Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

44 23.5 55 50,100,150,200,250,300,350,400,450,500,550,600 Model KC KA KB KH KW LA LL LW LZ ML MM N PA PB PC Q QA QB L QW CY1F10 6.5 44 8 19 59 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 38 33 CY1F15 6.5 51 10 19 66 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 53 40 CY1F25 7.5 66 13 27 84.5 89 25.5 128.5 17 9 M5 x 0.8 24 65 65 8 129 5.5 14.5 70 52 P (Piping port) Model XA T XL YA XY YB

CE

9.5 39.5 3 43.5 7 42.5 6 20 47 13 47.5 13.5 44.5 10.5 52.5 18.5 46 12 50 16 49 15 32 55 17 5.5 17.5 52.5 14.5 60.5 22.5 54 16 58 20 57 19 40 79 39 79.5 39.5 76.5 36.5 84.5 44.5 78 38 82 42 81 41 50 82 44 82.5 44.5 79.5 41.5 87.5 49.5 81 43 85 47 84 46 63 85.5 41.5 86 42 83 39 91 47 84.5 40.5 88.5 44.5 87.5 43.5 Operating Range Auto switch model Bore size (mm) 12 20 32 40 50 63 D-A7/A80 D-A7H

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

44 23.5 55 50,100,150,200,250,300,350,400,450,500,550,600 Model KC KA KB KH KW LA LL LW LZ ML MM N PA PB PC Q QA QB L QW CY1F10 6.5 44 8 19 59 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 38 33 CY1F15 6.5 51 10 19 66 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 53 40 CY1F25 7.5 66 13 27 84.5 89 25.5 128.5 17 9 M5 x 0.8 24 65 65 8 129 5.5 14.5 70 52 P (Piping port) Model XA T XL YA XY YB

Compact Cylinder

5.5 1/8 13 63.5 15 63 10 to 50 41.5 33.5 46.5 38.5 15 18 70 10 M10 x 1.5 88 6.5 16 8 56 5.5 1/8 14 76.5 15 80 10 to 50 49 40 55 46 21 22 89 12 M14 x 2.0 113 9 19 9 70 9 1/4 14 98 19 100 10 to 50 56 46 62 52 21 26 109 12 105.5 M16 x 2.0 134 12.5 22 10 85 9 1/4 19 118 19 7 JCQ Series Auto Switch Mounting Auto Switch Proper Mounting Position (Detection at stroke end) and Mounting Height D-M9m

3

AB B MK MK Basic (mm) MK2T A B C D E F Yh9 G 45 52 64 77 H 16 16 20 20 I 9 9 11 14 J 7 7 8 10.5 K M6 x 1.0 M6 x 1.0 M8 x 1.25 M10 x 1.5 L 10 10 14 18 S 31.5 29 34 34.5 T 10.5 9 11.5 10.5 W 14 15 19 19 X 3 3 3.5 3.5 Z 6.5 6.5 7.5 7.5 AA 4.5 5 7 7 AB 1 1 1 1.4 AC 5.5 5.5 6.6 9 AE 1/8 1/8 1/4 1/4 Model 30 30 37 48 MKB32-Z MKB40-Z MKB50-Z MKB63-Z 0 0.062 0 0.062 0 0.062 0 0.062 49.5 57 71 84

VFR

Lead wire color Dot marking Orange Orange Yes Black Black Yes Green Green Yes Yellow Yellow Yes Brown Black Brown Orange Yellow Purple White White Red Yellow Red Black White Black 14 15 Pink 16 Blue 17 20 Red 21 22 Pink Red 23 Gray Red 24 25 18 Gray 19 13 14 15 17 Pink 19 Gray 21 23 16 18 Pink Yes 20 Gray Yes 22 24 Terminal no. Lead wire color Dot marking Terminal no.

PSxx-OMU0002CN

-A1 38L(2 ) B ZS-46-A2 38L(2 ) ZS-46-B + ZS-46-D ZS-46-5L 5 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch ZS-46-N7H 4mm ZS-46-C4L 6mm ZS-46-C6L 1/4 inch ZS-46-N7L -9No.PS-OMU0002CN-D OUT1 LCD OUT2 () LCD 4 ON/OFF ON/OFF (kPaMPa) -10No.PS-OMU0002CN-D digit() 1digit=1kPa 1,2,3,,99,100 1kPa -0.1001.000[MPa]F.S.=1.000(-0.100)=1.100[MPa] (

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Note 3) When specifying more than one option, enter symbols in alphabetical order. 19 Series VQ5000 Base Mounted Type Dimensions (mm) 1in 25.4mm Kit (Individual Terminal Block Kit) T1 83 29.5 29.5 2-1/8 (pilot EXH. port) 12 21 47.5 36 3 R2 PE 5 R1 1 P 2-G1 (electrical entry) SMC 6-3/4 Ports P (SUP), R (EXH) 179 106 46.8 59.2 9 9 U side 83.5 55.5 M5 ground screw 19 34.5 n 12 X 2n-3/8, 1/2

