Slider Type/Ball Bushing Bearing

, 200, 300 (N) 100, 200, 300, 400, 500 15 750 1 axis Operating pressure (MPa) Piston area (mm2) 100, 200, 300, 400, 500, 600 20 Bore size (mm) 1000 0.3 0.2 0.4 0.5 0.6 0.7 100, 200, 300, 400, 500, 600, 800 25 1200 10 15 23 78 31 39 54 46 100, 200, 300, 400, 500, 600, 800, 1000 25 2 axis 15 35 52 176 70 88 123 105 1500 32 20 62 94 314 125 157 219 188 Note) Strokes are manufacturable in 1 mm

HRS100/150

HRS HRS 090 HRS 100/150 HRS 100/150 Part no.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

(1600) (1600) (1600) (1600) (1600) (1600) 70 70 MY1CW50 MY1CW50 MY1CW50 MY1MW40 MY1MW40 MY1MW40 (1300) (1300) (1300) (1300) 60 60 1.

Hydraulic Cylinders

x 100l 115 x 115l 50 (M) 100 50 (M) M5 x 55l 140 CHKDB25 x 140l 75 (M) 55 5 (M) x 60l 165 x 165l 100 (M) 60 10 (M) x 65l 75 CHKDB63 M12 x 75l 5 (M) 65 15 (M) x 70l 80 x 80l 10 (M) 70 20 (M) x 75l 85 x 85l 15 (M) 75 25 (M) 10.4 x 80l 90 x 90l 20 (M) 80 30 (M) x 85l 95 x 95l 25 (M) 85 35 (M) x 90l 100 x 100l 30 (M) 90 40 (M) 16 x 95l 105 x 105l 35 (M) 95 45 (M) x 100l 110 x 110l 40 (M) 100

LEC-OM02904

) (100) L .

FQ1

3 I.D. 10.8 x 2.4 O-ring JIS B2401-4D-P11 FPM 4 Series FQ1 Dimensions Bracket 32 V-band support 2.3 75 (25) 50 100 (80) 75 70 70 30 50 10 92 7 2-A 10 108 R3.5 R8 127 (60) R25 120 109 Part number A Applicable bore size Rc 1 Rc 3/4 Rc 1/2 BP-13S BP-14S BP-15S 34.5 27.5 22 120 50 AIR VENT 10 G1/4 10 92 7 R3.5 2-Rc P 102 (43) A I N INLET OUTLET B (108) Intermediate holder Note) Installed only

Filter for Cleaning Solvent Quick Change Filter Series FQ1

3 I.D. 10.8 x 2.4 O-ring JIS B2401-4D-P11 FPM 4 Series FQ1 Dimensions Bracket 32 V-band support 2.3 75 (25) 50 100 (80) 75 70 70 30 50 10 92 7 2-A 10 108 R3.5 R8 127 (60) R25 120 109 Part number A Applicable bore size Rc 1 Rc 3/4 Rc 1/2 BP-13S BP-14S BP-15S 34.5 27.5 22 120 50 AIR VENT 10 G1/4 10 92 7 R3.5 2-Rc P 102 (43) A I N INLET OUTLET B (108) Intermediate holder Note) Installed only

FQ1

Description Part number Dimensions (mm) Replacement parts: Seals Material JIS B2401-1A-P85 NBR I.D. 84.6 x 5.7 O-ring JIS B2401-4D-P85 FPM JIS B2401-1A-P11 NBR I.D. 10.8 x 2.4 O-ring JIS B2401-4D-P11 FPM 4 Series FQ1 Dimensions Bracket 32 V-band support 2.3 75 (25) 50 100 (80) 75 70 70 30 50 10 92 7 2-A 10 108 R3.5 R8 127 (60) R25 120 109 Part number A Applicable bore size Rc 1 Rc 3/4 Rc

JXCx-OMT0034CN

ID Bit[70] 3 RWrn 1) Bit[F8] 2 4 2147483647 0.01mm Bit[70] 1 RWrn+1 1) Bit[F8] 0 Bit[70] H RWrn+2 1) 2 065500 mm/s Bit[F8] L Bit[70] H RWrn+3 1) 2 0300 % Bit[F8] L Bit[70] 3 RWrn+4 1) Bit[F8] 2 ID1 4 2147483647 0.01mm Bit[70] 1 RWrn+5 1) Bit[F8] 0 Bit[70] 0 0255 RWrn+6 1) Bit[F8] 1 0255 4 Bit[70] 2 0255 RWrn+7 1) Bit[F8] 3 0255 RWrn+8 IF (ID=1) ID2 RWrn+917 ID1 ID3 RWrn+1826

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53

MG

to 100 MGPL32 to 100 i !

