CG5-S

25 Tubing T, TU P. 26 Floating Joint/Stainless Steel Type JS P. 27 Features 2 Stainless Steel Cylinder Se ries CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10mm 16mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Mounting Basic type Axial foot type Front flange type Double clevis type B L F D CJ5 L 16 S R 60 Without Auto Switch CDJ5 L

Fluoropolymer Piping Equipment

100% LVP Hydrochloric acid 38% LVW Hydrofluoric acid 50% LQ1 LQ1 Hydrogen peroxide 60% LQ3 LQ3 Methanol 100% LVN LVN Methyl ethyl Ketone Note 2) Nitric acid 70% LQHB LQHB Note 2) Phosphoric acid 86% TL TIL Caustic potash 85% TLM TILM Sulfuric acid 100% Note 2) TD TID Toluene Note 1,2) TH TIH Xylene Note 2) Sodium hydroxide (caustic soda) 100% Note 2) 1.1.1-Trichloroethane

VM

Straight plunger Roller plunger Cross roller plunger 1.5 0.7 0.7 0.3 0.4 0.7 30 45 30 Roller lever VZM500 VZM400 VFM300 VFM200 One way roller lever 45 30 Straight plunger Roller plunger Flat button Groove 0.5 0.2 0.2 0.1 0.2 30 45 30 Roller lever Protrusion VM800 Adjustable roller lever 45 Adjustable rod lever Recessed portion Fastening ring Avoid abrupt angles on limit switch actuator.

Thermo-chiller/Rack Mount Type

/115 VAC) p. 12 Applicable to DI Water Piping p. 32 Water-cooled Refrigeration (Single-phase 100/115 VAC) p. 12 Inverter Pump Mounted p. 33 Specifications High-Pressure Pump Mounted p. 34 Air-cooled Refrigeration (Single-phase 100/115 VAC) p. 13 With Feet/Without Rack Mounting Brackets p. 35 Water-cooled Refrigeration (Single-phase 100/115 VAC) p. 13 Removed Parts p. 35 HRR012/

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

M12 x 1.75 27 14 34 35 34 100 125 15 100 250 16 112 170 M27 x 2 38 6.5 140 140 112 35.5 80 35 27 19 M14 x 2 27 16 34 35 34 100 160 17 110 279 18 140 197 M33 x 2 42 9 174 174 140 45 100 38 36 22 M16 x 2 28 18 38 40 43 108 (mm) Bore size (mm) Y ZZ P R S T V W X 40 8 246 1/4 37 114 11 7.5 8 27 50 10 262 3/8 43 116 11 10 9 30 63 10 280 3/8 47 120 11 12 10 37 80 13 312 1/2 57 132 11 16 13 40 100

Compact Cylinder

Standard Strokes Bore size [mm] Standard stroke [mm] 12, 16 5, 10, 15, 20, 25, 30 20, 25, 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 50, 63, 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50 Intermediate strokes are available as a special order.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(M): SYJ5140-lMll-01 VFS 2-4.3 (Mounting holes) 2-4.3 (Mounting holes) (Mounting holes pitch) VS A B (Mounting holes pitch) 24 B A VS7 A B R P 24 B A 37.5 (Mounting holes pitch) 42.7 4 R P 37.5 4 (Lead wire length) (Mounting holes pitch) 59.9 42.7 300 63.9 [65.2] 73.5 300 (Lead wire length) 62.6 [69.1] 45 51.5 [58] 45 48.6 8.5 48.6 8.5 32.5 39.1 32.5 21.5 21.5 6 6 6 6 10 10 4-Rc(PT)1/8

Rotary Clamp Cylinders

Rotary Angle Theoretical Output Operating pressure (MPa) Unit: N During unclamping (Extension end) 80 to 100 (9010) L type During unclamping (Extension end) Bore size (mm) Rod size (mm) Operating direction Piston area (cm2) 0.8 1.1 1.5 2 2 3 3.7 4.9 6 8 10.5 12.5 16.5 19.6 28 31.2 80 to 100 (9010) R type 0.3 24 33 45 60 60.8 90.2 112 149 182 243 319 380 502 596 851 948 0.5 40 55 75 100 100

