Air Slide Table Series MXS

Bore size (Stroke (mm)) 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 6 8 12 16 20 25 Functional option Standard With buffer With end lock Axial piping type With buffer and end lock With buffer, Axial piping type Nil F R (2) P FR (2) FP Adjuster option Note

Compact Type

Bore size/Stroke (mm) Bore size 6 10 15 20 25 32 Standard strokes 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switches/Refer to page 15 for detailed auto switch specifications.

Compact Type Dual-Rod Cylinder Series CXSJ

Bore size/Stroke (mm) Bore size 6 10 15 20 25 32 Standard strokes 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switches/Refer to page 15 for detailed auto switch specifications.

Guide Table Series MGF ø40, ø63, ø100 Low-profile compact cylinder utilizes a large concentric guiding sleeve to provide excellent eccentric load resistance.  Mounting height greatly reduced  Built-in non-rotating mechanism Internal guide pin prevents

40 100 75 50 30 0.06 63 63 40 3 4 5 7 0.3 or less 0.05 100 100 63 10 12 16 22 Note) The value given for the non-rotating accuracy is applicable below the allowable rotational torque.

MLGC

RLQ MLU View A-A' ML1C DStandard Stroke BP BZ C D E F G GC A AA AB AC AD AE AF AP B Bore size (mm) 20 25 32 40 Stroke range (mm) -X 11 depth 8 26.5 73.5 6.8 75, 100, 125, 150, 200 M6 x 1 depth 12 13 94 16.5 70 135 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 50 118 28 35 32 12 14 depth 10 31.5 86.5 8.6 M8 x 1.25 depth 16 16 104 19 75 160 50 140 29 40 37 16 2075, 100, 125, 150, 200, 250, 300 14 depth 10 31.5

MLGC

RLQ MLU View A-A' ML1C DStandard Stroke B AF AP E A AA AB AC AD AE BP BZ C D F G GC Bore size (mm) 20 25 32 40 Stroke range (mm) -X 11 depth 8 26.5 73.5 6.8 75, 100, 125, 150, 200 M6 x 1 depth 12 13 94 16.5 70 32 35 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 50 28 135 118 12 14 depth 10 31.5 86.5 8.6 M8 x 1.25 depth 16 16 19 104 75 37 40 50 29 160 140 16 2075, 100, 125, 150, 200, 250, 300 14 depth 10 31.5

Rotary Table/Rack & Pinion Style Series MSQ

200 40 MSQA20 (High precision type) 20 0 10 20 30 40 50 12 10 8 6 4 2 0 Load N Load N MSQ30 MSQ3A MSQB30 (Basic type) 300 MSQB3A (Basic type) 100 250 Displacement m Displacement m 80 200 60 MSQA3A (High precision type) 50 130 150 40 MSQA30 (High precision type) 20 0 10 20 30 40 50 60 70 18 16 14 12 10 8 6 4 2 0 Load N Load N MSQ50 MSQ7A MSQB50 (Basic type) MSQB7A (Basic type) 100 200 Displacement

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

45 45 55 9 12 13 13 16 16 12 16 20 20 25 30 32.5 38 46.5 56.5 72 89 46 52 65 75 95 114 10 14 18 18 22 26 22 30 35 35 40 40 Wl Stroke range (mm) Bore size (mm) ZZ S ZZ WL W V S RF P NB N MO 32 40 50 63 80 100 up to 500 up to 500 up to 600 up to 600 up to 750 up to 750 151 165 180 180 226 226 100 110 118 118 150 150 143 152 168 168 208 208 24 24 24 24 40 40 6.5 9 10.5 12 14 15 4 4 5 9 11.5

Table of Contents

Dimensions . 46 47 48 50 52 52 53 54 54 55 55 56 57 58 60 60 60 61 62 63 65 65 65 66 66 67 67 68 69 69 70 70 71 72 73 75 75 75 77 77 78 78 78 79 80 82 84 84 84 85 86 87 87 88 89 90 Series AS * 2 * 0-D Speed Controller Adjustable by Flat Head Screwdriver: Standard Type Elbow Type \(Metal Body\) . Specifications. How to Order . Construction. Dimensions .

