JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

43 35 1/2 46 155 13 31.5 20 20 230 45 25 16 55 15 15 25 to 1400 63 M12 x 1.5 90 63 15 42 19 43 35 1/2 52 163 15 40 31.5 31.5 261 63 40 20 65 15 20 25 to 1500 1/4 stroke 80 M16 x 1.5 110 80 17 40 22 44 44 3/4 65 184 18 40 31.5 31.5 291 72 40 20 80 17 20 25 to 1800 100 M18 x 1.5 135 102 19 42 22 44 44 3/4 75 192 20 50 40 40 316 84 50 25 100 19 15 25 to 1800 Rod series Tolerances (mm) CD B

Air Cylinder Series MB

20 14 15.5 19 75 15 1/4 104.5 58.5 5 32 18 63 Up to 600 45 17.5 35 27 11 75 134.5 56.5 14 20 20 14 16.5 23 90 12 1/4 119.5 68 9 37 22 80 Up to 800 45 22 40 32 13 95 169 72 22 30 25 20 19 33 102 18 1/4 150 81 11.5 26 37 100 Up to 800 55 25 40 41 16 114 189 89 22 30 30 20 19 37.5 116 20 1/4 170 96 17 Bore size (mm) T S U V L GF K MM Q RR H VA W Z ZZ J P GE N 34 32 154 13 6.5 18.3 6 23 M10

LEC-OM071xx

CPRM_SEL_ MON1 14 15 16 17 CPRM_SEL_ MON2 18 19 20 21 Reserved MONITOR1 22 23 24 25 MONITOR2 26 27 28 29 MONITOR3 30 31 8-71 8 MECHATROLINK-III Commands Related Parameters Parameter No.

0.4

COM. 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM. 1 2 1 2 1 2 COM. COM.

AS

1F-02-03(S)A 5/32" 8.2 13.3 17 1/4 12.6 36.6 35 31.1 29.5 AS22;1F-02-07(S)A 1/4" 11.2 23.4 32.5 (32.8) 22.6 19 (19) (17.5) AS22;1F-02-09(S)A 5/16" 13.2 23.9 33 (33.3) 14.2 19 (20) AS22;1F-02-11(S)A 3/8" 15.5 26.4 35.5 (35.8) 15.6 20 (21) AS32;1F-03-07(S)A 1/4" 11.2 21.8 32.1 13.3 28.7 31 (32) 3/8 15.6 42.3 40.7 37.1 35.5 19 AS32;1F-03-09(S)A 5/16" 13.2 22.7 33 14.2 AS32;1F-03-11(S)A 3/8"

ZP

(mm) Vacuum entry (Female thread) Vertical Vacuum entry direction M8 x 1.25 M5 x 0.8 Rc 1/8 Connection/Vacuum entry Connection 10 Female thread 10 to 16 17 14 19 M5 x 0.8 20 to 32 10 to 16 47 46 M5 x 0.8 40, 50 M8 x 1.25 20 to 32 Pad dia.

SY

389 369 20 408 388 L1 L2 Type 20 manifold ...

0.4

This allows for viable connections to take place without necessarily specifying whether the manifold station is double, single, or mixed wiring. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring Dual 3-port valves, 4 positions VQC1000/2000 (Rubber seal only) Model A side B side JIS symbol Two

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Tubing O.D.

5 Port Solenoid Valve

COM. () COM. 23 24 (+) 26 21 Note) 22 Positive COM Negative 19 20 19 20 COM 17 18 17 18 15 16 15 16 13 14 13 14 Note) Mounting valve has no polarity.

