Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Stations n L1 L2 3 74 56 4 90 72 5 106 88 6 122 104 7 138 120 8 154 136 9 170 152 10 186 168 15 266 248 16 282 264 17 298 280 18 314 296 11 202 184 12 218 200 13 234 216 14 250 232 19 330 312 2 stations 58 40 20 stations 346 328 531 Manifold specifications 10-SYJ5000 Type 41: Side ported / 10-SS5YJ5-41Stations -M5 [ ]: AC Grommet (G) Approx. 300 (Lead wire length) L1 L2 4.5 Manual override

Tie-rod Type Hydraulic Cylinder

V 200 V or less IC circuit Grommet Relay PLC No Yes No B54 B64 A33 A34 A44 B59W 12 V 24 V 2-wire Terminal conduit PLC Yes 100 V, 200 V Relay PLC DIN terminal Grommet A59W Diagnostic indication (2-color indicator) 1 Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance.

CL

(The lock-up cylinder can operate at 50 to 200 mm/s.)

CXWM/CXWL

Bore size/Stroke (mm) Data 10 25, 50, 75, 100 16 25, 50, 75, 100, 125, 150, 175, 200 End lock 20 25, 50, 75, 100, 125, 150, 175, 200 25 25, 50, 75, 100, 125, 150, 175, 200 R End lock 32 (25), 50, 75, 100, 125, 150, 175, 200 Nil None Note 1) For (25) stroke, the shock absorber is mounted on a single side of the plate.

10

For Air Upstream pressure of valve P1 1.0 MPa 1.0 Downstream pressure of valve (P2) [MPa] 0.8 Subsonic 0.9 0.6 Critical pressure 0.7 0.8 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 2 50 100 150 200 250 300 400 350 3 100 200 300 400 500 4 400 600 800 1,000 1,200 5 200 1,400 600 1,000 7 350 700 8 400 700 1,000 1,300 10 (Connection: 1/4) 500 700 10 (Connection: 3/8, 1/2) Flow rate Q [L/min (ANR

MLGC

Cutout window View A-A' Mounting Standard Stroke GK BP A AA AB AG AH AI AJ AK AL AM AN AO AP B BZ GC GD Bore size (mm) 20 25 32 40 Stroke range (mm) 92 3.5 9 9 75, 100, 125, 150, 200 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 94 73.5 11 13 75 32 28 54 134 150 108 140 M 8 135 110 4 9 9 104 86.5 15 16 88 37 29 62 160 176 125 165 M 8 160 75, 100, 125, 150, 200, 250, 300 110 4 9 9 104 86.5 15 16 88 37 30 62

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

Stations L1 L2 L3 L4 2 135.5 125 105 15 3 4 5 6 7 8 9 10 160.5 150 137 11.5 185.5 175 153 16 210.5 200 185 12.5 235.5 225 201 17 260.5 250 233 13.5 148 137.5 121 13.5 198 187.5 169 14.5 248 237.5 217 15.5 Stations SS5Y5-45GDBC4 C6 C8 Stations L1 L2 L3 L4 2 148 137.5 123 12.5 3 4 5 6 7 8 9 10 185.5 175 155 15 210.5 200 187 11.5 235.5 225 203 16 260.5 250 235 12.5 285.5 275 251 17 198 187.5

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

. 3 4 5 6 7 8 9 10 2 Stations L1 L2 L3 L4 148 198 248 135.5 125 105 15 160.5 150 137 185.5 175 153 16 210.5 200 185 235.5 225 201 17 260.5 250 233 137.5 121 187.5 169 237.5 217 13.5 11.5 14.5 12.5 15.5 13.5 Stations SS5X5-45GUBC4 C6 C8 Stations L1 L2 L3 L4 2 148 3 4 5 6 7 8 9 10 173 198 248 185.5 175 155 15 210.5 200 187 235.5 225 203 16 260.5 250 235 285.5 275 251 17 137.5 123 162.5 139

JIS Standard Hydraulic Cylinder

V 200 V or less 3-wire (NPN equiv.) 5 V Yes Grommet Relay PLC No Yes No A54 A64 A59W 12 V 2-wire 24 V A33 A34 A44 Terminal conduit PLC Relay PLC Yes 100 V, 200 V Grommet DIN terminal Diagnostic indication (2-color indicator) B59W 1 Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance.

MLGC

Cutout window View A-A' Mounting Standard Stroke GK BP AG AB A AA AN B GD AH AI AJ AK AL AM AO AP BZ GC Bore size (mm) 20 25 32 40 Stroke range (mm) 92 3.5 9 9 75, 100, 125, 150, 200 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 94 73.5 13 11 54 75 32 28 134 150 108 140 M 8 135 110 4 9 9 104 86.5 16 15 62 88 37 29 160 176 125 165 M 8 160 75, 100, 125, 150, 200, 250, 300 110 4 9 9 104 86.5 16 15 62 88 37 30

