reduces flow setting time

13.2 30.1 21.5 40 14.2 16 AS231FS1-02-03 (S) 5/32 7.2 9.6 12 1/8 13 (12.7) 24 AS231FS1-02-07 (S) 1/4 11.2 19 33.8 21.4 43.9 26 AS231FS1-02-09 (S) 5/16 13.2 34.9 23.5 46 14.2 27 AS231FS1-02-11 (S) 3/8 15.9 20.9 38.1 24.7 47.3 15.6 28 AS331FS1-02-07 (S) 1/4 3/8 19 11.2 12.9 16.6 20.2 36 21.4 57.8 63.1 61.7 57.9 56.5 13.3 24.5 19.2 49 AS331FS1-02-09 (S) 5/16 13.2 37.1 23.5 59.9 14.2 50 AS331FS1

17

MGPM, MGPL, MGPA Common Dimensions (mm) Nil TN TF P Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA J JA JB JC K L MM ML NN OA OB OL 25,50,75,100 125,150,175,200 250,300,350,400 80 100 22 26 7.5 10.5 15 10 46 56 16 19 24 31 38 45 54 62 96.5 56.5 91.5 19 16.5 14.5 202 M12 45.5 M12 x 1.75 25 M12 x 1.75 10.6 17.5 3 Rc3/8 NPT3/8 G3/8 116 66 111.5 22.5 20.5 18 240 M14 55.5 M14

5 Port Solenoid Valve

COM. () COM. 23 24 (+) 26 21 Note) 22 Positive COM Negative 19 20 19 20 COM 17 18 17 18 15 16 15 16 13 14 13 14 Note) Mounting valve has no polarity.

Rotary Clamp Cylinders

17 11.5 4.5 5.5 7.5 0 1.5 (4) 12 16 21 19 12 4 6 8 0 2 (4.5) 16 Note 1) ( ): D-A93 Note 2) Size W is suitable for mounting models D-M9, D-M9W, D-M9AL, and D-A9.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

77 46 Refer to p.1.4-19 and 1.4-20 for further information of rod end nut and accessories. 3.8-8 End Lock Cylinder Series CBM2 Dimensions: With Mounting Bracket (Refer to p.3.8-8 for other dimensions.)

Cylinder with Lock Series CLS

PLC: Programmable Logic Controller Refer to pages 14 through 19 for sections related to auto switches.

Fieldbus system EtherNet/IP compatible SI Unit

Red ON The power supply voltage for control and input is below 19 VDC. (When diagnostic parameter is enabled) PWR(V)-LED LED display Content OFF The power supply voltage for output is below 19 VDC. (When diagnostic parameter is disabled) Green ON The power supply for output is correct. Red ON The power supply voltage for output is below 19 VDC.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

L1 With auto switch Without auto switch Standard stroke (mm) Bore (mm) L LD LG LH LT LX LY LZ X Y Inch Metric 24 25.5 28.5 32.5 LS 15 15 24 24 B 27 27 36 39 A 54 54 65 69 LS 10 10 14 14 B 22 22 26 29 A 49 49 55 59 12 16 20 25 21.5 21.5 22.5 24.5 13.5 13.5 14.5 15 5 to 30 5 to 30 5 to 50 5 to 50 4.5 4.5 6.6 6.6 2.8 2.8 4 4 17 19 24 26 2 2 3.2 3.2 34 38 48 52 29.5 33.5 42 46 44 48 62 66 8 8

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

x 1 80 80 Male thread 100 100 Mounting 125 125 M16 x 1.5 Pad type Female thread H Heavy duty Material N S NBR Silicon rubber Urethane rubber Fluororubber U F E EPR 1190 Series ZPT Vacuum Pad: Large/Heavy Duty Type Vertical Vacuum Entry: Without Buffer ZPT H-A14 (Male thread) 40 50 ZPT H-B (Female thread) 40 50 1/8 (Rc, NPT, NPTF) M14 x 1 Width across flats 24 Hexagon width across flats 19

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

46 Refer to p.1.4-19 and 1.4-20 for further information of rod end nut and accessories.

•

71 43 19 14 190 230 15 M14x1.5,15 13 0125 Up to 1000 50 47 143 145 17 15 27 171 27 . t3 128 20 212 112 255 '15 'UpJo.1 QOO 50 47 157 1060 32 19 15 43 M14n.. ?

