CG1

X 0.8 M5 X 0.8 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)3/8 Rc(PT)1/2 69 (77) 11 11 11 12 13 13 M5 X 0.8 106 (114) 16 16 16 16 18 18 22 22 15 (16) Up to 200 201to350 23 30 19.5 10 (12) 40 69 (77) 111 (119) 15 (16) 16.5 20 26 32 38 50 60 M5 X 0.8 Depth 7.5 5.5 M6 X 0.75 Up to 300 301to400 25 25 19.5 27 32 32 37 37 10 (12) 40 71 (79) 113 (121) 15 (16) 5.5 6 7 7 10 10 M5 X 0.8 Depth

Auto Switch Guide

CP95 Auto switch mounting screw M5 x 0.8 x 16 l 1.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

With air cushion FT F 4 x FD 0 E0.05 FX0.15 B B FX0.15 (mm) Bore size 40 B 61 E 25 F 2 FX 46 FD 6.6 FT 8 50 63 76 92 30 32 2 2 58 70 9 11 9 9 Note) End boss is machined on the flange for E. Other dimensions are the same as basic type.

Table of Contents

With auto switch Note) 5 stroke (CU16-5D): 14.5 mm Bore size (mm) R T S 33 36 30 36 40 42 Z 46 52 46 55 63 69 S 33 36 40 46 50 52 Z 46 52 56 65 73 79 6 10 16 20 25 32 7 9 12 16 20 24 6 depth 4.8 6 depth 5 7.6 depth 6.5 9.3 depth 8 9.3 depth 9 11 depth 11.5 5 7 Free Mount Cylinder Double Acting, Single Rod Series CU Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Thread size M4 x 0.7 8 2 46 Effective thread length (mm) Quantity P.C.D.

ZR

PE port Vacuum release pressure port M5 PD port Ejector unit Non-locking push type Manual override EXH PE PE 109 PD PD PD PD 80.8 81.5 PS PS PV PV 61.5 52 50 13.5 PS PD 42 35.5 33 31.5 28 PV 17 16.5 PV PV Release flow rate adjustment needle Vacuum release pressure port M5 PD port Pilot valve supply pressure port M5 PS port 3 2.5 1 1.5 7.5 7.5 4.5 2-Rc 1/2 EXH port 2-M5 PD port Air supply

Intrinsically Safe Valve

) 21 4 Insulator: Black () B A 23 PE 38 46 A B X Insulator: Red (+) Manual override EB EA P 21.5 21 69 6.4 67.2 123.3 M5 x 0.8 (Pilot EXH port) 71.2 (E-type) L (Lead wire length) 0.3 mm2 1.55 26.5 11.5 13.5 20.5 20.5 5 x 3/8", 1/4" (Piping port) 33 L-type plug connector with cover (LL) 53-SY7140(R)-LL02 03 L (Lead wire length) 118.2 Insulator: Red (+) Insulator:

Rotary Actuator

(Example) For M4: L2 = 8 Applicable shaft types: X, Z L1 + (3 x P) Q1 = M C1 = C L2 = L1 = L2 = D1 = Q2 = M Q2 = M C1 Z axis X axis X = L1 = [mm] [mm] [mm] Size Q1 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size Q2 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size X L1max D1 30

High Vacuum Angle Valve, XL Series

For further details, refer to mounting positions under Replacement heaters/Part Nos. on page 46.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

A RR1 A1 L1 MM RR1 U1 NZ L L1 E1 10 12 16 20 +0.048 0 0.2 0.4 0.1 0.3 0.2 0.4 0.2 0.4 +0.048 0 5 6.5 8 10 0.4 0.2 0.2 0 0.4 0.2 0.4 0.2 10 12 16 20 12 16 20 25 12 16 20 25 5 6.4 8 10 21.5 32 34 41 6 8 8.5 10.5 16 25 25 30 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.25 6.3 8.1 10.3 12.8 7 14 11.5 14 21.5 6 11 8.5 16 21 25 30 M5 x 0.8 6.3 8.1 7 10 10 14.6 I-G012 I-Z015A I-G02 I-G03 Y-G012

PSxx-OMU0005CN

M5 01 R1/8 N01 NPT1/8 C4L 4mm C6L 6mm -8No.PS-OMU0005CN-C / A ZS-46-A1 38L (2 ) B ZS-46-A2 38L (2 ) ZS-46-B + ZS-46-D ZS-46-5F 5 2 m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4L 6mm ZS-46-C6L -9No.PS-OMU0005CN-C OUT1 LCD OUT2 LCD 4 ON/OFF ON/OFF (kPaMPa) -10No.PS-OMU0005CN-C digit() 1digit=1kPa 1,2,3,,99,100 1kPa F.S.() -0.100 1.000[MPa]F.S.=1.000(-0.100)=1.100[

CL

Double Acting, Single Rod Rod Side Flange Style (F) E D P CLJ2F1619 16 2 8 Silencer 12 25.5 Spring lock CL Piping port M5 x 0.8 CL1 Head cover port in axial direction (R) MLGC Manual unlocking cam M5 x 0.8 pressurized locking port Pneumatic locking and spring and pneumatic locking 71 46 6 M5 x 0.8 unlocking port Unlocked when pressurized CNG 31 M5 x 0.8 Rod side cylinder port Lock nut MNB

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

A 23 23 E P B A X Insulation Red (+) 46 EB EA P 21 69 21.5 M5 x 0.8 (Pilot EXH. port) 92.6 44.1 67.2 180.8 L 71.2 (For E type) (Lead wire length) 1.55 0.3 mm2 26.5 13.5 11.5 20.5 20.5 5 x 3/8", 1/4" (Piping ports) 33 96.9 L plug connector with cover (LL) 3 02 03 52-SY7440 (R) -LL5 L 170.6 (Lead wire length) Insulation: Red (+) Insulation: Black () 0.3 mm2 4.1 41.7

51

64 74 16 20 22 30 36 46 28 28 28 30 36 46 43.4 48 59.4 71.4 86 105.4 CS1 Up to 300 Up to 300 Up to 300 CS2 Up to 300 Up to 300 Use a thin wrench when tightening the piston rod.

Auto Switch Guide

Auto switch CEP1 CE1 Auto switch mounting screw M5 x 0.8 x 16 l 1.

AS-FG

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE KE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 N AS-FG AS-FG AS-FP AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 542. Use 1/8" tube.

Series IDG

Note 5) When very clean air is required, refer to page 46 "Precautions on Design", item 2.

Table of Contents

Refer to dimensions on pages 14-20-46 to 14-20-47 for details. Sight glass Tempered glass AMF850 is aluminum casted. Replacement Parts AMF450 Model No.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

36.5 13.5 15 32 25 23 M5 24 59 46 57 60 54.5 48.5 101 57 68 1/2 22 45 89 41 11 17 36 22.5 23 M5 26 64.5 48 62.5 62 60 50.5 103 62.5 70 1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35 60 101 41 17.5 17 36 30 28.2 M5 26 70 48 68 62 65.5 50.5 103 68 70 3/4 4 Direct Operated 2Port for Water Series VCW Dimensions (N.O.)

VCW

36.5 13.5 15 32 25 23 M5 24 59 46 57 60 54.5 48.5 101 57 68 1/2 22 45 89 41 11 17 36 22.5 23 M5 26 64.5 48 62.5 62 60 50.5 103 62.5 70 1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35 60 101 41 17.5 17 36 30 28.2 M5 26 70 48 68 62 65.5 50.5 103 68 70 3/4 4 Direct Operated 2Port for Water Series VCW Dimensions (N.O.)