SFOD-OMT0009CN

11 () 12 () LE 1 800 1 1

Table of Contents

M3 screw For details on specifications and handling, refer to the separate technical instruction manual.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-12 16 4 32 6 18 6 35 8 20.5 8 39 10 Series SY3000 SY5000 SY7000 Part No. 22 10 43 12 SY3000-52-2A 24 12 45.5 14 SY5000-52-2A SY3000/5000 DIN rail dimensions and weight SY7000-52-2A VZ1000-11-1Blocking disk indication stickers Refer to L dimensions Enter a number from the DIN rail dimension table below in the .

VCA

VCA20-12-1A VCA30-12-1A VCA40-12-1A Connector Mounting screws (2 pcs.)

Low Differential Pressure Sensor

Description ZS-28-A Note D Power supply/Output connection cable Mounting screw (M3 x 8L) (accessory) Bracket ZS-28-B With M3 x 5L (2 pcs.) Sensor connector ZS-28-C 1 pc. Panel mount adapter Panel mount adapter ZS-27-C With M3 x 8L (2 pcs.) ZS-27-D With M3 x 8L (2 pcs.)

MXF

Model Bolt Maximum tightening torque (Nm) Maximum tightening torque (Nm) Maximum screw-in depth L (mm) Maximum screw-in depth L (mm) Model Bolt Selection Caution MXF8 MXF8 6 6.5 M3 x 0.5 0.9 M3 x 0.5 0.9 MXF12 MXF12 6 5.5 M3 x 0.5 0.9 M3 x 0.5 0.9 1. If intermediate stop by external stopper is done, avoid ejection. If ejection occurs, it may cause damage.

3 Port Solenoid Valve Series VQ100 1

Dimensions Grommet VQ10-G-M5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking type manual override 30.7 28 11 A P (5.9) (5.9) 7 ( 4 . 1 ) 5 5 5 4.9 9.7 4.9 3-M5, (M3) (18.1) ( ): M3 Broken line: Locking type manual override 4-12-10 11 3 Port Solenoid Valve Series VQ100 Dimensions L plug connector VQ10-L-M5 (M3) 35.1 Manual override

Slider Type/Ball Bushing Bearing

2-wire 12 V Connector Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit Diagnostic indication (2-color indicator) 5 V, 12 V 24 V Grommet 2-wire Water resistant (2-color indicator) 12 V F7BAV F7BA With diagnostic output (2-color indicator) IC circuit F79F 4-wire (NPN) 5 V, 12 V 3-wire (NPN equivalent) IC circuit A76H 5 V Grommet A72H A73H A80H A72 A73 A80 A73C A80C 200 V 100 V 12

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

x 0.5 (Plug: M-3P) F 6 QL 13.5 17 0.05 Stroke: S M 2 M4 x 0.7 Mounting base side B D 7 5 2-M3 x 0.5 Piping port Y J 3 M3 x 0.5 Vacuum suction port Z Max. 9.5 (Rubber stopper) 2.4 depth 2 2.5 3.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL Without magnet and switch rail 2 2-M2 x 0.4 depth 2.2 12 Metal stopper 11-/22-MXP6-10 Max. 10.5 F 4-M3 x 0.5 depth 3 12 2-M2 x 0.4 depth 3 (mm) E F H J M Q QL

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Auto Switch Proper Mounting Position (Detection at Stroke End) D-A93 12 16 to 25 A B W A B W D-M9B/M9N 12 16 to 25 A B W A B W B D-A93 B D-M9B/M9N/M9P Bore size (mm) A 11.5 W 4 A 15.5 W 5.5 12 16 20 25 0.5 4.5 12 0 4.5 16 4 6 16 3.5 1 20 7.5 2.5 17 5.5 -1 21 9.5 0.5 Specific Product Precautions Be sure to read this before handling. Mounting Caution 1.

