Direct Solenoid

cdptlon #11 Manitold glock *41 Manitold glock *'23 Manifold Block ir28 Manitold Block 1 g 1C 1 D H$?

F

18.1 18.5 15.2 25.3 5/16 32.4 NAS221F-U02-09 19 17 8.9 23.3 14.5 1/4 5/32 18.5 17.2 32.5 NAS221F-U02-03 31.1 32 26.6 39.4 34.4 11.4 24.9 16.5 3/16 34.2 NAS221F-U02-05 32.4 17 13.2 25.2 1/4 34.5 NAS221F-U02-07 32.9 15.2 27.2 18.5 5/16 36.4 NAS221F-U02-09 33.6 19 17.9 33.9 21 3/8 3/8 23 19 43.2 NAS321F-U02-11 35.3 13.2 27.8 17 1/4 19.4 39.3 NAS321F-U03-07 53.9 37.6 32.6 45 40 15.2 29.5 18.5

ZR

(VJ3133) Air operated VJA3130 0.245 0.213 0.194 0.187 0.174 0.184 0.214 K2 K3 C1 C2 C3 C4 Weight includes Bracket B. (Solenoid valve: 24 VDC, M plug connector type) Air operated VJA3130 N.C. (VJ3133) N.C. (VJ3133) Double SOL. (VJ3233-X18) How to Order Refer to page 13-3-34 for further part no. information.

SZ3000

When the port size of the external pilot block assembly is 4, indicate with C4 in section (c).

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

L plug connector (L): VQZ115-L-C3/C4/C6/M5-PR M plug connector (M): VQZ115-M-C3/C4/C6/M5-PR Cover diameter 1.5 Cross section 0.23 mm2 (Lead wire length) 54 <59> 300 Indicator light Indicator light 60.5 <65.5> 300 (Lead wire length) 41 35 Cover diameter 1.5 Cross section 0.23 mm2 < >: AC < >: AC 4-14-8 9 Body Ported 3 Port Solenoid Valve (Valve Single Unit) Metal/Rubber Seal, Body Ported,

Intrinsically Safe Valve

53-SS5Y5-41-05-01 1 set (Type 41, 5 station manifold base part no.) 53-SY5240-LL3 2 sets (Double solenoid part no.) 53-SY5140-LL3 2 sets (Single solenoid part no.)

Compact Manifold Regulator

ARM10-07 (One-touch fittings: IN 6, OUT 4) ARM10F-07-1 ARM10-07-1 (One-touch fittings: IN 6, OUT 4) Condition: Inlet pressure 0.7 MPa Condition: Inlet pressure 0.5 MPa 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0.0 0.00 0 50 100 150 0 20 40 60 80 100 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM10F-08 ARM10-08 (One-touch fittings

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

39.3 17 41 29.5 18.5 8 15.2 79 77 R 3/8 19 23 9.8 1.2 47.4 19.8 52.6 AS321F-N03-09SD AS321F-03-10SD NPT 3/8 19 23 9.8 1.2 47.4 5/16" 15.2 29.5 41 18.5 43.3 31.8 21 10 18.5 81 79 19.8 52.6 AS321F-N03-11SD AS321F-03-12SD 3/8" 44.3 17.9 31.8 43.3 21 32.8 22 12 20.9 83 81 AS421F-N04-11SD AS421F-04-10SD 3/8" 17.9 33.6 47.9 21 47.9 33.6 21 10 18.5 141 141 24 28.6 12.4 1.2 55.8 1/2" NPT 1/2 23.8

Table of Contents

Model no. of switch rail accessory is listed on pages 8-15-32 and 8-15-41.

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Compact manifold regulator ARM5 Series

(located on both the right and left side) Before disassembly, be sure to check that no inlet or outlet pressure is applied and exhaust the internal pressure thoroughly before starting the job. 707 Regulator Single Unit Type ARM5S Series How to Order A 07 S ARM5 Single unit type 1.

SZ3000

Size and weight reduced by eliminating the manifold base C4/C6 One-touch fitting C4/C6 One-touch fitting (Elbow type) SZ3000 Series Height 31% reduction (Compared with SX3000-45 with DIN rail manifold and 5 stations) FREE LOCK Weight 12% reduction M5 port block assembly A port 1-3-1 B port 2 Series SZ3000 Precautions 1 Be sure to read before handling.

Air cylinder (Series compatible with secondary batteries)

Grease pack part number: GR-D-005 (5g), GR-D-010 (10g), G-D-100 (100g) Table 13 Wear ring Wear ring number 40 C2A40-07-305B 50 C2A50-07-305B 63 C2A63-07-305B 80 C2A80-07-305B 100 C2AA0-07-305B C a u t i o n The seal is not delivered in sealed packaging for storage independently, so it must be used within 1 year. 3-3-2.

Table of Contents

OUT1 output mode selection in Initial Setting on page 16-2-41. SET Press the SET button.

5 Port Solenoid Valve SY Series

One-touch fitting for 4 C4 SY3000 2 position double One-touch fitting for 6 C6 One-touch fitting for 4 C4 2 One-touch fitting for 6 C6 For DC SY5000 One-touch fitting for 8 C8 5 24 VDC 6 12 VDC SY9000 has no bracket.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

10 16 4.3 2-3.2 Mounting holes Manual override 24.5 7.8(C3, C4, C6) (M5: 5.7) Cover dia 1.6 Cross section 0.34mm2 (Lead wire) 34 35 300 (53) 27.5 16.3 18 1.2 13.8 13.6 7 (7.8) (24.5) 2-3.4 Mounting holes 41 Foot bracket M5 X 0.8 P port M5 X 0.8 R port R 3 P 1 10.7 9 M5 X 0.8 External pilot port 32 (Only external pilot style (R)) L plug connector (L): VQZ115-lLl-C3, C4, C6, M5-PR M plug connector

ZP

51 11 14.5 20.5 15 18 22 34.5 41 51 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

V

1/4 09 5/16 11 3/8 Tube T01 1/8NPT T02 1/4NPT 06 6mm Tube 08 8mm Tube 10 10mm Tube 01 Rc 18 02 Rc 14 Operating Temperature Range 5 ~ 60C / 40~140F N Canada, USA Other (PT) Lubrication Forbidden N O Z Z L E D I A M E T E R V A C U U M P O R T 05 0.5mm 07 0.7mm 10 1.0mm 13 1.3mm 06 6mm Tube 08 8mm Tube 01 Rc 18 02 Rc 14 07 1/4 Tube 11 3/8 Tube T01 1/8NPT T02 1/4NPT S Y M B O L S T Y P E I

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

18.5 29.5 55.3 23 9.8 49.3 R 1/4 1.2 19 21.8 AS321F-02-10SD AS321F-N02-07SD 1/4" 13.2 27.8 39.3 17 10 18.5 43.3 21 31.8 AS321F-02-12SD AS321F-N02-09SD NPT 1/4 19 23 9.8 21.8 55.3 1.2 49.3 12 5/16" 15.2 29.5 41 18.5 20.9 44.3 22 32.8 AS321F-03-06SD AS321F-N02-11SD 6 17.9 31.8 43.3 21 3/8" 12.8 39.3 17 27.8 AS321F-03-08SD AS321F-N03-07SD 8 15.2 41 18.5 29.5 1/4" 13.2 27.8 39.3 17 53.7 23 9.8

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

10 15.3 4.2 19 ZH15DS-10-03-12 22.45 AMJ 93.3 58.5 41 10 15.3 4.2 19 ZH15DL-10-03-12 22.45 (Mounting hole) Model I J K L M N O P Misc.