Modular Type Air Filter Series AF

Separator AFD20/30/40 How to Order 03 BD F 30 2R AFD Optional specifications Symbol 2 6 8 C J R Description Applicable model Micro-mist separator Accessories AFD20 to 40 AFD20 to 40 AFD30, 40 AFD20 AFD30, 40 AFD20 to 40 Metal bowl Port size Description With bracket Float type auto drain (N.C.)

ZPT/ZPX

M18 x 1.5 M22 x 1.5 Vacuum entry direction Mounting 100, 125 40 to 80 25 mm, 50 mm, 75 mm, 100 mm Buffer stroke ZR 40, 50 63, 80 100, 125 Thread dia.

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Standard Strokes Bore size (mm) 20 32 40 50 63 80 100 Standard strokes (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Made to Order 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Page 34 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 JIS symbol 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Standard Strokes Standard strokes (mm) Bore size (mm) 20 32 40 50 63 80 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 JIS symbol 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Double acting/Double rod 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25,

IZx-OMX0087

Flow rate : 180L/min 75 50 25 0 25 50 75 Installation distance from ionizer to workpiece [mm] 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 -75 -50 -25 0 25 50 75 0 0 mm ionizer to workpiece [mm] Installation distance from mm 200 200 20m/s 400 400 2m/s 20m/s 2m/s 600 600 10m/s 800 800 10m/s 5m/s 1000 1000 1200 5m/s 1400 5-4.

Compact Cylinder with Air Cushion Series RQ

30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 9 8 9.5 13.5 10 3 Compact Cylinder with Air Cushion Double Acting: Single Rod Series RQ Auto Switch Mounting Bracket Part Nos.

SV

(Values at the initial period) 5 (EA) 1 (P) 3 (EB) 3 position exhaust center (A) 4 (B) 2 Response Time 5 (EA) 1 (P) 3 (EB) Response time (ms) (at the pressure of 0.5 MPa) 3 position pressure center Type of actuation SV1000 SV2000 SV3000 SV4000 (A) 4 (B) 2 11 or less 25 or less 28 or less 40 or less 2 position single 10 or less 17 or less 26 or less 40 or less 2 position double 5 (EA) 1 (P

Base Mounted Metal Seal/Rubber Seal Series VQ

L dimension 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

Series SV

Response time 5 (EA) 1 (P) 3 (EB) Response time ms at 0.5MPa (72.5psi) Type of actuation 3 position pressure center SV1000 SV2000 SV3000 SV4000 (A) 4 (B) 2 2 position single 11 or less 25 or less 28 or less 40 or less 2 position double 10 or less 17 or less 26 or less 40 or less 3 position 18 or less 29 or less 32 or less 82 or less 5 (EA) 1 (P) 3 (EB) 4 position dual 3 port valve 15 or less

REC

20 4 60 75 13 8 18 15.5 34 26 13 10 41 150 to 700 FX 20 25 4 60 75 17 10 22 19.5 40 32 13 10 45 150 to 700 26 20, 25, 32 32 4 60 75 17 12 22 19.5 40 32 13 11 45 150 to 1000 26 36 40 5 66 82 22 14 24 21 52 41 16 12.5 50 200 to 1000 32 S Z ZZ NN P H1 H2 I K MM N NA Bore size Stroke range 1 8 M20 X 1.5 20 146 191 200 150 to 700 M8 X 1.25 5 8 33.5 5 20 30 1 8 M26 X 1.5 25 146 195 204 150 to

Microspeed Cylinder

Bore size (mm) 20 25 32 40 20 25 32 40 Clean room series Standard stroke (mm) 10(Relieving type) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 11(Vacuum type) Specifications Bore size (mm) 10(Relieving type) 11(Vacuum type) 20 20 25 32 40 25 32 40 Fluid Proof pressure Maximum operating pressure Minimum operating pressure Air 1.5MPa (217psi) 1.0MPa (145psi) 0.035MPa (5.1psi) 0.025MPa (3.6psi