For nozzle size 18, 20 M3 x 0.35 x 88 4 For nozzle size 10, 13, 15 + with function plate M3 x 0.35 x 89 4 [For ZSE4 spec.] [For ZSE4 spec.]
25 0 26 13.5 89 4.5 2.8 40 114 26.5 40 83 5.5 12 33 24 41.5 30 29.5 2 (1) 2.5 65 132 5.5 3.2 50 143 28 50 110 14 7 35 41 55 28.5 64 13 184 7 4 71 0 146 31 50 110 7 14 35 55 41 66 30.5 7 4 71 10 3.5 187 183 36 75 145 9 18 72.5 40 50 35 74 12 222 9 4 88 3.5 185 36 75 155 9 18 40 77.5 50 35 12 74 224 9 4.6 88 3 264 43 20 186 20 11 50 70 93 44.5 84 16 303 11 6.4 115 3.3 277 43 20 191 11
EXH Spacer (Top) 3 Spacer (Middle) Valve + Double check spacer with residual pressure exhaust (Top) + SUP stop valve (Middle) + Individual SUP (EXH) (Bottom) Spacer (Bottom) q AXT632-17-16 (M3 x 137) 3 For manifold w AXT632-41-3 (M3 x 103) 2 Valve + Interface regulator (TOP) + Double check spacer with residual pressure exhaust (Middle) + Individual SUP (EXH) (Bottom) q AXT632-17-20 (M3 x
19 40mm 4 7 40mm 12 15 180mm 24 22 50mm 5 8 50mm 14 17 240mm 28 27 60mm 6 9 60mm 16 19 VC_80 180mm ND9206 31 30 70mm 7 10 70mm 18 21 240mm 35 31 80mm 8 11 80mm 20 23 280mm 39 34 3 6 20mm VD_55 NDX VD_55 ND9206 Note: Mounted with ND9 / NDX smart positioners and B72G-2AS-980 AFR only.
(Fixed SI unit [l/min, or l, m3 or m3 x 103] will be set for switch types without an unit switching function.)
36 41 1/4, 3/8 172 18 145 90 20 90 10 222 80 28 8 7 7 14 7 12 50 80 95 34 5 2.3 32 37 42 41 3/8, 1/2 204 20 166 106 20 106 10 246 90 31 10 9 9 18 9 15 55 88 111 50 9 3.2 37 37 43 41 1/2, 3/4 225 24 200 122 20 122 15 278 100 33 10 9 9 18 9 15 65 102 126 60 10 3.2 39 37 51 41 3/4, 1 259 31 Micro Mist Separator Series AMD Dimensions AMD150C to 550C, AMD650 Auto drain D: With auto drain (N.O
G 28 58 5H9 depth 5 +0.030 0 2-M3 x 0.5 10.5 D-M4 x 0.7 (for work piece mounting) 12 2-M3 thread depth 5 Effective thread depth 4 (PE terminal) (3.5) 6 4-8 50 17.5 22 25 35 18.5 10 20 (5) 62 72 12 (15) (6) 8 1 0.2 31 5H9 +0.030 0 depth 5 Photo micro sensor wire (300mm) 10 13 1.5 [5.5] 6 10 (39.5) E 25 (4) Motor wire (300mm) Stroke + 135 30.5 The dimension inside [ ] shows the location at
-=S CDRB2BW20-=D CDRB2BW30-=S CDRB2BW30-=D CDRB2BW40-=S CDRB2BW40-=D 0.004 0.016 0 34 20 29 18 4 10 0.5 14 10 29 M3 x 0.5 depth 5 M3 7.6 21 18.5 5 12 0.043 0.004 0.016 0 42 29 30 20 4.5 10 0.5 20 13 36 M4 x 0.7 depth 7 M5 10.5 22 25 6 14 0.043 0.005 0.020 0 50 40 31 22 5 12 1.0 26 14 43 M5 x 0.8 depth 10 M5 14 24 25 8 16 0.043 0.005 0.020 0 63 45 31 30 6.5 20 1.5 31 20 56 M5 x 0.8 depth 10
20 11 16 23 40 60 60 AC-A1bore size +0.027 0 80 M12 x 28 31 100 65 28 16 R 22 13 18 26 45 67 75 U D drill through C 0.3 +0.033 0 100 M12 x 32 35 118 80 28 17 R 24 13 20 30 50 74 90 F E +0.033 0 125 M14 x 36 41 140 90 31 20 R 26 15 22 30 55 81 112 0 0.3 G A +0.033 0 160 M16 x 40 54 174 100 34 22 R 30 17 25 40 65 95 140 H B Knuckle pin Material: Carbon steel C (f8) Order no.