/

Q R R 53.5 56.5 56.5 59 59 R 69.5 72.5 72.5 75 75 M 12.8 19 23 19 23 Q 42 52 55 58 61 S Q 41 51 54 57 60 S K 6 8 8 8 8 J M4 M5 M5 M5 M5 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 46 56 59 62 65 30 40 45 50 45 50 18 22 30 22 30 68 78 85 85.5 92 9 10.5 14 10.5 14 19.5 27 30 33 33 36 36 48.5 51.5 51.5 54 54 41 51 54 57 60 65.5 68.5 68.5 71

ZX

46 Vacuum Module: Vacuum Pump System Series ZX Adsorption confirmation switch (ZSP1) ZX100-K1-P Vacuum switch (ZSE3) ZX100-K1-D Spacer 1: ZX1-S1 Adjustment needle ZX ZR Spacer 1 (For side mounting) DOWN button Manual override (Non-locking) UP button ZM 3.6 (Mounting hole) 51 41 1 ZH 3.6 RESET button SET button 2-R1.8 3.6 (Mounting hole) (Mounting hole) 1 10 19 22.6 (Mounting hole) 1 10

AC Servo Motor Driver (Pulse input type)

Servo amplifier Driver Controller (Note 6) CN1 (Note 6) (Note 2) 21 DICOM 24VDC (Note 4) CN1 Trouble (Note 5) 20 46 DICOM 48 ALM RA1 Zero speed detection DOCOM 23 ZSP (Note 3) Emergency stop Servo-on Reset Speed selection 1 Speed selection 2 EMG SON RES 42 15 19 (Note RA2 Limiting speed 25 VLC RA3 Ready (Note 10) 49 RD SP1 SP2 41 16 RA4 10m max.

AC Servo Motor Driver (SSCNET /H Type)

Parameter Configuration using Setup software (MR Configurator2TM) 16 6.1 Setup software (MR Configurator2TM) . 16 6.1.1 Installation Method . 16 6.2 Basic driver set-up for Initial Test Drive . 16 6.2.1 Start up the Setup software (MR Configurator2TM) . 17 6.2.2 System Settings . 18 6.2.3 Model Selection . 18 6.2.4 Driver ON LINE Check . 19 6.2.5 Help Function . 19 6.3 Parameter setting (

HRX-OM-R026

PV SV 5.21 Communication function HRSH Series 5-80 HRX-OM-R026 Chapter 5 Display and setting of various functions 46. Select contact output signal 1 function from the table below with [] key or [] key, and confirm by pressing SEL.

SV

GATEWAY UNIT EX500 SERIES PE SOL RUN MADE IN JAPAN BUS ERR COM TYPE 1 63 73 88 48.8 R2.6 COM D COM C COM B COM A 24 VDC R2.6 160 37.9 136 46 10 1-2-22 19 Series SV Series EX500 Decentralized Serial Wiring How to Order Input Block How to Order Input Manifold Input unit manifold EX500 IE EEX500 IB1 E 8 1 Input unit specifications Block type Connector type 1 2 3 4 5 6 M8 connector, PNP specifications

Clamp Cylinder with Lock Series CLK1

Hs 46 50 56 Approx. Ht 26 26 26 16 Series CLK1 Clamp Cylinder with Lock Auto Switch Specifications Lead wire colors inside [ ] are those prior to conformity with IEC standards.

Air Cylinder Series MB

27 60 32 110 136 54 46 52 65 75 95 114 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 13 14 15.5 16.5 19 19 47 51 58 58 72 72 16 16 16 16 16 16 4 4 5 5 5 5 M6 X 1 M6 X 1 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 6 6 7 7 10 10 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 27 27 31.5 31.5 38 38 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9

CG1

TU TV TW TX TY TZ 8d9 10d9 12d9 14d9 16d9 18d9 18d9 22d9 18.1 20.7 23.6 27.3 29.7 34.3 35.8 39.8 49.4 58.4 72.4 90.4 42 42 48 56 64 74 72 93 16 20 22 30 36 46 85 100 28 28 28 30 36 46 45 60 38.3 42.1 53.8 64.6 79.2 97.2 110 130 CG-020-24A CG-025-24A CG-032-24A CG-040-24A CG-050-24A CG-063-24A CG-080-24A CG-100-24A 20 25 32 40 50 63 80 100 (mm) Part No.