13 16 20Knuckle pin and snap ring are included.

MU

-X +0.058 0 +0.058 0 +0.058 0 +0.070 0 18 22 26 32 3 4 5 6 13 14 17 23 9 11 13 16 8 10 10 14 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 8 10 10 16 21 24 27 39 8.5 10 11 16 11 14 15 20 8.5 10 11 16 19.5 24 26 36 CD-MU02 CD-MU03 CD-MU04 CD-MU05 9 11 13 16 20Knuckle pin and snap ring are included.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

orientation Ceiling m2 Wall m3 Vertical m4 Horizontal m1 Note) M3 Static load m M1 m1 x g x X m2 x g x X m4 x g x Z M1 Static moment z y Y m1 x g x Y m2 x g x Y m3 x g x Z M2 Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a mass movable by thrust.

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

) 3-M3 X 0.5 thread depth 6 44 MDHR2-15E port position 42 B 45 120o 11 120o A C 36 M3 X 0.5 M3 X 0.5 Finger opening port Finger closing port 10 M3 X 0.5 Finger opening port M3 X 0.5 Finger closing port 25o 25o MHZ2 MHZJ2 6-M3 X 0.5 thread depth 6 (A, B, C common view) MHQ 3-3 depth 6 +0.02 0 34 (A, B, C common view) MHL2 12h9 0 -0.043 Auto switch mounting groove MHR 1.5 .