Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

53.5 28 40 242 36.5 30 6.8 6.6 12 16 M6 x 1 M8 x 1.25 14 372 354 186 190 124 158 118 116.5 73 106 144 140 64 30.5 43 286 40.5 35 8.6 8.5 14 15 M8 x 1.25 M10 x 1.5 Model FF II NN AA BB CC DD EE GG JJ KK LL MM WW XX ML1C25 ML1C32 ML1C40 1/8 5 5 5 5 7 28 26 14 44 20 16 12.5 120 42 1/8 6 5 6 5 8 36 28 18 54 36 18 12.5 140 48 1/4 6 5 6 5 8 47 30.5 17 62 30 22 16.5 170 51 9-14-8 9 Series ML1C Mechanically

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

53.5 28 40 242 36.5 30 6.8 6.6 12 16 M6 x 1 M8 x 1.25 14 372 354 186 190 124 158 118 116.5 73 106 144 140 64 30.5 43 286 40.5 35 8.6 8.5 14 15 M8 x 1.25 M10 x 1.5 Model FF II NN AA BB CC DD EE GG JJ KK LL MM WW XX ML1C25 ML1C32 ML1C40 1/8 5 5 5 5 7 28 26 14 44 20 16 12.5 120 42 1/8 6 5 6 5 8 36 28 18 54 36 18 12.5 140 48 1/4 6 5 6 5 8 47 30.5 17 62 30 22 16.5 170 51 9-14-8 9 Series ML1C Mechanically

Nozzle Type Ionizer

61 61 Pivoting bracket IZN10-B2 20 3.4 64 56 90 (Mounting angle adjustable range) 11.4 28 20 20 9 24 3.4 4 14 40 18 2 x Hexagon socket head cap screw M3 x 16 (Accessory) 13.7 59 18 IZN10E Series Dimensions DIN rail mounting bracket IZN10-B3 17 (Mounting angle adjustable range) 40 50 Internal mounting 20.5 2 x 3.4 33 30 30 44 61 55 26 17 11 8 x 3.4 9 2 x Hexagon socket head cap screw M3 x

CYPSeries

Max. load mass 2 = M/Mmax Review M1, M2, M3 Mmax is the allowable moment 2. Static moment 3 = Me/Memax Review Me1, Me3 Memax is the allowable moment 3.

CYPSeries

Max. load mass 2 = M/Mmax Review M1, M2, M3 Mmax is the allowable moment 2. Static moment 3 = Me/Memax Review Me1, Me3 Memax is the allowable moment 3.

Thermo-con/Rack Mount Type

This may shorten the pump life. 14. If tap water is used, it should satisfy the quality standards shown below.

CE

20 18 36 10 57.5 7 11.2 6.6 33 158.4 64 79.5 78 5.5 76.5 8 54 62 72 40 185 209 10 199 14 22 18 36 10 64.5 195.2 59 71.5 65.5 215.7 8 14.7 9 71 39 173.4 83.5 79 94 95 6.6 91 9 78 67 76 89 50 202 235 14 221 20 28 22 44 14 76.5 219.2 9 16.2 11 46 177.4 95 9 9 91 80 92 60 203 238 14 224 20 30 22 44 14 89.5 84.5 97 109.5 113 107 108 Dimensions for auto switch model D-F79W. 16 Series CEU Series

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

+0.030 0 10 9.5 4 Section AA Mounting base side B D +0.030 0 Q QL depth 1.5 3 11-/22-MXP10-20 Without magnet and switch rail Max. 2.5 2-M2 x 0.4 depth 3 8 2.5 4.7 15 15 L 6-M3 x 0.5 depth 4 2-M3 x 0.5 depth 3.5 (mm) G H J K L M N Q QL S V W Z Model 8 32 52.4 20 20 21 6.5 32 14 10 44 40 60 11-/22-MXP10-10 20 50 82.4 36 36 39 7.5 50 20 20 74 65 90 11-/22-MXP10-20 102 Precision air slide table

