HRL

130 16 180 16 Maximum pump head [m] 50 49 55 49 68 49 Settable pressure range5 [MPa] 0.10 to 0.50 0.10 to 0.49 0.10 to 0.55 0.10 to 0.49 0.10 to 0.68 0.10 to 0.49 Minimum operating flow rate6 [L/min] 20 2 25 2 40 2 Tank capacity [L] 42 7 42 7 60 7 Bypass circuit (With valve) Installed Electric conductivity setting range [S/cm] 0.5 to 45.0 0.5 to 45.0 0.5 to 45.0 Circulating fluid system

CXWM/CXWL

For dimensions of 25 stroke, refer to page 8-26-20. 8-26-19 18 Series CXWM 16 With End Lock: CXWM1625 stroke R 2 x 2-M5 x 0.8 thread depth 10 2-M5 x 0.8 2 x 2-5H7 depth 6 +0.012 0 Cylinder port M8 x 10 Adjusting bolt 2-M5 x 0.8 Hexagon socket head cap plug 4-4.3 through 4-8 counterbore depth 4.5 M8 x 1.0 2-RB0805 shock absorber (Single housing installed) 2-M5 x 0.8 plug (M-5P) (Cylinder port

Series VQ Metal Seal/Rubber Seal Body Ported

Two quantities of terminals can be selected in accordance with the number of stations. (8 terminals/16 terminals) Max. 16 stations Porting specifications Applicable stations Series Port size P, R Port location A, B C6 C3, C4, M5 VQ0 VQ1000 VQ2000 Side Max.16 C3, C4, C6, M5 C4, C6, C8 C6 Side Max.16 C8 Side Max.16 Electrical Wiring Specifications Terminal No. Terminal No.

125

Applicable cable O.D. 3.5 to 7 63.9 Max. 10 101.7 56.4 45.1 VEX3121: M5 VEX3122: None (Port PA/Pilot air) M5 (Port PE/ Pilot exhaust) Pg7 M5 (Port P1/Pilot air) M5 (Port P2/Pilot air) Manual override A B P2 P1 102.6 PA 3 R A 2 A 2 64.1 61.8 59.1 58.6 58.1 58.1 1 P 1730 3 Port 3 Position Valve VEX3 Series Dimensions: Body Ported/VEX332 External pilot solenoid: VEX3321 Internal pilot solenoid

Rotary Table Series MSU

Dimensions (mm) 1in = 25.4mm MSUA20 MSUA20-S, SE Scale: 50% 8-M5 x 0.8 depth 10 C Top ports/MSUA20-SE 78 A port B port 14 2-M5 x 0.8 B 48 59 38 15.5 42 4-M6 x 1 depth 7 22.5 5 +0.025 0 3H9 Long groove depth 5 (positioning pin hole) A 22.5 52h9 0 0.074 +0.030 0 +0.052 0 43 30H9 3-4H9 depth 4 5 ( A , B , C ) 4 2-6.6 through 3-R2 3-R2 21.5 10.5 16 5 53.5h9 0 0.074 7 6 43 23 10.5 46 4 13 Angle

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 M5 x 0.8 AS221F-01 AS231F-01 R 1/8 AS221F-02 AS231F-02 R 1/4 AS321F-02 AS331F-02 R 1/4 AS321F-03 AS331F-03 R 3/8 Elbow type AS421F-04 AS431F-04 R 1/2 AS121F-U10/32 AS131F-U10/32 10-32 UNF AS221F-N01 AS231F-N01 NPT 1/8 AS221F-N02 AS231F-N02 NPT 1/4 AS321F-N02

Shock Absorbers and Rate Controls

Ali d mensions in m Llimeters. 42

Vacuum System Peripherals:

Temperature characteristics 12 to 24 VDC (Ripple 10% or less) Operating voltage 17 mA or less at 24 VDC, 2 output: 25 mA or less at 24 VDC Current consumption 8 1 8 1 01: R / , M5 x 0.8 T1: NPTF / , M5 x 0.8 00: ZM ejector mounted style Port size 0 to 60C (No condensation) Operating temperature range For details, refer to Best Pneumatics Vol. 16.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

for 1/4" M5: M5 thread 53 13.8 A 2 10 Manual override 24.5 7.8 (N1, N3, N7) (M5: 5.7) Cover diameter 1.4 Cross sectional area 0.2mm2 (Lead wire length) 300 SMC 27.5 16.3 18 13.6 7 23.4 Mounting holes 41 M5 x 0.8 P port M5 x 0.8 R port R 3 P 1 10.7 9 M5 x 0.8 External pilot port 32 (Only external pilot port type(R)) L type plug connector (L): VQZ115L -N1, N3, N7, M5 M type plug connector

42

Maximum stations are 16.