ZP

MB P. 14 With adapter Single unit Front matter 5 Series Variations Type Symbol Variations Pad Diameter Adapter type Page Oval Pad For work pieces with limitations on the adsorption surface P. 17 Single unit P. 18 With adapter: Vacuum inlet direction Vertical 3.5 x 7 4 x 10 5 x 10 6 x 10 P. 19 4 x 20 5 x 20 6 x 20 8 x 20 Oval W With buffer: Vacuum inlet direction Vertical 4 x 30 5 x 30 6 x

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

5 198 187.5 157.5 23.5 6 210.5 200 173.5 21.5 7 223 212.5 189.5 20 8 235.5 225 205.5 18 9 260.5 250 221.5 22.5 10 273 262.5 237.5 21 11 285.5 275 253.5 19 12 310.5 300 269.5 23.5 13 323 312.5 285.5 22 14 335.5 325 301.5 20 15 348 337.5 317.5 18.5 16 373 362.5 333.5 23 17 385.5 375 349.5 21 18 398 387.5 365.5 19.5 19 423 412.5 381.5 24 20 435.5 425 397.5 22 L1 L2 L3 L4 245 D-sub Connector

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

14 14 20 20 14 25 20 25 25 20 1/8" 1/4" 1/4" 1/8" 3/8" 1/4" 3/8" 3/8" 1/4" 1/2" 1/2" 3/8" 1/4" 1/2" 1/2" 3/8" 1/4" 3/4" 3/4" 1/2" 3/4" 3/4" 1/2" 3/4" 3/4" 1/2" 3/8" 1/4" 1" 1" 3/4" 1" 1" 1" 1" 1" 4 16 33.5 17 6 12 16 34.5 20 1/4" 19.5 22.5 44.5 47.5 21 25 19.5 44.5 22.5 21 47.5 25 3/8" 5 9 18 16 17 37 38 16 20 16 37 17 16 38 20 1/4" 22.5 24.5 50.5 52.5 24 29 19.5 16 19.5 16 19.5 22.5 17

Series SV

pins) Common Common Common Common 20 26 19 25 SOL.

C85

D-C73C D-C80C D-A73C D-A80C D-H7C D-A79W D-J79C D-H7 D-H7C D-H7W D-H7BAL D-H7NF Bore 3 16 Hs Hs Hs Hs Hs Hs Hs Hs Hs 20 25 8 10 12 6 7.5 1 1 2 16 18.5 19 25 19 21.5 23.5 8 18 17 19.5 19 25 20 21.5 23.5 10 18 12 18.5 21 20.5 26.5 21 22 23 25 19.5 16 20.5 23 20.5 26.5 23 22 23 25 19.5 D-A79W 2 16 20 22.5 25 23.5 29.5 25 25 26 29 22.5 25 20 25 25 27.5 26.5 32.5 27.5 28 29 32 25.5 5 6.5 Aim

F

11.8 10 3/8 KQS10-03S 8 17 26.5 20 21 39 26.6 18.5 10 1/2 KQS10-04S 8 22 27 19 21 39 26.6 35.2 12 1/4 KQS12-02S 8 19 33.5 27.5 22 46.0 44.5 23.4 12 3/8 KQS12-03S 9 19 28 21.5 22 60 44.5 17.7 12 1/2 KQS12-04S 9 22 27 19 22 60 44.5 29.6 Reference dimensions after PT thread installation.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Port size M5 x 0.8 t 10.5 15 18 20 t 10.5 15 18 20 Series Assembly part no.

LVQ

25 80 B A V S 37.5 6 7 20 25 80 D V S 50.2 10 7 20 38.5 110 60 10 7 20 38.5 110 LVQ60 available only as V.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

VQC 20 16 8 20 20 08 Note) Two manifold stations are required for double solenoid 3 position valves (dual body type).

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Head side flange style: CQ2G/CDQ2G Without auto switch With auto switch Bore size (mm) 5 st 10 st 20 st 5 st 10 st 20 st A B L L1 32 40 50 28.5 53 58 43 48 7 28.5 59.5 64.5 49.5 54.5 7 33.5 77.5 67.5 67.5 57.5 8 Flange bracket material: Carbon steel Double Clevis Style 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st A B CL Without auto