LEH_C

100% 10 , 16 20 , 25 540 40% 100% 2150 80% 100% 1120 60% 100% 10L , 16L 510 50% 100% 3150 70% 100% 20L , 25L 520 40% 100% 2130 50% 100% [mm/sec] () 2130 50% 100% 520 40% 100% [mm/sec] () 4150 50% 100% 540 40% 100% 3150 80% 100% 1130 60% 100% 510 40% 100% 22 - 150% LEHZJ 1) (SVON ) 2)CN1 EMG() a)SVRE SETONON SVRE OFF SETON ON b) SVREON SVREON c) SVREON

CQS

Model C D 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 C' D' 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 Mounting bolt Mounting bolt CQSKB12-5D -10D -15D -20D -25D -30D CQSKB16-5D -10D -15D -20D -25D -30D CQSKB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSKB25-5D -10D -15D -20D -

10

MPa 100 100 Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 0.5 MPa 120 120 80 80 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 60 60 0.4 MPa 0.3 MPa 80 80 0.4 MPa 0.3 MPa 40 40 0.3 MPa 0.3 MPa 0.2 MPa 40 40 0.2 MPa 0.2 MPa 20 20 0.2 MPa 20 40 60 80 100 120 0 40 80 120 160 200 0 0 0 40 80 120 160 20 40 60 80 100 120 140 Gripping point distance R [mm] Gripping point distance R [mm] Gripping point distance R

Flow Control Equipment

32 to 63 40 to 100 40 to 100 40 to 100 / 1 8 / 1 4 / 1 4 4.1-35 / 3 8 / 1 4 / 3 8 / 1 2 Applicable tube O.D Applicable cylinder bore size (mm) Page Metric size (mm) Inch size (Inch) Model Port size in cylinder side M5 / 1 8 / 5 32 / 3 16 / 1 4 / 5 16 / 3 8 / 1 2 3.2 4 6 8 10 12 With One-touch Fittings/Elbow 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 AS12l 1FG-M5 AS22l 1FG-01 AS22l 1FG-

XL

T msec 600 600 Bellows seal 400 400 200 200 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size XLF Normally closed XLG Double acting (dual operation) Valve type Model 140 140 120 120 100 100 80 80 T msec T msec T msec O-ring seal 60 60 40 40 20 20 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size Valve type XLD Normally closed Model Exhaust Initial exhaust valve 1200 1200 1000 1000 800 800

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Nil Standard P Note 1) Axial piping Note 1) The combination of axial piping and both ends adjusters or retraction end adjusters is not available.

High Vacuum Angle Valve, XL Series

T msec 600 600 Bellows seal 400 400 200 200 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size XLF Normally closed XLG Double acting (dual operation) Valve type Model 140 140 120 120 100 100 80 80 T msec T msec T msec O-ring seal 60 60 40 40 20 20 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size Valve type XLD Normally closed Model Exhaust Initial exhaust valve 1200 1200 1000 1000 800 800

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Movement MOD Speed Position Acceleration Deceleration Pushing force Trigger LV Pushing speed Moving force Area 1 Area 2 In position 0 1: Absolute 100 10 3000 3000 0 0 0 100 0 0 0.50 1 1: Absolute 100 100 3000 3000 0 0 0 100 0 0 0.50 2 1: Absolute 100 200 3000 3000 0 0 0 100 0 0 0.50 Note) The step data input range changes depending on the actuator model.

CQS

Cylinder stroke (mm) Long stroke (mm) 35, 40, 45, 50, 75, 100 Bore size (mm) Standard stroke (mm) 5, 10, 15, 20, 25, 30 Action D Double acting 12, 16 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches/Refer to p.5.3-2 for further information on auto switch.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

MY3A MY3B MY1H/m1 MY1H/m2 MY1H/m3 MY3M 50 50 50 40 40 40 30 30 30 20 20 20 Load mass kg Load mass kg Load mass kg MY1H40 MY1H40 MY1H40 MY1H40 MY1H40 MY1H40 10 10 10 MY1H32 MY1H32 MY1H32 MY1H32 MY1H32 MY1H32 MY1H25 MY1H25 MY1H25 MY1H25 MY1H25 MY1H25 5 5 5 4 4 4 3 3 3 2 2 2 D1 1 1 -X 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Technical Data Piston