MGP

40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 100 100 100 80 80 80 100 100 Load weight m (kg) Load weight m (kg) 80 100 80 10 10 80 5 10 100 20 29 30 49 50 300 200 5 10 100 20 29 30 49 50 300 200 Stroke (mm) Stroke (mm) Note: 1 kg = 2.2046 lb 1 in = 25.4 mm 10 Compact Guide Cylinder Series

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Acetic acid 100% Acetone Note 1, 2) 40% Ammonium fluoride 30% Ammonium hydroxide 100% Butyl acetate 100% Methylne chloride 38% Hydrochloric acid 50% Hydrofluoric acid 60% Hydrogen peroxide 100% Methanol Methyl ethyl ketone Note 2) 70% Nitric acid Note 2) 86% Phosphoric acid 85% Caustic potash 100% Sulfuric acid Note 2) Toluene Note 1, 2) Xylene Note 2) 100% Sodium hydroxide Note 2) 100%

2-Color Display Digital Flow Switch Series PFM

/min 30% 70% 40% 60% 8% 92% 1.0 to 52.5 l/min 1.0 to 50.0 l/min 20.0 mA 5.00 V 0 to 52.5 l/min 10% 90% PFM750 20% 80% 1.0 to 42.0 l/min 1.0 to 40.0 l/min 16.8 mA 4.20 V 0 to 42.0 l/min 30% 70% 40% 60% 8% 92% 2 to 105 l/min 2 to 100 l/min 20.0 mA 5.00 V 0 to 105 l/min 10% 90% PFM711 2 to 95 l/min 2 to 90 l/min 18.4 mA 4.60 V 0 to 95 l/min 20% 80% 30% 70% 2 to 84 l/min 2 to 80 l/min 16.8 mA

LEC-OM069xx

Q Value 50 to 1000 0.01 70 Immediately Tuning 5.9.3 Pn40E 2 2nd Notch Filter Depth 0 to 1000 0.001 0 Immediately Tuning 2 2nd Step 2nd Torque Reference Filter Frequency Pn40F 100 to 5000 1 Hz 5000 Immediately Tuning 2 2nd Step 2nd Torque Reference Filter Q Value Pn410 50 to 100 0.01 50 Immediately Tuning 2 1st Step 2nd Torque Reference Filter Time Constant Pn412 0 to 65535 0.01 ms 100 Immediately

IR1000/2000/3000

55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 100 0 20 40 60 80 100 120 57.0 100 95 90 85 80 75 70 65 60 Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV3000 IRV3000 0 53.0 10 53.5 20 54.0 SET side pressure (kPa) 30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 57.0 100 95 90 85 80 75 70 65 60 100 0 20 40 60 80 100 120 140 160 VAC side pressure (kPa) Flow rate

Table of Contents - Tubing

I.D. 427 TU0425-100-X3 TU0604-100-X3 TU0805-100-X3 TU1065-100-X3 TU1208-100-X3 4 6 8 10 12 2.5 4 5 6.5 8 285 Max. operating pressure 142 0 4 32 70 105 140 10Clean Series Operating temperature F Only available in 20m rolls.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable size LA1 LA2 LB1 LB2 LC LD LE LF LG LH LJ1 LJ2 LK LM T 50 63 80 100 P411020-5 P411030-5 P411040-5 P411050-5 78 100 111 141 70 90 100 126 45 56 63 80 50 36 44 46 55 25.5 30 32 39.5 10 12 12 14 4.5 5 6 6 45 60 65 80 7.5 9.5 9.5 11.5 34 39 48 60 66 83 94 120 60.5 75.5 88.5 108.5 84 110 120.5 150.5 48 52 60 80 Note 1) The foot bracket (with bolt, nut, and washer) is not mounted on

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

220 230 AH 4 x AB AT E1 TR AO SA + Stroke AO Rod flange (F) 4 x FB [mm] Bore size [mm] R TF FB E2 UF W MF 32 32 64 7 50 79 16 10 40 36 72 9 55 90 20 10 50 45 90 9 70 110 25 12 63 50 100 9 80 120 25 12 80 63 126 12 100 153 30 16 100 75 150 14 120 178 35 16 R E2 W MF UF TF Head flange (G) [mm] Bore size [mm] MF ZF 32 10 130 40 10 145 50 12 155 63 12 170 80 16 190 100 16 205 ZF + Stroke MF Single

CLQ

75 80 85 90 95 100 60 65 70 75 80 85 90 95 100 105 M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M5 x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l 65 70 75 80 85 90 95 100 105 140 165 75 80 85 90 95 100 105 110 115 150 175 M5 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 140l x 165l M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l