HRX-OM-O021

When the temperature of the circulating fluid is set to lower than 10oC, use a 15% aqueous solution of ethylene glycol. Tap water may freeze in the thermo-chiller, leading to malfunction. 15% aqueous solution of ethylene glycol When a 15% aqueous solution of ethylene glycol is used, prepare the ethylene glycol aqueous solution separately.

HRX-OM-R005

When the temperature of the circulating fluid is set to lower than 10oC, use a 15% aqueous solution of ethylene glycol. Tap water may freeze in the thermo-chiller, leading to malfunction. 15% aqueous solution of ethylene glycol When a 15% aqueous solution of ethylene glycol is used, prepare the ethylene glycol aqueous solution separately.

Fieldbus System

L1 = 10.5 x n1 + 135.5 + 47 x n2 L2 = 10.5 x n1 + 42 L4 = L3 10.5 L5 = (L3 L1)/2 L6 = 47 x n2 + 82 L3: DIN Rail Overall Length (mm) Valve stations (n1) I/O Unit stations (n2) 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 0 1 2 3 4 5 6 7 8 9 185.5 198 210.5 223 223 235.5 248 260.5 273 285.5 285.5 298 310.5 323 335.5 348 348 360.5 373 385.5 398 410.5 423 235.5 248 248 260.5

HRX-OM-W032

Ambient temperature (C) Recommended circulating fluids 10 to 45 Tap water, ethylene glycol aqueous solution 15(wt)% -5 to 10 Ethylene glycol aqueous solution 15(wt)% Circulating fluid temperature(C) Recommended circulating fluids 10 to 35 Tap water, ethylene glycol aqueous solution 15(wt)% 5 to 10 Ethylene glycol aqueous solution 15(wt)% (2) And following instructions must be executed.

MQQ

2-M5 x 0.8 M4 x 0.7 13 4 11 16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 MM A F S + Stroke F H ZZ + Stroke (mm) Bore size (mm) A D NN F G1 P G2 MM S I ZZ H J N1 N2 NA M5 x 0.8 16 15 4 8 15 6 M12 x 1 M4 x 0.7 65 18.5 101 28 11 20 16 10 M5 x 0.8 22 15 5 10 15 6 M14 x 1 M5 x 0.8 74 22 114 30 12 21 19.5 16 Rc 1/8 28.5 18

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

12 15 22 15.5 18 50 21.5 11 13 15 17.5 22.5 24.5 11.5 13.5 16.5 23.5 17 19.5 14.5 63 24 13.5 14.5 17.5 20 25 26 25 18.5 21 80 14 17 24 13.5 16.5 17.5 20 25 28 17 20 27 20.5 23 100 17.5 20.5 27.5 17 21 21 23.5 28.5 32.5 21.5 24.5 31.5 25 27.5 Auto switch mounting heights (mm) Auto switch types D-F5, D-J5 D-F5W, D-J59W D-F5BA, D-F5F D-F5NT D-A3 D-G39 D-K39 D-A5, D-A6 D-A59W D-B5 D-B6 D-A44

44

25 43 69 68 71 68 122 d KS KX 21 17 21 44.8 39.4 7.6 18 M M L2 KM 21 17 21 48.1 41.7 8.5 19 L1 27 22 27 52.3 45.9 9.3 25 KF M Union Elbow: KFG2L H/DL L/LL Applicable tubing size (mm) O.D.

ISO Standard Hydraulic Cylinder

59 132 161.5 50 8 12.5 13.5 65 34 15 59 139 176 63 12 16 16 69 30 17 68 153 198 80 15 15 15 77 42 17 74 168 223.5 100 15 20 20 79 38 22 86 187 257.5 336 CHSD Series ISO Standard Hydraulic Cylinder 10 MPa Rod flange: CHSDFY Z + Stroke J MM 2 x RcP PJ + Stroke Y GB GA CHQ Head side cushion valve 4 x FD CHK CHN RD BB D E FY V CHM MA K F FT Air release Rod side air release G CHS CHS Air release

ARM10/11

L 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 VEX AMR NO. L 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 ITV NO.

ARM10/11

L 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 VEX AMR NO. L 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 ITV NO.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

The process and suction status can then be compared. 8 Diagnosis (flow rate) 0: OFF 1: ON 14 Fixed output 0: OFF 1: ON 15 Diagnosis (error) 0: OFF 1: ON 16 to 31 Measured flow rate value Signed 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Measured flow rate value (PD) Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Item Error Fixed Reservation Flow rate Reservation

10

-Wl Bore size [mm] MM MO N NB P RF S V W WL ZZ S ZZ 32 M10 x 1.25 15 27 35 1/8 11 92 4 6.5 24 143 40 M14 x 1.5 19 27 40 1/4 11 97 4 9 24 152 50 M18 x 1.5 19 31.5 43.5 1/4 11 106 5 10.5 24 168 63 M18 x 1.5 19 31.5 43.5 3/8 11 106 9 12 24 168 80 M22 x 1.5 23 38 56 3/8 21 132 11.5 14 40 208 100 M26 x 1.5 23 38 56 1/2 21 132 17 15 40 208 100 151 110 165 118 180 118 180 150 226 150 226 420 Air

VFS

Brown Brown White White Pink Pink Gray Gray Unused Unused Light green Light green 13 14 15 16 17 18 19 20 21 22 24 Yellow Pink Blue Purple Gray Orange Red Brown Pink 14 15 16 17 18 19 20 21 22 Gray Black White 23 24 25 23 Terminal no.