Slider Type/Ball Bushing Bearing

CY1H25 (Nm) 64 56 50 40 30 50 40 M1 1.5 10 13 M2 2.5 16 16 M3 1.5 10 13 M1 28 56 64 M2 26 85 96 M3 28 56 64 Model CY1H25 CY1HT25 CY1HT32 Model CY1H10 CY1H15 CY1H20 30 28 26 20 20 CY1H20 CY1H15 16 13 Moment Nm Moment Nm 10 10 2 2.5 3 4 5 3 4 5 CY1H10 M3 2 CY1H10 1.5 1 1 0.5 0.5 70 100 300 500 100 300 500 1000 1000 70 M1 M2 Piston speed mm/s Piston speed mm/s Graph (3) Graph (2) Moment generated

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(Including insulating material) 1.5 mm 1.27 mm 1.65 mm 1.27 mm Rated current 3 A 4 A 3.1 A 4 A Rated voltage 125 V 60 V 125 V 60 V Contact resistance 40 mW or less 5 mW or less 40 mW or less 5 mW or less Insulation resistance 1000 MW or more 100 MW or more 1000 MW or more 100 MW or more Withstand voltage 1.5 kV 1.0 kV 1.5 kV 1.0 kV Rating/Performance Ambient temperature Connector 25 to +60C

CNG

40 100 100 32 30 40 50 30 40 50 40 25 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 25 20 10 10 5 4 3 5 4 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) 1000 1000 Maximum speed: V(mm/s) 20 21 Series CNG Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Compact Type

0.01 0.01 0 20 40 100 60 80 0 20 40 100 60 80 Overhang L (mm) Overhang L (mm) CXSJM CXSJL Graph V = over 400 mm/s; up to 100 mm stroke 14 15 CXSJM CXSJL Graph V = over 400 mm/s; up to 75 mm stroke 1 1 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 20 20 10 15 15 0.01 0.01 0 20 40 100 60 80 0 20 40 100 60 80 Overhang L (mm) Overhang L (mm) 6 Series CXSJ Construction: Standard Piping CXSJM

Cylinder with Lock Series CNG

0.5MPaP 200 200 40 100 100 32 30 40 50 30 40 50 40 25 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 25 20 10 10 5 4 3 5 4 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) 1000 1000 Maximum speed: V(mm/s) Note: 1kg = 2.2046lb 1MPa = 1450psi 1in = 25.4mm 20

Thermo-chiller/Rack Mount Type

0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRR010-W-20 [50 Hz] [60 Hz] 400 400 35C Heating capacity [W] Heating capacity [W] 35C 300 300 25C 25C 200 200 5C 5C 100 100 Facility water temperature Facility water temperature Facility water temperature Facility water temperature 0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35

SMC Pneumatic Clean Series

No 3000G 45-089 Stripper for round cable (2.0) can be used for a 2-wire type cable. 181 Applicable auto switch list Cylinder CDQSX CDBM2 CDM2X CDQ2X CDQS CDM2 CDG1 CDQ2 CDA2 CXSJ CDJ2 MGP MXQ Cylinder series MGF MXP MXS CDU REC CXS CYP CUJ 40/63/100 32 to 100 20 to 40 20 to 40 20 to 63 40 to 63 12 to 25 20 to 40 12 to 63 12 to 25 32 to 63 20 to 40 80/100 6 to 10 6 to 25 6 to 32 6 to 16 6

SMC Basic Pneumatics

4 = 100 ff, f 1 = 40"F, T2 = AO"F, VZ = ? We have to use th absolute tompratures in H (Rankine), thus 1oo v2 vz= 19!Ij!2Z=1ssrt" 4997 539?

%silltr

4 = 100 ff, f 1 = 40"F, T2 = AO"F, VZ = ? We have to use th absolute tompratures in H (Rankine), thus 1oo v2 vz= 19!Ij!2Z=1ssrt" 4997 539?

2/3 Port Valve

Oil (D, N) Vacuum (V, R, Y) AC VX21 60 40 60 60 40 100 _ 60 40 80 AC DC AC, DC Max. DC Option Material 50 45 20 60 40 15 _ 10 (1) 10 (2) 5 Description No. AC 20 Min. Standard Aluminium VX22 Body q DC Note 1) Dew point 10C or less. Note 2) 50cSt or less. Note 3) "D", "N", etc. in the parenthesis are option symbols.