ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Standard Strokes [mm] Bore size [mm] Standard stroke [mm] 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Note) Intermediate strokes not listed above are produced upon receipt of order.

CQS

Cylinder stroke (mm) Long stroke (mm) 35, 40, 45, 50, 75, 100 Bore size (mm) Standard stroke (mm) 5, 10, 15, 20, 25, 30 Action D Double acting 12, 16 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches/Refer to p.5.3-2 for further information on auto switch.

MGP

1.87 2.17 2.41 2.64 2.88 50 MGP50 1.84 2.19 2.31 2.72 2.78 2.96 3.15 3.33 3.83 4.20 4.57 4.94 63 MGP63 2.18 2.53 2.65 3.06 3.12 3.30 3.49 3.67 4.18 4.55 4.91 5.28 80 MGP80 4.58 4.58 4.81 5.10 5.38 5.67 5.96 6.25 7.08 7.66 8.23 8.81 100 MGP100 7.26 7.26 7.33 7.74 8.52 8.94 9.36 9.77 10.9 11.7 12.5 13.4 7-3.MGPS-( (kg) (mm) (mm) 25 50 75 100 125 150 175 200 50 MGPS50 2.69 3.03 3.64 3.98

CQS

Model C D 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 C' D' 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 Mounting bolt Mounting bolt CQSKB12-5D -10D -15D -20D -25D -30D CQSKB16-5D -10D -15D -20D -25D -30D CQSKB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSKB25-5D -10D -15D -20D -

Best Pneumatics Vol. 14

143 28 50 110 14 7 35 41 55 28.5 64 13 184 7 4 71 0 146 31 50 110 7 14 35 55 41 66 30.5 7 4 71 10 3.5 187 183 36 75 145 9 18 72.5 40 50 35 74 12 222 9 4 88 3.5 185 36 75 155 9 18 40 77.5 50 35 12 74 224 9 4.6 88 3 264 43 20 186 20 11 50 70 93 44.5 84 16 303 11 6.4 115 3.3 277 43 20 191 11 20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280 46 20 196 11 20 98 50 70 44.5 84 13 319 11 6.4

Modular F.R.L. Unit

5.5 5.5 12 33 24 41.5 30 132 143 28 50 110 28.5 64 13 4 71 7 7 14 55 35 41 0 184 146 31 50 110 30.5 10 66 4 71 7 7 14 35 55 41 187 3.5 183 36 75 145 35 74 12 4 88 9 18 9 40 50 72.5 222 3.5 185 36 75 155 74 35 4.6 12 88 9 9 18 40 77.5 50 224 3 264 43 20 186 44.5 84 16 6.4 115 11 11 20 93 50 70 3.3 303 277 43 20 191 44.5 16 84 6.4 117.5 11 11 20 50 98 70 316 3.3 280 46 20 196 44.5 84

Booster Regulator/Air Tank

Booster regulator IN port C C EXH: C EXH: C (A) Tank OUT port Rc 3/4 (A) D (B) (B) OUT OUT 355 256 256 205 4 x 13 4 x 13 50 50 150 150 500 250 250 824 (mm) Drain port Rc 1/4 A 531 570 494 527 576 B 444 479.8 444 479.8 C Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 D Note) 519 543 Booster regulator model VBA20A VBA40A VBA22A VBA42A VBA43A Note) When option G (pressure gauge) is selected 20 38 R S 05

90

160.5 135 150 161.8 172.5 162.5 173 150 165 176.8 187.5 187.5 198 165 180 191.8 202.5 200 210.5 Inch size 1 Common pilot pressure supply port is only for vacuum pump system.

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

G FZ FT E 2 x 7 Mounting hole F FX FY AL A Bore size B2 24 22 22 18 D B B1 Stroke range 0 40 32 25 20 20-0.033 150 to 1000 150 to 700 150 to 700 41 32 32 26 14 12 10 8 16 13 13 13 5 4 4 4 12.5 11 10 10 50 45 45 41 75 19.5 19.5 15.5 . 40 40 34 60 60 60 17 17 13 FX 26-0.033 0 82 36 75 75 26-0.033 0 20, 25 and 32 200 to 1000 32-0.039 0 66 21 52 22 247 217 204 200 37 P S H2 H1 Bore size MM K

MY1

Therefore, check the allowable load for the selected conditions. 16 20 25 32 40 50 63 16 20 25 32 40 50 63 6.0 3.0 1.0 18 7 2.1 10 5.2 1.7 26 10.4 3 15 9.0 2.4 38 15 4.5 MY1MW 30 15 5.0 57 23 6.6 59 24 8.0 84 33 10 115 38 15 120 48 14 140 60 19 180 72 21 6.0 3.0 2.0 18 7 2.1 10 5.0 3.0 25 10 3 15 8.5 5.0 35 14 4.2 30 14 10 49 21 6 MY1CW 60 23 20 68 30 8.2 115 35 35 93 42 11.5 150 50 50 130