20 4 18 to 36 10 to 200 10 to 20 1.5 10 to 20 20 to 400 20 3 17.5 to 35 10 to 200 10 to 20 0.5 5 to 7.5 20 to 400 20 1 7.5 to 11 10 to 200 10 to 20 Servo Motor (24 VDC)/Step Motor (Servo/24 VDC) Actuator specifications Electric specifications Lock unit specifications Pushing force 50 to 100% [N] Note 2) LES LESH LECA6 LECP6 LEC-G LECP1 LECPA Speed [mm/s] Pushing speed [mm/s] Max. acceleration
This could cause an auto switch malfunction. 19.2 20 3.5 0.3 3 4 x M2.5 x 0.45 thread depth 2.5 6.5 12.5 K M 21 3 x M3 x 0.5 thread depth 5 2 N 1 x F 3 depth 2.5 +0.03 0 9 27 F 4 4 x M2.5 x 0.45 thread depth 3.5 6 (Extension end adjuster) 1.5 13.5 3.5 5.5 12 15 10 14 27 20 31 0.5 Retraction end adjuster 4 Extension end adjuster 5.5 3 N x M3 x 0.5 thread depth 4 Note 1) Note 2) 3 depth 2.5
, IDF6E-20 IDF8E-20, IDF11E-20 5 A IDU3E-20, IDU4E-20 IDU6E-20, IDU8E-20, IDU11E-20 [mm] Dimensions Model A B C D E F IDF22E-20 59 40 IDF15E1-20, IDF22E-20, IDF37E-20 IDU15E1-20 IDF22E-30, IDF37E-30 IDF55E-30 IDU22E-30, IDU37E-30, IDU55E-30 25 46 IDF37E-20 IDF22E-30 39 30 mA 125 10 A 60 60 IDF37E-30 IDF55E-30 148 81 50 36 IDF75E-30 133 73 IDU22E-30 151 74 200 V type IDF75E-30, IDU75E-30 15
x 0.5 with depth 3.5 10 9 + ST 2.7 8 6.7 2-M3 x 0.5 with depth 3 (Piping port) 20 20.5 5.5 42 + ST ST 5.5 4.5 32 + ST 13.4 5 + ST 2.75 11 12 1.2 M3 x 0.5 x 3 (Hexagon socket head set screw) M8 x 1.25 x 7.5 (Bolt holder) 3.8 3.8 0.5 45 45 3 3 25 0.2 25 0.2 5.3 5.3 32 31 16 2-M3 x 0.5 through 3.4 through 6.5 counterbore with depth 5 (Opposite side: Same) 3 3 45 45 5.5 2-M3 x 0.5 through M2.5
25 0 26 13.5 89 4.5 2.8 40 114 26.5 40 83 5.5 12 33 24 41.5 30 29.5 2 (1) 2.5 65 132 5.5 3.2 50 143 28 50 110 14 7 35 41 55 28.5 64 13 184 7 4 71 0 146 31 50 110 7 14 35 55 41 66 30.5 7 4 71 10 3.5 187 183 36 75 145 9 18 72.5 40 50 35 74 12 222 9 4 88 3.5 185 36 75 155 9 18 40 77.5 50 35 12 74 224 9 4.6 88 3 264 43 20 186 20 11 50 70 93 44.5 84 16 303 11 6.4 115 3.3 277 43 20 191 11
10 20 20 20 20 Without coupling 148 Standard motor High rigidity direct acting guide LG1H 10 20 10 20 Horizontal With coupling 158 Non-standard motor 10 20 10 20 With coupling 168 Options Page 178 Construction 179 Mounting 181 Non-standard Motor Mounting 182 Deflection Data 183 Part Number Designations F 2 G X10 1 P A 100 LG1 21 H Frame material Aluminium alloy Stainless steel Nil W
K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 N 4 4 6 6 6 HA 20 20 20 30 48 GA 11 21 31 43 41 13-/22-MXS6L-10 13-/22-MXS6L-20 13-/22-MXS6L-30 13-/22-MXS6L-40 13-/22-MXS6L-50 136 MXS Air slide table 1322Dimensions: MXS8 1322Basic style 2-M3 x 0.5 thread depth 4 Air cylinder Rotary actuator Air gripper Directional control valve Fittings
G 28 58 5H9 depth 5 +0.030 0 2-M3 x 0.5 10.5 D-M4 x 0.7 (for work piece mounting) 12 2-M3 thread depth 5 Effective thread depth 4 (PE terminal) (3.5) 6 4-8 50 17.5 22 25 35 18.5 10 20 (5) 62 72 12 (15) (6) 8 1 0.2 31 5H9 +0.030 0 depth 5 Photo micro sensor wire (300mm) 10 13 1.5 [5.5] 6 10 (39.5) E 25 (4) Motor wire (300mm) Stroke + 135 30.5 The dimension inside [ ] shows the location at
50 40 1001 2 3 4 5 10 20 30 4050 30 Air Cushion Stroke (mm) m3 max. m1 max. m2, m3 max.
Type 31 How to Order Applicable solenoid valve Note) SY113--M3 SY113A--M3 SY123--M3 SY123A--M3 Applicable blanking plate assembly SY100-77-1A SS3Y1 31 05 Stations 02 2 stations P R 20 20 stations R port M5 x 0.8 P port M5 x 0.8 Note) SY113(A) and SY123(A) cannot be mounted on the same manifold.
Type 31 How to Order Applicable solenoid valve Note) SY113--M3 SY113A--M3 SY123--M3 SY123A--M3 Applicable blanking plate assembly SY100-77-1A SYJ SS3Y1 31 05 VK Stations VZ 02 2 stations P R 20 VT 20 stations R port VP M5 x 0.8 P port M5 x 0.8 VG Note) SY113(A) and SY123(A) cannot be mounted on the same manifold.