VQC Proper tightening torque (Nm) Tightening torques for piping Connection thread Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/4 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 5.
100 22 IY-G10 32 M26 x 1.5 M26 x 1.5 44 44 79 21 55 24 31 24 55 24 31 64 72 22 32 79 Knuckle pin and snap ring are included.
M3 x 0.5 8.5 Model Vacuum inlet direction q Pad dia.
6 11 3 18 10 19 11 50 41 42 48 44.5 47.5 43.5 40 18 8 18.5 8.5 15.5 5.5 22.5 12.5 23.5 13.5 63 47.5 48.5 54.5 51 54 50 50 18 13.5 18.5 14 15.5 11 22.5 18 23.5 19 80 57.5 58.5 64.5 61 64 60 63 20.5 16.5 21 17 18 14 25 21 26 22 100 67.5 68.5 74.5 71 74 70 80 25.5 20 26 20.5 23 17.5 30 24.5 31 25.5 100 32 26 32.5 26.5 29.5 23.5 36.5 30.5 37.5 31.5 14 Series RQ Operation Range mm 100 Switch
(mm) U H I J K L O Z M N P S A C D E F B Bore size (mm) 32 31.5 M10 x 1.5 60 4.5 14 8.5 9 depth 7 14 34 5.5 Rc 1/8 58.5 73.5 12 16 45 20 65 40 35 M10 x 1.5 69 5 14 8.5 9 depth 7 14 40 5.5 Rc 1/8 66 75.5 12 16 52 22 67 50 41 M12 x 1.75 86 7 18 11 11 depth 8 19 50 6.6 Rc 1/4 80 87 15 20 64 25 76 63 47.5 M12 x 1.75 103 7 18 11 14 depth 10.5 19 60 9 Rc 1/4 93 91 15 20 77 27 80 80 57.5 M16 x 2
Series sY100A o M3 o.22 (O.O12l sYJ300 o a M3 0.9 (0.05 NVZ300 a a M5 3.6 (0.2 NVZ500 o o 1/8 9.0 (0.s) NV2200 o M5 3.24 (0.18) NVZ400 o 1ta 9.0 (0.5) NVS3115 a a 1t8,'v4 '19.8 (1 .1 NVS3135 o o U4,3lA,112 46.5 (2.58) NVS3145 a o 1t2,3/4 81 (4.s) vx2 a o 1t8-1t2 3-31 (0.171.7) vx3 o o 1t8,3/4, 1t4 1.4-9 (0.08-0.s) vxz2 a 1 t 4 1 34-215 (1 .9-12) sg-z s4 118" 5132', s'lo aE qg 1t4'5t16',31A
MB MB1 Symbol Bore size (mm) S A A' B B' D F F' GA GB H J K MM NN R 5 st 10 st 15 st 20 st 30 st CA2 6 10 15 35.5 40.5 45.5 30.5 7 M10 x 1.0 7 9 14 14 3 8 6.5 6 6 17 6 8 M3 x 0.5 35.5 40.5 45.5 55.5 30.5 M12 x 1.0 8 10 12 15 17 5 8 6.5 6 7 20 7 8 M4 x 0.7 CS1 M14 x 1.0 35.5 40.5 45.5 55.5 30.5 10 12 14 20 19 6 10 8.5 6 7 24 9 8 M5 x 0.8 C76 Symbol Z C With auto switch Bore size (mm) W 5
Symbol Bore size (mm) A A' B B' D E F GA GB H J R MM FC NN FT FX FY FZ 6 7 9 14 14 3 10.5 8 6 6 17 6 7 M3 x 0.5 3.4 M10 x 1.0 1.6 24 16 32 10 10 12 15 17 5 13 8 6 7 20 7 8 M4 x 0.7 4.5 M12 x 1.0 1.6 28 18 37 15 12 14 20 19 6 15.5 10 6 7 24 9 10 M5 x 0.8 5.5 M14 x 1.0 2.3 36 22 49 Symbol S Z With auto switch W Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st 20 st 30 st FI P
7.4 9.0 7.5/7.7 8.8/9.3 12 14 14/14 15/16 Cv 0.86 0.88 0.80/0.86 1.0/1.0 2.0 2.4 1.9/2.1 2.3/2.4 3.1 3.8 3.5/3.5 3.8/4.0 C [dm3/(sbar)] 2.9 3.2 2.9/3.0 2.7/3.6 6.9 8.8 7.9/7.4 9.2/8.8 12 15 14/13 15/15 Cv 0.83 0.92 0.83/0.83 0.86/0.88 1.7 2.2 1.9/1.8 2.1/2.0 3.1 3.7 3.2/3.2 3.6/3.7 C [dm3/(sbar)] 3.5 4.4 3.5/3.5 4.1/3.9 7.5 9.3 7.4/7.3 9.2/9.1 13 16 14/14 15/15 Cv 0.93 1.1 0.89/0.89 1.0/
