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motor (S3) 200 W AC servo motor (S2) 200 to 230 VAC 50/60 Hz AC servo motor (S4) 400 W AC servo motor (S3) Power supply voltage AC servo motor (S6) 100 W AC servo motor (S4) 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz Absolute AC servo motor (S7) 200 W AC servo motor (S6) 100 to 120 VAC 50/60 Hz AC servo motor (S8) 400 W AC servo motor (S7) Pulse input type (For absolute encoder

VS 8-2/VS 8-4

) 11 173 (Double dual 3-port) 188.5 (3-position) 139.5 (Single) 14 14 14 157.5 8 115 131 12 12 12 SMC 28 Series VS 8-2 S R Construction Construction Metal seal Rubber seal VSR8-2-FG-SVSS8-2-FG-Sr e e r w t q w q t VSR8-2-FG-DVSS8-2-FG-De r e r w q t w q t VSS8-2-DFHG FIG FJG VSR8-2-DFHG FIG FJG e r e r w q t w q t VSR8-2-DFDAG FDBG FDCG e r w q t Replacement Parts VSR8-2-DFDAG FDBG FDCG VSR8

Environment

0 i o e r t q u !1 !2 !3 !

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Fittings & Tubing Air Cylinders Rotary Actuators SZ3 LOZ 1 60 10 C6 5 Rated voltage CE-compliant 5 24 VDC Nil Clean series CE-compliant Q Actuation type Made to Order Nil 2 position single solenoid Main valve fluororubber (Refer to page 411.)

IDG

IDG50L (Type B products group) IDG30L (Type B products group) 0 0 P1 = 0.3 MPa P1 = 0.3 MPa Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C) 10 10 20 20 P1 = 0.5 MPa P1 = 0.5 MPa 30 30 40 40 P1 = 0.7 MPa P1 = 0.7 MPa 50 50 60 60 70 70 0 0 20 40 60 80 100 160 40 80 120 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) Courtesy

C95

TE TH TL Z TD TS TO TT TU TX TR TY 35 45 45 60 60 75 74 97 109 130 150 184 12 16 16 20 20 25 50 63 75 90 110 132 10 12 12 14 14 17 46 52 65 75 95 114 62 80 80 100 100 120 47 60 60 80 80 100 8.5 10 10 15 15 15 C95-S03 C95-S04 13 17 17 22 22 24 62 80 92 110 130 158 7 9 9 11 11 13.5 49 58 71 87 110 136 95 106.5 122 129.5 150 160 12 17 17 20 20 26 45 60 60 70 70 90 32 40 50 63 80 100 C95-S06

Air Cylinder

2 q t w e u y CJP CJ2 JCM CM2 CM3 CG1 CG1 With air cushion CG3 o !4 !0 !5 !1 !3 !2 q t w e r i JMB MB MB1 CA2 CS1 CS2 Component Parts Replacement Parts: Seal Kit Bore size (mm) Kit no. Contents 20 CG1WN20Z-PS Set of the nos. !2, !3, !4 No.

CJ2

(Refer to page 6-3-60.) Standard stroke (mm) Same as the standard. (Refer to page 6-3-60.)

SYJ3000/5000/7000

SYJ7000-22-1 SYJ7000-22-2 V111(T)No. q w e r t y Aluminum die-casted 1/8 1/4 Body Piston plate End cover Piston Spool valve assembly Spool spring Sub-plate u i Pilot valve How to Order Pilot Valve Assembly V111 5 G V115 5 D Rated voltage Coil specifications Light/Surge voltage suppressor 5 6 1 2 24 VDC 12 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 V AC 50/60 Hz] 220 VAC

Vacuum System Peripherals:

m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

Electric Actuators

D 4 4 6 6 Model LXFHAB25--X LXFHAB50--X LXFHAB75--X LXFHAB-100--X B 1 1 2 2 E 60 90 90 90 F 30 60 60 60 G 60 90 90 90 Note) The overall length of an actuator is Stroke + 105.5 + Motor dimension.

Guide Cylinder Series MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

0.4

w e q w VQC1100 VQC1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQC1201 VQC1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQC1300 VQC1400 VQC1301 VQC1401 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQC1500 VQC1501 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5

Bernoulli Gripper

4 e r t y u q With stoppers i u w 30 40 Basic type With vibration suppression cover: Resin u t y r u q With stoppers i !0 w e 40, 60 20, 30, 40, 60, 80 Basic type With vibration suppression cover: Stainless steel q u t y r With stoppers o i w e u !0 !1 9 Bernoulli Gripper ZNC Series 80 Basic type e !2 q u t y With stoppers o i r w e Component Parts No.

MVGQ

With light: 87.5)] MI W S DC 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz [ ] 4.5 to 50 Hz, 4.2/60 Hz AC Start-up Apparent power (VA) [Current: mA] CEP1 Symbol Specifications (2) 100 VAC: 35/50 Hz, 30/60 Hz 200 VAC: 17.5/50 Hz, 15/60 Hz [ ] 3.5/50 Hz, 3/60 Hz Tapped hole, drilled hole, pinned hole machined additionally Holding Surge voltage suppressor DC: Diode, AC: ZNR -XC79

VCW

(mm) Electrical entry P Port size A B C D E F H K L M N Model Grommet: G Conduit: C DIN terminal: D Conduit terminal: T Q R Q R Q R S Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 45 44 43 58 40.5 46.5 99 43 66 83 1/8 VCW21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 46 44 44 58 41.5 46.5 99 44 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 56.5 46 54.5 60 52 48.5 101 54.5 68 99 1/4

VQZ1000/2000/3000

pilot specifications, refer to page 2-7-60.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

to 10 L/min 0.5 to 10.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.1 to 6 L/min 0.3 to 6.3 L/min 5 V 20 mA 30% 70% PF2M710 92% 8% 0.3 to 25 L/min 1.3 to 26.3 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.3 to 15 L/min 0.8 to 15.8 L/min 5 V 20 mA 30% 70% PF2M725 92% 8% 0.5 to 50 L/min 2.5 to 52.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.5 to 30

CJ5-S

G 10 15, 30, 45, 60, 75, 100, 125, 150 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 RS H A Intermediate strokes by the 1 mm interval are available without using spacers for stroke adjustment.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

2 q @0 u !8 !7 MSQAA (High precision type) !9 e r Component Parts Description Material Description Material No. q w e r t y u i o !0 !1 !2 !3 !4 No.