0.4

or less VQ1200 13 or less 10 or less 0.70 0.15 0.16 0.72 0.25 0.18 Metal seal 13 or less Double VQ1201 20 or less 15 or less 0.85 0.20 0.21 1.0 0.30 0.25 Rubber seal 20 or less VQ1300 40 or less 20 or less 0.68 0.15 0.16 0.72 0.25 0.18 Metal seal 26 or less Closed center VQ1301 47 or less 25 or less 0.70 0.20 0.16 0.65 0.42 0.18 Rubber seal 33 or less VQ1000 VQ1400 40 or less 20 or less

CA2

to 500 30 27 60 22 44 16 32 10 15 8 M8 x 1.25 6 14 40 +0.070 0 0.1 0.3 12 18.0 up to 600 20 to 600 35 32 70 27 52 20 40 10 17 11 M8 x 1.25 7 18 50 +0.070 0 0.1 0.3 16 25.0 up to 600 20 to 600 35 32 85 27 64 20 40 10 17 11 M10 x 1.25 7 18 63 +0.084 0 0.1 0.3 20 31.5 102 13 up to 750 20 to 750 40 37 32 78 25 52 14 21 M12 x 1.75 10 22 80 +0.084 0 0.1 0.3 25 35.5 100 up to 750 20 to 750 40 37

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

IN side, OUT side 4 10 20 30 50 75 75 Prevents vacuum equipment trouble due to airborne contaminants. Mass (g) 22 22 30 30 39 39 Model Tubing size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 7 7 12 12 16 16 6 6 8 8 10 Metric size Unrestricted 360 piping tube mounting.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 100 200 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Compact 5-Port Solenoid Valve

solenoids available) y SUP/EXH block assembly 24 24 stations 20 20 stations *1 Double wiring: 2-position single, double, 3-position, and 4-position valves can be used on all manifold stations.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

0 20 40 60 80 Particle diameter m or less Operating temperature C 1 Clean One-touch Fittings Series KP How to Order KP H 06 KP P 08 01 Applicable fitting size Port size/Applicable tubing O.D.

REC

Refer to p.1.4-19 and 1.4-20.

Series VQ Metal Seal/Rubber Seal Body Ported

Load factor 50% Piping length 5m Speed controller: AS3000F-08 (S=10mm2) Cylinder stroke 100mm Fitting (One-touch fitting) Effective area (mm2)(Cv) Cylinder Speed (mm/s) Model AS3000F-08 (S=10mm2) Cylinder stroke 50mm 10 6 16 20 25 32 40 40 50 63 80 100 150 300 450 600 750 150 300 450 600 750 8 14.6 (0.81) VQ2000 (Metal seal) 8 16.2 (0.90) VQ2001 (Rubber seal) 1.10-6 VQ0 Body Ported Plug

42

Maximum stations are 18. 18 6 19 7 20 8 21 9 22 10 23 11 24 1.

AS-FG/ASD-FG

AS121FG-M5 AS231FG-01 R(PT) 1/8 20, 25, 32 AS221FG-01 AS231FG-02 R(PT) 1/4 20, 25, 32, 40 AS221FG-02 AS331FG-02 R(PT) 1/4 40, 50, 63 AS321FG-02 AS331FG-03 R(PT) 3/8 40, 50, 63 AS321FG-03 AS431FG-04 R(PT) 1/2 63, 80, 100 AS421FG-04 AS131FG-U10/32 10-32UNF 6, 10, 16, 20 AS121FG-U10/32 AS231FG-N01 NPT1/8 20, 25, 32 AS221FG-N01 Elbow type AS231FG-N02 NPT1/4 20, 25, 32, 40 AS221FG-N02 AS331FG-N02

CV/MVGQ

Material: Cast iron I-04 I-05 I-08 I-10 16 + 0.1 0.3 16 0.1 0.3 28 0.1 0.3 30 0.1 0.3 22 27 37 37 24 28 36 40 55 60 71 83 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 15.5 15.5 22.5 24.5 20 20 26 28 69 74 91 105 12 + 0.070 0 12 + 0.070 0 18 + 0.070 0 20 + 0.084 0 Applicable bore size (mm) 40 flat washer size Cotter pin size Part no.

CV/MVGQ

Material: Cast iron I-04 I-05 I-08 I-10 16 + 0.1 0.3 16 0.1 0.3 28 0.1 0.3 30 0.1 0.3 22 27 37 37 24 28 36 40 55 60 71 83 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 15.5 15.5 22.5 24.5 20 20 26 28 69 74 91 105 12 + 0.070 0 12 + 0.070 0 18 + 0.070 0 20 + 0.084 0 Applicable bore size (mm) 40 flat washer size Cotter pin size Part no.