Table of Contents

bolt CUJB4-4 -6 -8 -10 CUJB6-4 -6 -8 -10 -15 CUJB8-4 -6 -8 -10 -15 -20 CUJB10-4 -6 -8 -10 -15 -20 Model Mounting bolt CUJB4-4 -6 -8 -10 CUJB6-4 -6 -8 -10 -15 CUJB8-4 -6 -8 -10 -15 -20 CUJB10-4 -6 -8 -10 -15 -20 C D A M2.5 x 21l M2.5 x 23l M2.5 x 25l M2.5 x 27l M3 x 22l M3 x 24l M3 x 26l M3 x 28l M3 x 33l M3 x 22l M3 x 24l M3 x 26l M3 x 28l M3 x 33l M3 x 38l M3 x 22l M3 x 24l M3 x 26l M3

SZ3000

14 185.5 175 155.5 15 198 187.5 166 16 210.5 200 176.5 17 210.5 200 187 12 223 212.5 197.5 13 235.5 225 208 14 L n 12 13 14 15 16 11 10 L n 12 13 14 15 16 11 10 L1 L2 L3 L4 L1 L2 L3 L4 235.5 225 208 14 248 237.5 218.5 15 260.5 250 229 16 273 262.5 239.5 17 285.5 275 250 18 285.5 275 260.5 12.5 298 287.5 271 13.5 248 237.5 218.5 15 260.5 250 229 16 273 262.5 239.5 17 285.5 275 250 18 285.5

V

15 40.5 6.5 3.3 ZPT16 U C 16 18 12.5 17.5 20 38.5 25 43.5 3.5 1.2 ZPT50U C 50 53 19.5 25.5 3 15 51.5 4.5 15 41.5 7.5 3.8 D E E P T Y P E D E E P T Y P E G:M5x0.8 G:M6x1 Model A B C D E F E F Y H:M6x1 H:M6x1 H O W T O O R D E R S E E N E X T P A G E Model A B D E Y C F G C F G ZPT10D 10 12 15 20 20 41 25 46 6 ZPT40D 40 43 29 35.5 3 25 61 4.5 15 51 17 ZPT16D 16 18 16 21 20 42 25 47 7 Courtesy

EXxx-OMN0035CN

3 16 5 17 7 18 9 19 11 20 13 21 15 22 24 V() 23 24 V() 24 0 V() 25 FE EX600-DXPE EX600-DXNE 102223 24 V 102223 24 V 1~814~21 1~814~21 DC24 V 4.7 k 4.7 k DC24 V 111224 0 V 111224 0 V FE 1325 FE FE -22No.EX-OMN0035CN-A (4)EX600-DXF 1 24 V() X0 2 0 0 3 1 4 0 V() X0 1 24 V() X1 2 2 1 3 3 4 0 V() X1 1 24 V() X2 2 4 2 3 5 4 0 V() X2 1 24 V() X3 2 6 3 3 7 4 0 V() X3 1 24 V() X4 2 8 4

7ND9071en

Valve series MBV QMBV 1) Valve size T5, QT5 QXT5 T25, QT25 QXT25 R, QR E RSOFT 3) FL MBV QMBV 2) D, P, C 4) ZX mm in Dead angle, % 15 1/2 15 20 3/4 15 25 1 14 25.5 19.5 15 25.5 27 12.5 25/1 1/1 11 25/2 1/2 11 25/3 1/3 10 40 1 1/2 12 24.5 12.5 12 16 21 12.5 50 2 10 9 13.5 24.5 12.5 18 8 17 20.5 23 12.5 65 2 1/2 9 13 18 80 3 10 8 12 18 8 16.5 8.5 9 8.5 15.5 100 4 10 8 12 16.5 8.5 16 9 8 7 14.5

Electric Actuator with Integrated Guide

Soft stroke limit 15 The program is about to exceed the stroke length set by the parameter. Over current 20 Three times the rated current or more is flowing into the driver unit. Over load 21 The driver unit continuously received a current exceeding the rated current for a prescribed time or longer. Over speed 22 The controller exceeded the maximum operational speed.

4/5 Port Air Operated Valve Series SYJA3000 1

A 1 (Bleed port) 21 R2 P R1 13 VM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 8.2 15 10 10 10 M5 x 0.8 (Piping port) 11 14 14 15 (Bracket) VR VH 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 VHS 10 9 36 7.1 2-M3 x 0.5 (Pilot port) 10 1.8