Table of Contents

Mitsubishi Electric Corporation Yaskawa Electric Corporation 02 03 04 05 05 5m Cable length 2m 3m 4m 5m Applicable cables Model Manufacturer part no.

Precautions 1

NT-02 NT-03 NT-04 Part no.

Free Mount Cylinder for Vacuum Series ZCUK

HEP Related Equipment Port size A Stroke range (mm) 5 to 30 A' B C d D E F FK FL FY GA GC Model Air port Vacuum port M5 x 0.8 M5 x 0.8 M5 x 0.8 16.5 Note 1) Note 2) ZC(D)UKQ16 ZC(D)UKQ20 ZC(D)UKQ25 ZC(D)UKQ32 M5 x 0.8 M5 x 0.8 11 12.5 20 32 2 6 7 8 13 17 28 19 12 5 to 50 14 18 22 26 32 40 40 50 62 3 4 5 8 10 12 9 10 11 8 10 12 16 20 24 20 22 29 33 43.5 51.5 19 21.5 23 21.5 22 22.5 M5 x 0.8

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

Residual pressure relief 3 port solenoid valve Applicable air combination Spacer Spacer with bracket Piping adapter Silencer wAC30-A Air filter + Mist separator + Regulator (AF30-A) (AFM30-A) (AR30-A) VP517 AC25-A, AC30-A Y300-A Y300T-A E300-03-A AN30-03 AN302-03 *1 Connection threads are not available for the residual pressure relief 3 port solenoid valve.

Mist Separator Series AFM20/30/40

Nijverheidsstraat 20 B-2160 Wommelgem Belguim TEL: 03-355-1464 FAX: 03-355-1466 TAIWAN SMC Pneumatics (Taiwan) Co.,Ltd. 17, Lane 205, Nansan Rd., Sec.2, Luzhu-Hsiang, Taoyuan-Hsien, TAIWAN TEL: 03-322-3443 FAX: 03-322-3387 POLAND SMC Industrial Automation Polska Sp.z.o.o. ul.

CL

x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 Without rod boot ZZ e f h l ZZ With rod boot Stroke range Bore size (mm) H1 WA WW WB WH H PG PH PL PW S TA TB P TC W 30 30 25 20 20 25 32 40 178 193 196 221 198 215 218 241 55 62 62 70 16 17 17 17 30 30 35 35 35 40 40 50 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 23 25 28.5 33 11 11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86 96 97 105.5 20

VCW

36.5 13.5 15 32 25 23 M5 24 59 46 57 60 54.5 48.5 101 57 68 1/2 22 45 89 41 11 17 36 22.5 23 M5 26 64.5 48 62.5 62 60 50.5 103 62.5 70 1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35 60 101 41 17.5 17 36 30 28.2 M5 26 70 48 68 62 65.5 50.5 103 68 70 3/4 4.5-6 Direct Operated 2Port for Water Series VCW Dimensions (N.O.)

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

36.5 13.5 15 32 25 23 M5 24 59 46 57 60 54.5 48.5 101 57 68 1/2 22 45 89 41 11 17 36 22.5 23 M5 26 64.5 48 62.5 62 60 50.5 103 62.5 70 1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35 60 101 41 17.5 17 36 30 28.2 M5 26 70 48 68 62 65.5 50.5 103 68 70 3/4 4 Direct Operated 2Port for Water Series VCW Dimensions (N.O.)

Compact Vacuum Unit

(Refer to Manifold on page 17.) 12 12 stations Common Release Pressure (PD) Port Size Note) Common Supply (PV) Port Size 01 01N 01F M5 Without PD port (PV = PD) M5 x 0.8 (PV PD) Rc1/8 NPT1/8 G1/8 M5 x 0.8 Nil M5 Note) Refer to on page 1 for the combinations of supply valve and release valve selectable.