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(mm) 3.2 4 6 8 10 12 16 One-touch In/Out connection Possible to use in vacuum to 100kPa M3 Nylon One-touch Mini Series KJ M5 Soft nylon 1 8 Polyurethane Unions Applicable tube Metric size M5 One-touch In/Out connection Possible to use in vacuum to 100kPa M6 Nylon One-touch Fittings Series KQ2 1 8 Soft nylon 1 4 3 8 1 2 General purpose fitting Series Polyurethane Applicable tube Metric size

Clean Air Module

/8 Restrictor (36.5) Clean air filter Note) One-touch fitting 12 103 85 13.2 34.8 3 (41) 111 59 71 80.4 41 59 59 Rc 3/8 (NPT 3/8) 521 3.5 (3.5) Note) This port is unavailable.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

X A 2 10 24 1 P 3 R Manual override 34 41 3.5 (Lead wire length) 38.5 300 Cover diameter 1.4 Cross sectional area 0.2mm2 SMC 35.5 A port PE 16 12 7.5 7.5 14.5 7 7.5 1/8 NPTF P,A,R port M5 x 0.8 PE port L type plug connector (L): VQZ115(R)L -01T M type plug connector (M): VQZ115(R)M -01T 51.5 300 (Lead wire length) 60.5 300 (Lead wire length) Cover diameter 1.5 Cross sectional area 0.23mm2

IDU/IDF

Note 5) Spare part for auto drain INA-20-41-04 is AD44x445.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

, 16, 90+55 (n4) 2 n=4, 8, 12, 16, 110+55 (n4) 2 n=4, 8, 12, 16, 120+55 (n4) 2 n=4, 8, 12, 16, n (Same side) 15+55 1.26 (1.30) 1.81 (1.86) 2.79 (2.84) 4.93 (5.08) 6.79 (6.99) n=2, 4, 6, 8, Flange 2 (Dif. / same side(s)) Standard weight 90 100 110 120 20 1.12 (1.17) 1.70 (1.74) 2.63 (2.67) 4.59 (4.74) 6.65 (6.86) Single clevis 100+55 (n4) 2 n=4, 8, 12, 16, 110+55 (n4) 2 n=4, 8, 12, 16

T

(mm) 6 8 10 12 2.5 I.D.

AME

Air Flow Max. flow line Pressure drop (MPa) Max. air flow rate (m3/min (ANR)) Air flow rate (l /min (ANR)) Model Selection Select the model in accordance with the following procedure taking the inlet pressure and max. air flow into consideration. (Example) Inlet pressure: 0.6 MPa Max. air flow capacity: 5 m3/min (ANR) 1.

VQ

Dimensions Grommet VQ1l0l-lGlM5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 Mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking style manual override 30.7 28 11 A P (4.1) (5.9) (5.9) 7 5 5 5 4.9 9.7 4.9 3-M5 (M3) (18.1) ( ): M3 Broken line: locking style manual override 2.9-8 Series VQ100 Dimensions L plug connector VQ1l0l-lLlM5 (M3) (37.8) 31.4 Manual override 6.1 4.9 12.4

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

0.5 M5 x 0.8 PA M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 Q S SD SF SU UU WA WB WC WD M3 x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 WE WF XA XB XC YA YB YC Size 3.5 16 50.5 10.8 24.4 9.4 25 9.5 2H9 2 4.8 20 22.5 2H9 2 11 2H9 2 1 3.5 18 56 13.4 26.2 11.3 28 10 2H9 2 5.3 21 24.5 2H9 2 11.5 2H9 2 2 3.5 20.5 60 15.2 31 11.8 30.5 12 2H9 2 5.3 25 27 2H9 2 13.5 2H9 2 3 4.5 23 73.5 15.4 37.4 14.9 34.5 14 3H9 3

Compact Hydraulic Cylinder Series CH
KGB

10 M6 x 1 8 5.5 6.5 M6 x 1 12 25 56 45 11 14 13 12 M8 x 1.25 10 6.5 7.5 M6 x 1 12 32 68 56 12 18 15 13 M10 x 1.5 12 7 8.5 M8 x 1.25 16 40 79 65 14 22.4 19 16 M12 x 1.75 15 8 10 M10 x 1.5 20 50 85 70 15 28 24 21 M16 x 2 20 9.5 11.5 M12 x 1.75 24 63 95 77 18 35.5 31 27 M20 x 2.5 24 11.5 14 M16 x 2 24 80 109 88 21 45 39 36 M27 x 3 33 15 17 M18 x 2.5 27 100 132 106 26 56 48 41 M30 x 3.5 36 17.5