New

For Air 1.0 Downstream pressure of valve (P2) [MPa] Upstream pressure of valve P1z1.0 MPa 0.8 Subsonic 0.9 0.6 Critical pressure 0.8 0.7 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 3/64 (1.2) 50 100 150 3/32 (2.4) 100 200 300 400 1/8 (3.2) 300 200 100 400 500 600 700 5/32 (4) 200 1, 000 800 400 600 7/32 (5.6) Series VXN2 250 500 7/32 (5.6) Series VXN3 500 1, 000 1, 500 2, 000 Flow rate Q [L/min

REC

150 to 700 REA 25 25 45 1500 32 150 to 1000 32 50 REC 40 200 to 1000 40 60 RHC *Please consult SMC representative for availability of stroke other than standard.

Rotary Actuator

Size: 30, 50, 63, 80, 100 Size: 30, 50, 63, 80, 100 90, 180 90, 180, 100, 190 90, 180 90, 180, 100, 190 30 50 to 100 30 50 to 100 Rotating angle Lightweight body by changing the body and the cover shape.

CV/MVGQ

CV Standard Stroke MVGQ Bore size (mm) Standard stroke CC 10 15, 30, 45, 60 16 15, 30, 45, 60 RB Made to Order Specifications (For details, refer to page 10-21-1.)

RSQ

120.5 + 2 stroke 72.5 + Stroke 340.2 45 Workpiece transfer direction RSQB -L 40 50 Bore size: 40, 50 2-Rc 1/8 Stroke 36 31 7.5 7.5 Z 13.5 10 20 14 24.5 8 R38 J E W I T 25 24 14 U 10 (11) 20 (22) 4-N through 8-O counterbore 28 100 + Stroke A + 2 stroke B + Stroke E M 0.2 Built-in One-touch fittings Tubing O.D.

NAAMS Standards Compliant

Clamping block Fulcrum L Bore size: 50 Bore size: 63 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 Allowable load mass [kg] Allowable load mass [kg] 15 15 105 30 30, 45, 60 105 90 120 120 75 90 45, 60 75 Arm opening angle: 135 Arm opening angle: 135 Distance to the center of gravity [mm] Distance to the center of gravity [mm] Bore

HRX-OM-T002

Table 8-1 Quality criteria for clean water (tap water) Standard value Item Unit For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Sulfuric acid ion [mg/L] 50 or less 200 or less Standard item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

0.4

Formula: L1 = 10.5n + 45, L2 = 10.5n + 167.5 (For one input block.

ZP

How to Order B01 H N 40 25 ZPT A18 J Pad diameter (mm) Mounting thread 40 50 40 50 A18 A22 M18 x 1.5 (40 to 80) M22 x 1.5 (100, 125) 63 63 Vacuum entry 80 80 100 100 B01 Rc 1 8 125 125 Buffer stroke (Rotating) Pad type H Heavy duty Stroke 40 50 63 80 100 125 50 25 Material 75 100 N S NBR Silicon rubber Spring Force U Urethane rubber 40 to 80 Pad diameter 100, 125 F Fluoro rubber E EPR 6.9

IDG

(Because barrel nipples are used for equipment connections.) 100 Standard dew point temperature and air flow rate Outlet air flow rate Purge air flow rate (l/min(ANR)) Flow rate by size Symbol Standard dew point (C) 5 50/12 50/6 3 25/6 25/3 10 100/2 20 200/5 30 300/7 50 60 75 100 Nil H 20 15 500/12 600/12 750/15 1000/19 Drain discharge method 500/6 600/6 750/8 100/1 200/2 300/3 1000/11

HRX-OM-S004

Table 7-1 Quality criteria for clean water (tap water) Standard value Item Unit For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Sulfuric acid ion [mg/L] 50 or less 200 or less Standard item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

Aluminum High Vacuum Angle Valve

Note 2) For other rated voltages (48, 100 VDC), please consult with SMC.