Rotary Table/

80 10 20 30 40 190 200 60 MSQA20 (High precision type) 40 0 0 10 20 30 40 50 10 8 6 4 2 Load N Load N MSQ30 MSQB3A MSQB30 (Basic type) 300 100 Displacement m Displacement m 250 90 200 80 50 130 150 MSQA30 (High precision type) 70 60 0 0 10 20 30 40 50 60 70 12 10 8 6 4 2 Load N Load N MSQ50 MSQB7A MSQB50 (Basic type) 100 200 Displacement m Displacement m 90 150 80 120 50 MSQA50 (High precision

Thermo-con/Rack Mount Type

Noise level Power consumption Air-cooled HECR004/006*1 49 dB 200 W HECR002 55 dB HECR004/006*1 400 W HECR008/010*2 Air-cooled Water-cooled HECR008*2 54 dB HECR008/010*2 300 W 200 W HECR012*2 48 dB Water-cooled HECR008/012 *1 200 W load *2 500 W load *1 200 W load *2 500 W load Simple operation Fluid fill port Fluid can be supplied without removing the product from the rack.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

D60 20MSQA2A (High precision type) 10 20 30 40 190 200 40 MSQA20 (High precision type) 20 0 10 20 30 40 50 12 10 8 6 4 2 0 Load N Load N MSQ30 MSQ3A MSQB30 (Basic type) 300 MSQB3A (Basic type) 100 250 Displacement m Displacement m 80 200 60 MSQA3A (High precision type) 50 130 150 40 MSQA30 (High precision type) 20 0 10 20 30 40 50 60 70 18 16 14 12 10 8 6 4 2 0 Load N Load N MSQ7A MSQ50

Rotary Table/Rack & Pinion Style Series MSQ

200 40 MSQA20 (High precision type) 20 0 10 20 30 40 50 12 10 8 6 4 2 0 Load N Load N MSQ30 MSQ3A MSQB30 (Basic type) 300 MSQB3A (Basic type) 100 250 Displacement m Displacement m 80 200 60 MSQA3A (High precision type) 50 130 150 40 MSQA30 (High precision type) 20 0 10 20 30 40 50 60 70 18 16 14 12 10 8 6 4 2 0 Load N Load N MSQ50 MSQ7A MSQB50 (Basic type) MSQB7A (Basic type) 100 200 Displacement

HRX-OM-X037

9-12 9.4.3 HRL300-A-40 CH1 . 9-13 9.4.4 HRL100/200/300-A-40 CH2 . 9-13 9.4.5 HRL100-A-40-T2 CH1 . 9-14 9.4.6 HRL200-A-40-T2 CH2 . 9-14 9.4.7 HRL300-A-40-T2 CH1 . 9-15 9.4.8 HRL100/200/300-A-40-T2 CH2 . 9-15 9.4.9 HRL300-A-40-T3 CH1 . 9-16 9.4.10 HRL300-A-40-T3 CH2 . 9-16 9.4.11 HRL100-W-40 CH1 . 9-17 9.4.12 HRL200-W-40 CH1 . 9-17 9.4.13 HRL100/200-W-40 CH2 . 9-18 9.4.14 HRL100-W-40-T2 CH1

Rotary Clamp Cylinders

MK-A012 MK-A016 Bore size (mm) 12 16 20 25 32 40 50 63 12 70 87 16 100 123 20 250 290 25 280 320 32 500 525 40 595 640 50 1100 1350 63 1520 1805 Clamp bolt, Hexagon socket head cap screw, Hexagon nut, Spring washer MK-A020 MK-A032 Additional Weight MK-A050 Unit: g 50 7 46 13 350 345 63 17 46 25 350 531 40 6 21 7 200 198 20 6 10 2 100 133 25 7 10 3 100 153 32 7 21 5 200 166 16 32

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

210.5 186 196 225 235.5 202 212 237.5 248 218 228 250 260.5 234 244 275 285.5 250 260 287.5 298 266 276 300 310.5 282 292 312.5 323 298 308 337.5 348 58 68 87.5 98 74 84 112.5 123 90 100 125 135.5 106 116 137.5 148 122 132 162.5 173 138 148 175 185.5 154 164 187.5 198 42 52 75 85.5 L1 L2 L3 L4 4-14-37 Base Mounted 38 Series VQZ100/200/300 Dimensions: VQZ300 VV3QZ35Stations Port size C Grommet

SYJ300/500/700

Solenoid Valve for 200 V, 220 VAC Specifications Manual Override Operation Warning Warning Solenoid valves with grommet and L/M type plug connector AC specifications have a built-in rectifier circuit in the pilot section to operate the DC coil. With 200 V, 220 VAC specification pilot valves, this built-in rectifier generates heat when energized.

HRL

V as an option) (Only 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 (400 V as standard, 200 V as an option) (Only 200 V as an option) CH1 0.1 15 to 25 HRL Inverter dual type 26 kW Indoor use 19 kW 9 kW CH2 0.5 20 to 40 1.0 kW (Max. 1.5 kW) 322 Circulating Fluid Temperature Controller Thermo-chiller Dual Channel Refrigerated Thermo-chiller for Lasers HRL Series

Sine Rodless Cylinder Series REA

, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 4000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 32 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 40 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 6000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 63 Note1) Contact P/A in case of a stroke length beyond the maximum.