JXCx-OMT0005CN

. 23 5.2 MOTENC . 23 5.3 SII/O . 23 1 . 23 2 . 24 5.4 DeviceNet . 24 6CN1: . 25 6.1 . 25 6.2 . 25 6.3 . 26 1(C24V,M24V,0V) . 26 2(EMG) . 26 3LK RLS . 26 1 - 6.4 . 27 1 . 27 21 . 28 32 . 29 7DeviceNet 30 8LED . 31 8.1 LED . 31 8.2 LED . 31 9 . 32 9.1. . 32 9.2 No. . 32 9.3 / . 32 9.4 . 32 10 . 33 10.1 . 33 11 . 42 11.1 . 42 11.2 . 45 11.3 . 47 12 . 48 12.1 . 48 12.2 .

HRX-OM-R016

This produuct Your system Circulating fluid temperature 31 Serial communication Discharge temperature 31 Circulating fluid display temperature Heat 31 radiation 1 Circulating fluid set temperature 30 Offset temperature 30 1 Example of MODE 2 When the offset temperature is -1oC, circulating fluid display temperature and the communication data is 29oC (circulating fluid discharge temperature

Compact Cylinder with Air Cushion and Lock Series RLQ

Additional weight Unit: (g) 32 11 26 17 137 174 159 145 149 40 13 27 17 149 208 192 190 149 50 14 53 32 221 351 326 373 263 63 22 53 32 288 523 498 518 263 Bore size (mm) Magnet Threads Nut Rod end male threads Foot (including mounting bolt) Front flange type (including mounting bolt) Rear flange type (including mounting bolt) Auto switch mounting screw (M3 X 0.5 x 10l) Double clevis type

MXU

For details, refer to page 8-30-31. 8-3-11

MXU

For details, refer to page 8-30-31. 8-3-11

HRX-OM-X084

This produuct Your system Circulating fluid temperature 31 Serial communication Discharge temperature 31 Circulating fluid display temperature Heat 31 radiation 1 Circulating fluid set temperature 30 Offset temperature 30 1 Example of MODE 2 When the offset temperature is -1oC, circulating fluid display temperature and the communication data is 29oC (circulating fluid discharge temperature

HRX-OM-W002

9.5.1 HRR012-A/W-10-,HRR018-A/W-10-. 9-13 9.5.2 HRR012-A/W-20,HRR018-A/W-20 . 9-13 9.5.3 HRR024-A/W-20,HRR030-A/W-20 . 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR012/018/024/030-A/W. 9-14 9.6.2 HRR012/018-A/W-10-T/MT . 9-14 9.6.3 HRR012/018/024/030-A/W-20-T . 9-15 9.6.4 HRR012/018/024/030-A/W-20-MT . 9-15 9.6.5 HRR012/018/024/030-A/W-20-T1 . 9-16 9.7 Required facility water flow (for water-cooled

CLK1

Model A B Same side Different sides 4 6.5 8 8 Different sides Same side D-C7, D-C8 31.5 29.5 31 31 n-2 2 15 + 45 ( ) (n = 2, 4, 6...) Approx. Hs D-C7, D-C8 30.5 35 40.5 40.5 50 + 45 (n-2) 15 50 A B 4 6.5 8 8 n-2 2 15 + 50 ( ) (n = 2, 4, 6...) D-C73C 31.5 29.5 31 31 D-C73C 15 65 65 + 50 (n-2) Approx. Hs 33 37.5 43 43 n-2 2 D-H7, D-H7W D-H7F 15 + 45 ( ) (n = 2, 4, 6...)

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

10.5 8 39 23 49.5 1.5 10.5 49.5 4-M3 x 0.5 depth 6 (bracket mounting screws) 4-4.5 (bracket mounting holes) 7 7 5 L3 P = 19 16 nRc(PT) 1/8 (port A) 23 8 19.5 L: Dimension table n: Stations n L L1 L2 L3 1 37 27 13 2 56 46 32 3 75 65 51 4 94 84 70 5 113 103 89 6 132 122 108 7 151 141 127 8 170 160 146 9 189 179 165 10 208 198 184 11 227 217 203 12 246 236 222 13 265 255 241 14 284 274 260