VQ5000

Note 3) When specifying more than one option, enter symbols in alphabetical order. 19 Series VQ5000 Base Mounted Type Dimensions (mm) 1in 25.4mm Kit (Individual Terminal Block Kit) T1 83 29.5 29.5 2-1/8 (pilot EXH. port) 12 21 47.5 36 3 R2 PE R1 5 1 P 2-G1 (electrical entry) SMC 6-3/4 Ports P (SUP), R (EXH) 179 106 46.8 59.2 9 9 U side 83.5 55.5 M5 ground screw 19 34.5 n 12 X 2n-3/8, 1/2

Piping: 41R (Base Mounted), Stations: 19 Stations, A, B Port: N3T (5/32" One-touch Fitting)

Stations: 19 Stations, Port Size: N3T (5/32" One-touch Fitting), Option: D (DIN Rail Mounting), CE Compliant: No

Body: 5 (Base Mounted), Stations: 19 Stations, Port Size: N3T (5/32" One-touch Fitting)

Manifold Type: 42 (Base Mounted), Valve Stations: 19 Stations, A, B Port: N3T (5/32" One-touch Fitting NPTF)

Manifold Type: 41 (Base Mounted), Valve Stations: 19 Stations, A, B Port: N3T (5/32" One-touch Fitting NPTF)

Auto Switch Guide

Auto Switch Internal Circuit D-C73 LED Brown OUT (+) Contact protection box CD-P11 CD-P12 Brown Resistor Reed switch Zener diode OUT () Blue Weight Blue (g) D-C73 D-C76 D-C80 Auto switch model 0.5 3 5 9 46 76 10 50 9 46 D-C76 Lead wire length (m) DC (+) Brown LED (+) Resistor Reed switch Reed switch Load DC OUT Black Reverse current prevention diode Dimensions () DC () Blue D-C80 Contact

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

4.1 14.7 12 0.3 mm2 84.3 Cable type (TT) 3 52-SY5420-TT-01 (-F2) 5 Max.10 L (Lead wire length) 189.6 Lead wire marking No.1 (+), No.2 () 0.75 mm2 101.1 7 ATEX Compliant Body Ported Type Series 52-SY7000 Dimensions 2-position single L plug connector (L) 52-SY7120-L-02 (-F2) In case with foot bracket 52-SY7120-L-02-(F1) 29.4 20 2 x M4 x 0.7 Threads depth 6.5 (For bracket mounting) 57 24.5 7 46

Plate Cylinder with Lock Series MLU

CD-MU02 Model MLU25 MLU32 MLU40 MLU50 Model MLU25 MLU32 MLU40 MLU50 Z 142.5 159 171 205.5 LX RR 8.5 10 11 16 LD LU 11 14 15 20 LC 16 18 20 28 Z LB 27 31 36 46 LB 27 31 36 46 LX RR 8 10 10 16 LA 35.5 41 47 62 ZZ 151 169 182 221.5 L 52.5 59 67 81 LA 35 41 46 62 LD LU 13 14 17 23 ZZ L 52.5 59 67 81 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 The L, Z and ZZ dimensions are reference dimensions when

PSxx-OMU0008CN

-A1 C A3 ZS-46-E B ZS-46-B E ZS-35-B D ZS-46-D + F ZS-35-E -9No.PS-OMU0008CN-D / A ZS-46-A1 38L(2 ) C ZS-46-E 310L(2 ) ZS-46-B ZS-35-B ZS-46-D + ZS-35-E ZS-46-5F 5 2 m ZS-27-01 ZS-35-01 -10No.PS-OMU0008CN-D OUT1 LCD OUT2 () LCD 4 ON/OFF ON/OFF (kPaMPa) -11No.PS-OMU0008CN-D digit() 1digit=1kPa 1,2,3,,99,100 1kPa -0.1001.000[MPa]F.S.=1.000(-0.100)=1.100[MPa]

AC Servo Motor Driver (Pulse input type/Positioning type)

Parameter Configuration using Setup software (MR Configurator2TM) .19 5.1 PC Setup software (MR Configurator2TM ) . 19 5.1.1 Installation Method . 19 5.2 Basic driver set-up for Initial Test Drive . 19 5.2.1 Start up the Setup software (MR Configurator2TM). 20 5.2.2 System Settings . 21 5.2.3 Model Selection . 21 5.2.4 Driver ON LINE Check . 22 5.2.5 Help Function . 22 5.3 Parameter setting

VK3000

3 88 65 4 107 84 5 126 103 6 145 122 7 164 141 8 183 160 9 202 179 10 221 198 11 240 217 12 259 236 13 278 255 14 297 274 15 316 293 16 335 312 17 354 331 18 373 350 19 392 369 20 411 388 L1 VFN L2 Body ported (Top ported) Type 21 Manifold Grommet: G DIN terminal: D VV5K3-21Station (P port) (P port) n1 = Number of VK3000 n2 = Number of VK300 L Dimension n: Stations n L 1 38 27 2 57 46 3