Digital Flow Switches

, 551 50 20 40 Pressure loss (kPa) Pressure loss (kPa) 15 30 10 20 5 10 0 200 0 50 100 150200250 300 400 350 450 500 20 50 100 150 Flow rate (l/min) Flow rate (l/min) Sensor Unit Construction PF2A710/750 PF2A510/550 q w e r w t w e Parts list No. 1 2 3 4 5 Description Attachment Seal Mesh Body Sensor Material ADC NBR Stainless steel PBT PBT Flow direction PF2A711/721/751 PF2A511/521/551 Parts

39

Bore size (mm) Tightening torque (Nm) Description 50 2.6 to 3.5 Switch kit 63 2.6 to 3.5 50 130 to 150 Stopper bolt kit 63 160 to 200 50 1.5 to 2.0 Top cover kit (Rubber cover) 63 1.5 to 2.0 50 1.5 to 2.0 Top cover kit (Metal cover) 63 1.5 to 2.0 Note) Please make sure that the switch cassette is tightly secured to the body when it has been replaced with a new one. 24 Safety Instructions

Modular F.R.L. Unit

93 96 70 50 20 11 115 44.5 11 6.4 84 3.3 303 264 43 105 282 98 96 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 279 45 105 292 98 101 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 280 46 105 297 Note 1) For AC20 only, the position of the pressure gauge is above the piping center.

CJ5-S

RHC Standard Stroke MK(2) Standard stroke Long stroke Note) Bore size (mm) RS Q G 20 25, 50, 75, 100, 125, 150, 200 201 to 350 25 301 to 400 RS H A 32 301 to 450 40 301 to 800 Made to Order Specifications (For details, refer to page 10-21-1.) 25, 50, 75, 100, 125, 150, 200, 250, 300 RZQ 50, 63 301 to 1200 80 301 to 1400 MI W S Symbol Specifications 100 301 to 1500 -XA Change of rod end shape

CJ5-S

, refer to page 10-21-1.) 25, 50, 75, 100, 125, 150, 200, 250, 300 RZQ 50, 63 301 to 1200 80 301 to 1400 MI W S Symbol Specifications 100 301 to 1500 -XA Change of rod end shape Note) All non-standard strokes are produced upon receipt of order.

Precautions 1

8 10 84.5 46.5 14.2 M14 x 1.5 With Rod Boot h (mm) JW JH B3 e f Bore size (mm) 1 to 50 1 to 50 51 to 100 51 to 100 (Reference) (Reference) 101 to 150 151 to 200 201 to 300 101 to 150 151 to 200 201 to 300 20 25 32 40 81 93 106 131 25 37.5 50 75 23.5 10.5 12.5 36 30 68 18 85 97 110 135 25 37.5 50 75 23.5 10.5 12.5 36 32 72 18 85 97 110 135 25 37.5 50 75 23.5 10.5 36 12.5 32 72 18 102 27 46

Water-cooledThermo-chiller

Note 10) Weight in the dry state without circulating fluids 108 Thermo-chiller Series HRW Cooling Capacity Heating Capacity HRW002-H/008-H/015-H/030-H HRW002-HS/008-HS/015-HS/030-HS HRW002-H/008-H/015-H/030-H HRW002-HS/008-HS/015-HS/030-HS 0 50 70 90 110 130 150 170F 50 70 90 110 130 150 170 190F 35 7 HRW030-H 6 30 Heating capacity (kW) Cooling capacity (kW) Circulating fluid pressure (psi

LG1H

(S2) 200 to 230 VAC encoder) Absolute Power supply voltage 50/60 Hz AC servo motor (S7) AC servo motor (S3) 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz AC servo motor (S6) 100 to 120 VAC Pulse input type 50/60 Hz AC servo motor (S7) (For absolute AC servo motor (S6) 200 to 230 VAC encoder) 50/60 Hz AC servo motor (S7) Dimensions LECSA 2 x 6 Mounting hole 40 135 (Bearing surface

Vacuum Unit

100 100 100 Vacuum pressure [kPa] 80 90 90 60 80 80 40 Suction flow (High-noise reduction silencer exhaust) Vacuum pressure 70 70 Port exhaust 20 Silencer exhaust/Complex exhaust Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 Suction flow (Port exhaust) 60 60 Suction flow [L/min (ANR)] 50 50 Flow Rate Characteristics Suction flow (Silencer exhaust/ Complex exhaust) Suction flow (Silencer exhaust

Compressed Air Preparation Filter

40 55 9 18 7 50 65 Size 50 2 3/4, 1 186.2 43 93.1 30 45 70 50 70 11 20 8 60 80 Size 60 2 1 191.2 45 93.1 30 45 70 50 70 11 20 8 60 80 Number of components Model Combination example r A N F J M Pressure Relief 3-port Valve VHS30-03-D 1 pc.