33 41 65 31 39 64 30.5 34.5 30.2 34.2 35.2 30.2 34.2 35.2 30.2 34.2 35.2 35.8 36.8 39.8 35.8 36.8 39.8 36.3 37.3 40.3 36.3 37.3 40.3 23.8 26.5 28.5 26.2 28.2 28.9 26.2 28.2 28.9 26.2 28.2 28.9 29.8 30.5 31.6 29.8 30.5 31.6 30.3 31 32.1 30.3 31 32.1 4 2.5 14 10 14 17 12 14 17 12 14 17 27.8 23.5 27.5 28.5 23.5 27.5 28.5 23.5 27.5 28.5 28.5 29.5 32.5 28.5 29.5 32.5 29.5 30.5 33.5 29.5 30.5
) 7 2-2H9 +0.025 0 depth 2 3 3 7 11 11 Groove for auto switch mounting 2-M3 x 0.5 thread depth 4 Mounting thread 11 34 12-3-13 14 Series MHF2 Dimensions MHF2-8D2 2.5H9 +0.025 0 depth 2.5 17 17 17 2.5H9 +0.025 0 depth 2.5 3 3.4 64.3 4-M3 x 0.5 thread depth 7 Mounting thread 32 72 2-M3 x 0.5 thread depth 4 Mounting thread 15.8 58 5.9 E 11 11 14 19 E 0 -0.1 4-2.6 through (Mounting hole) M3 x
5.9 E 11 11 14 19 E 2-2.6 through (Mounting hole) M3 x 0.5 Finger opening port M3 x 0.5 0 -0.1 17 12 12 Finger closing port 2-4.5 0.8 0.8 E-E +0.1 0 Close: 0 Open: 81 Use the attached hexagon socket head screws for mounting holes. 4-M3 x 0.5 thread depth 4 14 Mounting thread 4-M2.5 x 0.45 thread depth 3 Attachment mounting thread Auto Switch Mounting Groove Dimensions M2.5 x 0.45 4 1.3
53.5 28 40 242 36.5 30 6.8 6.6 12 16 M6 x 1 M8 x 1.25 14 372 354 186 190 124 158 118 116.5 73 106 144 140 64 30.5 43 286 40.5 35 8.6 8.5 14 15 M8 x 1.25 M10 x 1.5 Model FF II NN AA BB CC DD EE GG JJ KK LL MM WW XX ML1C25 ML1C32 ML1C40 1/8 5 5 5 5 7 28 26 14 44 20 16 12.5 120 42 1/8 6 5 6 5 8 36 28 18 54 36 18 12.5 140 48 1/4 6 5 6 5 8 47 30.5 17 62 30 22 16.5 170 51 9-14-8 9 Series ML1C Mechanically
53.5 28 40 242 36.5 30 6.8 6.6 12 16 M6 x 1 M8 x 1.25 14 372 354 186 190 124 158 118 116.5 73 106 144 140 64 30.5 43 286 40.5 35 8.6 8.5 14 15 M8 x 1.25 M10 x 1.5 Model FF II NN AA BB CC DD EE GG JJ KK LL MM WW XX ML1C25 ML1C32 ML1C40 1/8 5 5 5 5 7 28 26 14 44 20 16 12.5 120 42 1/8 6 5 6 5 8 36 28 18 54 36 18 12.5 140 48 1/4 6 5 6 5 8 47 30.5 17 62 30 22 16.5 170 51 9-14-8 9 Series ML1C Mechanically
An M3 port will be installed on the top side of the manifolds SUP/EXH block. How to Order Valves (Example) S0712 R -5G-C4 External pilot port (M3 x 0.5) External pilot Note 1) The dual 3-port valve is not available.
14 14 14 14 14 14 D side U side For the I/O Unit part number mounted, refer to the following pages.
/O.D. mm Model L 5/8 21.4 14 14 36.1 12.7 13.7 4.5 KK3P-50N 1/8 6/9 38.8 18.3 5.4 -60N 18.4 17 39.9 16.5 6.5/10 35.9 21.9 5.9 -65N 14 43.9 13.7 5/8 34.7 17 12.7 4.5 KK4P-50N 6/9 48.4 18.3 5.4 -60N 17 46.7 16.5 1/4 6.5/10 45.1 21.9 5.9 -65N 25.2 8/12 53.2 34.4 7.4 -80N 47.6 55.6 38.2 8.5/12.5 7.8 -85N 19 17.4 19 60.5 34.4 8/12 7.4 KK6P-80N 53.4 1/2 62.8 38.2 8.5/12.5 7.8 -85N 31 24 57.2 20.1
x 0.5 thread depth 4 (Mounting thread) 15 3H9 depth 3 +0.025 0 13H9 depth 1.5 +0.043 0 2-M3 x 0.5 thread depth 6 (Mounting thread) 4-M4 x 0.7 thread depth 8 (Mounting thread) Bottom hole 3.4 through (Mounting hole) 0 0.1 5 Open 13 +1.2 0 4 8 10 0.02 32.6 28 34 22 20 0 0.2 Closed 9 22 3H9 depth 3 +0.025 0 15 31 13 63 20 0.05 Auto Switch Mounting Groove Dimensions 4-M3 x 0.5 (Thread for