VKF300

10.5 8 39 23 49.5 1.5 10.5 49.5 4-M3 x 0.5 depth 6 (bracket mounting screws) 4-4.5 (bracket mounting holes) 7 7 5 L3 P = 19 16 nRc(PT) 1/8 (port A) 23 8 19.5 L: Dimension table n: Stations n L L1 L2 L3 1 37 27 13 2 56 46 32 3 75 65 51 4 94 84 70 5 113 103 89 6 132 122 108 7 151 141 127 8 170 160 146 9 189 179 165 10 208 198 184 11 227 217 203 12 246 236 222 13 265 255 241 14 284 274 260

HRX-OM-X071

This produuct Your system Circulating fluid temperature 31 Serial communication Discharge temperature 31 Circulating fluid display temperature Heat 31 radiation 1 Circulating fluid set temperature 30 Offset temperature 30 1 Example of MODE 2 When the offset temperature is -1oC, circulating fluid display temperature and the communication data is 29oC (circulating fluid discharge temperature

Integrated Controller

Dimensions [mm] Size Stroke range [mm] A B C D EH EV H J K L M O1 R S S2 T T2 U CV V X2 Y Without lock With lock 25 15 to 100 136.2 121.7 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 46 58.1 115 113.6 1 66.3 57.8 144 184 32.2 101 to 400 161.2 146.7 32 20 to 100 153.6 135.1 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1 10 60 70.8 142 140.3 2 83.5 69.8 144 189 39.1 101 to 500 183.6 165.1

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

Fittings & Tubing Air Cylinders Rotary Actuators 33.4 32 36 120 120 A C 32 8.5 8.5 Finger closing port Finger opening port M3 x 0.5 M3 x 0.5 9.5 3 x M3 x 0.5 thread depth 6 25 25 M3 x 0.5 Finger closing port P.C.D.24 (Mounting thread) M3 x 0.5 Finger opening port 31 9h9-0.036 0 1 32 5 15 19 10 5 (35) 7 14.5 M3 x 0.5 thread depth 4 6 x M3 x 0.5 thread depth 6 (A, B, C common view) Vacuum suction

Rotary Actuator

30 80 50 5 192 40 100 60 5 232 45 Size D (g6) G H M N U UU L 30 8 6 13 10 8 53 63 7.8 50 15 11 27 20 15 89 109 14 63 17 13 29 22 17 105 127 16 80 20 15 38 25 20 130 155 19 100 25 19 44 30 25 156 186 24 Note) Dimension parts different from the standard conform to the general tolerance.

CRQ2

M3 M3, M4 M3, M4 M3, M4, M5 M4, M5, M6 M3 M3, M4 M3, M4 M3, M4, M5 M4, M5, M6 MSQ MRQ Symbol: A4 Symbol: A5 Symbol: A3 The long shaft can be further shortened by machining it into a stepped round shaft. (If shortening the shaft is not required, indicate for dimension X.) (If not specifying dimension C1, indicate instead.)

Table of Contents - Tubing

Tightening of M3 and M5 screws 1) M3 1. After tightening by hand, the barb fitting type should be tightened by an additional 1/4 rotation using an appropriate wrench. 2. After tightening by hand, the barb elbow type should be tightened by an additional 1/2 rotation using an appropriate wrench. 2) M5 1.

Digital Flow Switches, Series PF2A, Series PF2W

(Fixed SI unit [(l/min, or l, m3 or m3 x 103)] will be set for switch type without the unit switching function.) Note 3) The high flow rate type is CE marked; however, the linearity with applied noise is 5% F.S. or less. Note 4) Switch output and accumulated pulse output selections are made using the button controls.

Digital Flow Switches

(Fixed SI unit [l/min, or l, m3 or m3 x 103] will be set for switch types without unit switching function.) Refer to the specifications of display unit for the flow rate value per pulse.

High Vacuum Angle Valve, XL Series

Auto switch: Valve side exhaust Heater: Operation principle By applying pressure from the actuation port (7), the piston (8), which is sealed by the shaft seal (11) and the piston seal (9), overcomes the force of the spring (13), and the valve (15) opens. With the exhaust of air pressure, the valve (15) is closed by the force of the spring (13) and is sealed by the valve seal (14).

XL

Auto switch: Valve side exhaust Heater: Operation principle By applying pressure from the actuation port (7), the piston (8), which is sealed by the shaft seal (11) and the piston seal (9), overcomes the force of the spring (13), and the valve (15) opens. With the exhaust of air pressure, the valve (15) is closed by the force of the spring (13) and is sealed by the valve seal (14).