Suction Guard (Produced upon receipt of order) FHG Series

) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 1/2 3/4 1 1 1/4 1 1/2 2 22.2 27.7 34.5 43.9 49.1 61.1 77.1 90.0 2.7 2.7 2.7 5.1 5.1 5.0 10.3 10.3 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 22.2 27.7 34.5 43.9 49.1 61.1 77.1 90.0 56 56 56 76 76 76 101 101 71 71 71 104 104 104 129 129 53 53

CL

to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1000 30 to 1000 30 to 1200 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 1/4 1/4 1/4 1/4 1/4 1/2 1/2 3/4 22 27 27 32 41 69 78 84 92 100 141.5 150 167 44 52 64 78 92 115 128 144 8 11 11 13 16 59 67 73 77 85 112.5 121 133 10 12 16 20 25 25 28 32 17 17 20 16 20 20 25 30 36 36 40 40 50 55 65 80 90 90 90 15 17 17 21 21 16

Combination Cylinder

26 27 26 30 31 54 59 67 72 76 8 11 11 13 16 10 13 18 23 25 10 12 15 17 19 16 20 20 25 30 to 500 to 600 to 600 to 750 to 750 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 +0.3 +0.1 +0.3 +0.1 +0.3 +0.1 +0.3 +0.1 Bore (mm) W/o rod boot W/ rod boot J K KA L LZ MM N P PG PH PL PW RR S U W H 51 58 58 71 72 ZZ 14 18 18 22 26 Z 244 273 296 347 381 e 11.2 11.2 11.2 12.5 14.0 f 59 66 66 80 81 h

Air Cylinder Series CA2

to 500 30 27 60 22 44 16 32 10 15 8 M8 x 1.25 6 14 40 +0.070 0 -0.1 -0.3 12 18 Up to 600 20 to 600 35 32 70 27 52 20 40 10 17 11 M8 x 1.25 7 18 50 +0.070 0 -0.1 -0.3 16 25 Up to 600 20 to 600 35 32 85 27 64 20 40 10 17 11 M10 x 1.25 7 18 63 +0.084 0 -0.1 -0.3 20 31.5 Up to 750 20 to 750 40 37 102 32 78 25 52 14 21 13 M12 x 1.75 10 22 80 +0.084 0 -0.1 -0.3 25 35.5 100 Up to 750 20 to 750

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

VQC 20 16 8 20 20 08 Note) Two manifold stations are required for double solenoid 3 position valves (dual body type).

VFR

0.28 5.2 23 0.32 6.2 23 0.27 5.8 25 0.21 6.2 16 0.37 4.6 18 0.41 5.1 20 0.27 5.2 23 0.32 6.1 23 0.26 5.8 25 0.20 6.1 15 0.38 4.1 16 0.31 4.3 17 18 0.31 0.28 4.6 4.7 20 21 0.33 0.30 5.4 5.4 14 0.38 3.6 17 [16] 0.39 [0.35] 4.8 [4.3] 17 0.29 4.6 18 0.29 4.6 21 [18] 23 [20] 0.31 [0.34] 5.6 [5.0] 0.27 [0.33] 5.9 [5.2] 16 [9.4] 0.39 [0.40] 4.2 [2.6] 17 0.36 4.5 20 0.31 5.3 18 [9.7] 0.32 [0.45]

45

Applicable up to 16 solenoids. 20 16 08 20 stations 16 stations 8 stations Type 45T (9 pins terminal block type) Type 45T1 (18 pins terminal block type) 45T1 SS5X 3 05 U C4 D 45T SS5X 3 05 U C4 D Series Series 3 SX3000 5 SX5000 3 SX3000 5 SX5000 Option Option Terminal block mounting position When a longer DIN rail is desired than the specified stations, specify the station number to be required

45

Applicable up to 16 solenoids. 20 16 08 20 stations 16 stations 8 stations Type 45T (9 pins terminal block type) Type 45T1 (18 pins terminal block type) 45T1 SS5X 3 05 U C4 D 45T SS5X 3 05 U C4 D Series Series 3 SX3000 5 SX5000 3 SX3000 5 SX5000 Option Option Terminal block mounting position When a longer DIN rail is desired than the specified stations, specify the station number to be required