Electric Actuator with Integrated Guide

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2002 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

Low Friction Cylinders Series MQ

x 0.8 10 depth of counterbore 1.5 C M D I L B 2 x OA effective depthRA 2 x N through A 10, 16, 20 REA M5 x 0.8 F 2 x 4 x OB Depth of counterbore RB 2 x 4 x OA effective depth RA REB REC I C 4 x N through CY 0.2 D E CX M MQ RHC L B 0.2 M E A RZQ (mm) Bore size (mm) D Note) DM N OA OB RA RB A B C E F I L 4 41 38 SR3 4 9 22 3 16 3.2 M3 x 0.5 6 -X 6 18 3.2 M3 x 0.5 6 41 38 SR5 6 9 24 3

MY1

M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) PP TT UU GB TT UU G NW GB 10 N A Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ M5 x 0.8 (Hexagon socket head plug) M5 x 0.8 (Port) (WW) GB PP XX XX G Centralized piping Centralized piping 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom port (Applicable O-ring

10

M5 M5 Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 Size 1 2 6 8 8 8 12.8 19 19 23 P 1 Resin body is not available. 2 Other Options, which can be combined, are A, B, D, E, Z. 3 Electrical entry direction 3 2 x M thread Depth D 90 Standard Note) Resin body is not available.

ZB-OM00301

PVPD 00 1 2 PVPD 03 0.3 0.35MPa 0.4MPa PVPD 04 0.4 0.35MPa 0.45MPa 3 05 0.5 0.35MPa 2) PV 06 0.6 0.5MPa 1) PD 3 0 1 PVPD PVPD PVPD PVPD K1 N.C. N.C. 2 J1 N.C. M5 Q1 +COM N.C.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

AS120-M5 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 522 Series AS Speed Controller: Standard Type Elbow Type (Metal Body) Note) The flow characteristics are representative values.

Compact Guide Cylinder

x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x 2) 4.3 8 3.5 M5 x 0.8 7.5 19 21 10 36 18 66 54 75 15.9 29 M5 x 0.8 7.5 4.5 25 (20 x 2) 4.3 8 4 M5

VCW

, 3/8 VCW31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 59 46 57 60 54.5 48.5 101 57 68 104 1/2 22 45 90 41 11 17 36 22.5 23 M5 8 26 64.5 48 62.5 62 60 50.5 103 62.5 70 107 1/4, 3/8 VCW41 30 50 94 41 13.5 17 36 25 23 M5 8 26 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 70 48 68 62 65.5 50.5 103 68 70 119 3/4 17-2-55 8 Series VCW Dimensions (N.O.)

30

(mm) Connection thread Rc T (M) Width across flat M Weight (g) Mounting hole L1 L2 Model H1 H2 KQB2E23-02 KQB2E04-01 KQB2E04-02 KQB2E06-01 KQB2E06-02 KQB2E06-03 KQB2E08-01 KQB2E08-02 KQB2E08-03 KQB2E10-02 KQB2E10-03 KQB2E12-03 KQB2E12-04 KQB2E16-03 KQB2E16-04 3.2 3.4 1/4 1/8 1/4 1/8 1/4 3/8 1/8 1/4 3/8 1/4 3/8 3/8 1/2 3/8 1/2 17 14 17 11 12 31 25.8 30.9 24.2 31.6 33 26.3 32.4 34 31.6 33.6

Speed Controller with

Body size 100 200 205 300 400 Metric size Inch size M3, M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard Grease-free (Sealant: Fluoro coated) + Restrictor (Without Check Valve) -X21 02 23 04 06 08 10 12 01 03 07 09 11 13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 2 3.2 Ex.)

MLGP

MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking ID IE IF IG IH J K L 79.5 10 10 12 32.5 8.5 9 9 83 M5 M5 M6 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 9.5 10 9 24 30 34 6 7.5 9 18 21 24 32 3 20 25 32 20, 30, 40, 50, 75, 100, 125 150, 175, 200, 250, 300, 350 84 36.5