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

BA 0 0.3 CA BA 0 0.3 Drawing of view E MM (mm) Bore size Z A NN S Y LB LC LH LT LX LY LZ X 85.5 6 15 15 17 3 8 12 11 28 16.5 4.5 9 1.6 24 16.5 32 24.5 7 M3 x 0.5 M8 x 1.0 57.5 5 T NA NB BA BB CA CB D F GA GB GC H 3 7 83 82 16 10 54 55 M12 x 1.0 M10 x 1.0 21.5 23 5.5 5.5 14 14 2.3 2.3 33 33 25 25 42 42 20.5 20.5 9.5 9.5 M5 x 0.8 M4 x 0.7 18.3 12 17 20 20 14 5 4 8 8 5 5 5 5 11 11 28 28 15

Process Pump

Max. 0.1 mg/m3 (ANR) Note 2) Downstream oil mist concentration (Before oil saturation, 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) When 2 years passed, or pressure drop reaches 0.1 MPa Element life Refer to Best Pneumatics No. 5 for further details. Note 1) With auto drain is 0.1 MPa (N.O. type), 0.15 MPa (N.C. type).

IDX-OM-W017

(Ex.) 1. 2. 3. 4. 13-1 IDFA Series 13 1 IDX-OM-W017 13 V 13-2 ON0.5 OFF30 IDFA4E15E1-23-V IDF-S0198 1.6MPa AC230V10% (50Hz) ON 0.5sec OFF 30 13-3 1) 2) 3) 4) ON OFF 4 6 2 3 8 4 2 1 10 0.5 5 0.5 ON:SEC OFF:MIN 13-2 IDFA Series 13 2 IDX-OM-W017 14 14 14-1 / IDFA Series 14-1 14 1 C2019/11 D2020/10 E2021/5 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: +

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VP7 285.5 21 273 No.

Escapements Series MIW/MIS

Note 2) Refer to page 14 for lead wire length.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators 2 x M2.5 x 0.45 thread depth 3 Operating port 2 x M3 x 0.5 Vacuum suction port M5 x 0.8 2 6 J I 5 Max. 10.5 (With stroke adjuster at retraction end) 4 7 0.5 19 3 5.5 5.5 5.5 3 3 6.5 2 x M2.5 x 0.45 thread depth 3 12.5 K Stroke adjuster at extension end Stroke adjuster at retraction end (With stroke adjuster at extension end) 18 N x M3 x 0.5

3 Port Solenoid Valve

Note) Order is accepted in 10 units. 3 Compact Direct Operated 3 Port Solenoid Valve Series S070 Dimensions Base mounted with screws S070B-G-M3 Grommet type 16 3 7 12 18 2-3.4 Mounting hole 5 150 (lead wire AWG#26) 22 6 20.5 19 3 2 1 9.5 6.5 5.5 4.5 12.3 10 10 25 M3 0.5 3 (EXH) port M3 0.5 1 (SUP) port M3 0.5 2 (OUT) port S070B-C-M3 Plug lead type 0.1 W with power saving circuit 150 (lead

IDG

/100SV 614 14-19-51

Speed Controller with

17 12 22.8 20.5 4.3 8 19.3 22 25 12 22.1 28 33 14 4.3 8 25 26.2 Note) Reference dimensions Inch Size D1 D2 D3 D4 L1 L2 L3 MAX.

PSxx-OMT0001CN

m5 m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -20No.PS-OMT0001CN-E 2 ISA3-() ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 C(4 ) C(6 ) F(G ) H 13 13.6 19 ISA-14() -21No.PS-OMT0001CN-E 2 ISA3-(DIN ) ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 L2 62.5 125 162.5 200 237.5 275 L3 73 135.5 173 210.5 248 285.5

ARM10/11

manifold options, please refer to pages 14-4-34 to 14-4-38.

ARM10/11

manifold options, please refer to pages 14-4-34 to 14-4-38.