Electric Actuator

700, 800, 900, 1000 20 5 Servo motor (24 VDC) 16 100, 200, 300, 400 10 3 6 Clean room compatible 25 100, 200, 300, 400, 500, 600 12 6 25 100, 200, 300, 400, 500, 600 12 AC servo motor 8 3 32 100, 200, 300, 400, 500, 600, 700, 800 16 Clean room compatible 10 200, 300, 400, 500, 600, 700, 800, 900, 1000 40 20 1 The size corresponds to the bore of the air cylinder with an equivalent force.

Electric Actuator with Integrated Guide

Positioning distance (mm) 600 300 100 10 1 10 60.5 30.5 10.5 1.5 0.5 100 6.5 3.5 1.5 0.6 0.5 Speed (mm/s) 150 4.5 2.5 1.2 0.6 0.5 300 2.6 1.6 0.9 0.6 0.5 Values will vary slightly depending on the operating conditions.

AC Servo Motor Driver (Pulse input type/Positioning type ）

(communication error) 100 ms 100 ms 100 ms 300 ms *Time-out 300 ms 300 ms 300 ms Message Message Message Message PC or PLC...etc Controller side (master station) EOT EOT EOT Servo side (slave station) 14 9 14.

MG

32, 40 32, 40 32, 40 10 10 50, 63 32, 40 32, 40 5 10 20 30 40 51 50 100 101 300 200 5 10 20 30 40 51 50 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 100 100 100 80 100 100 80 80 Load weight m (kg) Load weight m (kg) 80 100 80 10 10 80 5 10 20 29 30 50 49 300 200 100 5 10 20 29 30 50 49 300 200 100 Stroke (mm) Stroke (mm) 8-19-16 Compact Guide Cylinder Series MGP

Table of Contents

400 300 200 100 0 VF B VFR VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 800 700 600 500 400 300 200 100 0 VZS C VFS VS4 800 700 600 500 400 300 200 100 0 VQ7 D EVS VFN 800 700 600 500 400 300 200 100 0 E It is when the cylinder is extending that is meter-out

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Pressure 0.5 MPa Load factor 50% Stroke 500 mm VZS Average speed (mm/s) Series VFS VS4 40 50 63 80 100 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VQ7 VZ514--02 (Piping: 6 x 1 m) EVS VFN AS3301F-02-06/AN200-2 Speed controller/Silencer 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ514--02 (Piping: 8 x 1 m) AS3301F

MGP

40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 100 100 100 80 80 80 100 100 Load weight m (kg) Load weight m (kg) 80 100 80 10 10 80 5 10 100 20 29 30 49 50 300 200 5 10 100 20 29 30 49 50 300 200 Stroke (mm) Stroke (mm) Note: 1 kg = 2.2046 lb 1 in = 25.4 mm 10 Compact Guide Cylinder Series

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Rated voltage Electrical entry For DC 24, 12 VDC/ 100, 110, 200, 220 VAC DIN terminal M plug connector L plug connector 24, 12, 6, 5, 3 VDC M8 connector Grommet 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC (10-SY5000/7000 only) G: Lead wire length 300 mm L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) MN: Without lead wire WO: Without

MY1

speed mm/s Piston speed mm/s Piston speed mm/s MY1HT/m MY1HT/m MY1HT/m 1000 1000 1000 500 500 500 300 300 300 MY1HT63 MY1HT63 Load weight kg Load weight kg Load weight kg MY1HT63 100 100 100 MY1HT50 MY1HT50 50 50 50 MY1HT50 40 40 40 30 30 30 20 20 20 10 10 10 100 200 300 400 500 1000 100 200 300 400 500 1000 100 200 300 400 500 1000 Piston speed mm/s Piston speed mm/s Piston speed mm/s

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

D: Push-turn locking slotted type E: Push-turn locking lever type (With gasket and screws) Electrical entry Grommet L plug connector 24, 12, 6, 5, 3 VDC / 100, 110, 200, 220 VAC 24, 12 VDC / 100, 110, 200, 220 VAC 24, 12 VDC 6, 5, 3 VDC M plug connector DIN terminal M8 connector G: Lead wire length 300 mm M: With lead wire (length 300 mm) MN: Without lead wire D: With connector WO: Without

SYJ300/500/700

For sub-plate type, Type 40, 41 manifolds D: Push-turn locking slotted type E: Push-turn locking lever type (With gasket and screws) Electrical entry Grommet L plug connector 24, 12, 6, 5, 3 VDC / 100, 110, 200, 220 VAC 24, 12 VDC / 100, 110, 200, 220 VAC 24, 12 VDC 6, 5, 3 VDC M plug connector DIN terminal M8 connector G: Lead wire length 300 mm M: With lead wire (length 300 mm) MN: Without

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Positioning distance (mm) 1 10 100 300 600 10 0.5 1.5 10.5 30.5 60.5 100 0.5 0.6 1.5 3.5 6.5 Speed (mm/s) 150 0.5 0.6 1.2 2.5 4.5 300 0.5 0.6 0.9 1.6 2.6 Values will vary slightly depending on the operating conditions.

LJ1H

150 200 250 300 350 400 450 500 10kg 8kg 18kg 16kg 14kg Speed (mm/s) Speed (mm/s) Model Mounting orientation LJ1H30 12kg Load movement direction 10kg 600 14kg 400 L1 (mm) L3 (mm) 12kg 20kg 50 100 a = 1000 16kg 18kg 20kg Pitching Yawing Vertical Vertical m a a = 3000 a = 2000 200 100 200 300 400 500 600 0 100 200 300 400 500 600 0 L1 Mep Stroke (mm) Stroke (mm) 0 5 10 20 15 Transfer load

1

OB PA PB S WA WB X YY YL Z R T Bore size (mm) Bore size (mm) Bore size (mm) 110 110 60 60 WA WB Q PW RA U VA VB WA WB Over 200 st to 300 st Over 300 st Over 25 st to 100 st 25 st Over 100 st to 200 st Over 200 st to 300 st Over 300 st Over 25 st to 100 st Over 100 st to 200 st 25 st Over 300 st Over 25 st to 100 st Over 100 st to 200 st Over 200 st to 300 st 25 st or less Over 300 st Over

Table of Contents

75/25 110/40 170/57 240/80 300/100 Note) In the case of two or more options, indicate them alphabetically.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

75, 100, 125, 150, NCM 40, 50, 63 (With pin) 200, 250, 300 Pin and snap ring are shipped together with double knuckle joint.

SYJ3000/5000/7000

Load rate: 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ5140-01 Cylinder is in extending.

CL

Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Max.

Electric Slide Tables

] 150 300 100 200 Mey 50 100 m 0 0 0 0.2 0.4 0.6 0.8 1 0 1 2 3 4 5 0 0.5 1 1.5 2 2.5 3 Work load m [kg] Work load m [kg] Work load m [kg] 300 600 0 50 100 150 200 250 300 350 250 500 L5 200 400 L5 [mm] L5 [mm] L5 [mm] 150 300 Mer m 100 200 50 100 0 0 0 1 2 3 4 5 0 0.2 0.4 0.6 0.8 1 0 0.5 1 1.5 2 2.5 3 Work load m [kg] Work load m [kg] Work load m [kg] 300 600 0 50 100 150 200 250 300 350

Combination Cylinder

Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Max.