Digital Gap Checker

-2 3 ISA-16-3 4 ISA-16-4 5 ISA-16-5 6 ISA-16-6 With connector lead wire ZS-31-B With connector lead wire ZS-31-C : Spacers are included for 4 and 6 stations.

MB

115 + 55 n (Same side) n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 110 85 115 120 2 (Different sides or Same side) 120 70 60 (n4) 2 85 + 55 (n4) 2 (n4) 2 110 + 55 (n4) 2 115 + 55 (n4) 2 120 + 55 (n4) 2 (n4) 2 60 + 55 120 + 55 70 + 55 n (Same side) D-A59W n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8,

VM

VM120-01-07 VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM-30AR Red Push button (Mushroom) VM-30AB

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) (mm) Q1 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Q2 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Size 30 50 63 80 100 Size 30 50 63 80 100 Symbol: A35 Symbol: A36 Symbol: A37 Machine female threads into the short shaft.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) (mm) Q1 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Q2 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Size 30 50 63 80 100 Size 30 50 63 80 100 Symbol: A35 Symbol: A36 Symbol: A37 Machine female threads into the short shaft.

VS 8-2/VS 8-4

80 4 x M5 mounting holes Formula: L1 = 19n + 71, L2 = 19n + 175 n: Stations (Maximum 16 stations) Dimension (mm) 7 L n 6 5 4 3 2 9 242 346 90 194 1 128 232 223 327 8 204 308 10 261 365 11 280 384 12 299 403 13 318 422 14 337 441 15 356 460 16 375 479 185 289 166 270 147 251 109 213 L1 L2 18 L Series VS 8S R 2 4 kit (Lead wire) IP65 compliant Direct electrical entry type IP65 enclosure

MK

Example) M5 x 75l (MKB) ML2B MK20/25 C J G5-S Mounting bolt MK12/16 CV MVGQ Flat washer CC Note) Be sure to use a flat washer to mount 12 and 16 cylinders via through-holes.

4/5 Port Air Operated Valve SYJA3000 Series

: SYJA5240-01 2 x 4.3 (For mounting) 44 2 x M5 x 0.8 (Pilot port) VGA 37.5 4 1 2 x M5 x 0.8 (Pilot port) 11 B A 5 VPA 1 A B 1 10 M5 x 0.8 (A, B port) 2 x 2.6 (For manifold mounting) 24 A B VPA3 19 1 P R Manual override 54 2 42 47 54 Manual override 23 20 15 3 11 2 x 2.6 (For mounting) 11.5 45 2 x 1.3 (Breathing port) 33.5 M5 x 0.8 (P , R1, R2 port) 21.5 6 6 P R1 17 17 15 8.5 R2 45.5 1/8 (

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

(4(A), 2(B) port) C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread L n Formula: L1 = 11.5n + 55.5, L2 = 11.5n + 73 n: Stations (Maximum 16 stations) Dimensions 16 239.5 257 287.5 298 15 228 245.5 275 285.5 14 216.5 234 262.5 273 13 205 222.5 250 260.5 12 193.5 211 237.5 248 11 182 199.5 225 235.5 10 170.5 188 212.5 223 9 159 176.5 200 210.5

SYJA3000

48(22) Base mounted 2 position double SYJA3240-M5 51(25) 1.8 (0.1) 3 position exhaust center SYJA3340-M5 M3 X 0.5 M5 X 0.8 54 (28) 3 position exhaust center SYJA3440-M5 3 position pressure center SYJA3540-M5 2 position single SYJA3130 22 4 port base mounted (For manifold) 2 position double SYJA3230 25 M3 X 0.5 (1) 1.2 (1) M3 X 0.5 3 position exhaust center SYJA3330 (0.067) M5 X 0.8 3 position