Possible to use in vacuum to 100 kPa.
series Cylinder stroke (mm) 80 100 50, 75, 100, 125, 150, 175, 200 50, 75, 100, 125, 150, 175, 200 CKGA series End bracket Nil Y None Double knuckle joint (with tap) CKPA series Note) A knuckle pin, cotter pins and flat washers are provided as a standard for Y.
of needle rotations PFM750, 550 / For 50 (l/min) PFM711, 511 / For 100 (l/min) 60 120 300 (kPa) 100 300 (kPa) Flow rate (l/min) Flow rate (l/min) 750 (kPa) 100 (kPa) 40 80 750 (kPa) 60 100 (kPa) 20 40 20 0 5 10 15 0 5 10 15 0 Number of needle rotations Number of needle rotations 930 2-Color Display Digital Flow Switch Series PFM7/PFM5 Parts Description PFM7 Description Item Button Button
95 x 125l x 100l 125 50 (M) 50 (M) 100 x 150l CHKGB25 M5 x 55l 150 75 (M) 5 (M) 55 x 175l x 60l 175 100 (M) 10 (M) 60 M12 x 85l x 60l 85 CHKGB63 5 (M) 15 (M) 65 x 90l x 70l 90 10 (M) 20 (M) 70 x 95l x 75l 95 15 (M) 25 (M) 75 10.4 x 100l x 80l 100 20 (M) 30 (M) 80 x 105l x 85l 105 25 (M) 35 (M) 85 x 110l x 90l 110 30 (M) 40 (M) 90 16 x 115l x 95l 115 35 (M) 45 (M) 95 x 120l x 100l 120 40
K 57 49.6 J 14 14 H 95 120 G 32.5 0 1 1 , 87.5 125 4 3 ALD600-06 to 10 ALD900-12 to 20 , 1 4 3 175 250 135 209 460 613 175 250 2 1 1 1 4 1 2 , , ALDU600-06 to 10, ALDU900-12 to 20 D.P.
185.5 9 154 164 187.5 198 10 170 180 200 210.5 11 186 196 225 235.5 12 202 212 237.5 248 5 90 100 125 135.5 6 106 116 137.5 148 7 122 132 162.5 173 3 58 68 87.5 98 4 74 84 112.5 123 L1 L2 L3 L4 2.10-35 VQZ100/200/300 Base Mounted VQZ300 VV3QZ35C Station Port size (35) (5.5) 2-4.5 Mounting holes DIN rail clamp screw 42 (11) C6: One-touch fitting for 6 n-C6, C8, C10, 02 Grommet (G) 34 (7.5
valve SMC VQ110 -*L SMC VQ110 -*M JAPAN SMC VQ110 -*G JAPAN E E JAPAN P E P Plug-in unit manifold Plug lead unit manifold L type plug connector P 5 M type plug connector Grommet Series VQ100 Standard Specifications Standard Specifications Specifications Item specifications specifications 1watt 0.5 watt Type 3 port direct operated poppet type (NC) Fluid Air Inert gas 114 psi {8.2kgf/cm2} 100
3 ALD600-06 to 10 ALD900-12 to 20 , 1 4 3 175 250 135 209 460 613 175 250 2 1 1 1 4 1 2 , , ALDU600-06 to 10, ALDU900-12 to 20 D.P.
Volume (cm 3) Single vane Double vane Vane type CRB2BW40-S CRB2BW10-D CRB2BW15-D CRB2BW20-D CRB2BW30-D CRB2BW40-D CRB2BW10-S CRB2BW15-S CRB2BW20-S CRB2BW30-S Model 90 180 270 90 180 270 90 180 270 180 270 180 270 90 100 90 100 90 100 90 100 90 100 90 90 Rotation 1 (0.6) 1.5 (1.0) 4.8 (3.6) 11.3 (8.5) 25 (18.7) 31.5 41 33 34 1.2 1.5 2.9 3.7 6.1 7.9 15 20.2 1.0 1.1 2.6 2.7 5.6 5.7 14.4 14.5
Vacuum pressure [kPa] 80 Vacuum pressure 60 Suction flow (Silencer exhaust) 40 Air consumption 20 Port exhaust Silencer exhaust 0 0 10 20 30 40 Suction flow [L/min (ANR)] ZK210 Flow-rate Characteristics Exhaust Characteristics 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Supply pressure [MPa] 0 10 20 30 40 50 60 70 80 90 100 100 Vacuum pressure [kPa] Vacuum pressure [kPa] 80
Connection Port CRBU2W10 CRBU2W15 CRBU2W20 CRBU2W30 90 CRBU2W40 90 Vane type Model (size) 180 270 90 180 270 90 180 270 90 180 270 180 270 Rotating angle Single vane Double vane Volume (cm3) 1.2 1.5 2.9 3.7 6.1 7.9 15 20.2 25 31.5 41 1(0.6) 1.5(1.0) 4.8(3.5) 11.3(8.5) Side ported M5 x 0.8 Port size Axial ported M5 x 0.8 M3 x 0.5 90 100 90 100 90 100 90 100 90 100 Rotating angle Volume (cm
I.D. 427 TU0425-100-X3 TU0604-100-X3 TU0805-100-X3 TU1065-100-X3 TU1208-100-X3 4 6 8 10 12 2.5 4 5 6.5 8 285 Max. operating pressure 142 0 4 32 70 105 140 10Clean Series Operating temperature F Only available in 20m rolls.
motor brake 50 Direct acting guide Series LXF 0.03 Ball screw 3 100 50 Series LXP 6 Ball bushing guide 100 Ball screw 0.03 50 5 100 Series LXS 50 10 High rigidity direct acting guide 100 Ball screw 0.03 50 5 100 5 Simplified Selection Flow Chart Series LX Standard stroke (mm) and 25 50 75 100 125 150 175 200 Model Motor Manufacturer Maximum speed (mm/s) Phases LXFH5SB LXFH5BC LXFH5BD
motor brake 50 Direct acting guide Series LXF 0.03 Ball screw 3 100 50 Series LXP 6 Ball bushing guide 100 Ball screw 0.03 50 5 100 Series LXS 50 10 High rigidity direct acting guide 100 Ball screw 0.03 50 5 100 5 Simplified Selection Flow Chart Series LX Standard stroke (mm) and 25 50 75 100 125 150 175 200 Model Motor Manufacturer Maximum speed (mm/s) Phases LXFH5SB LXFH5BC
to 80 304 280 5 phase to 200 264 2 phase to 200 286 278 5 phase to 100 262 2 phase to 100 274 5 phase to 30 258 2 phase to 30 294 276 5 phase to 80 260 2 phase to 80 Page Standard stroke (mm) and 25 50 75 100 125 150 175 200 Model Maximum speed (mm/s) Capacity Standard Deflection LXFHABC LXFHABD to 50 288 304 to 100 LXPBABC LXPBABD LXPBABC-B LXPBABD-B to 50 to 100 290 304 to 50 30W
20 44.5 84 36 25 163 50 100 70 9 37 3 x 3/4 1/4 96 43 60 163 24 60.5 100 49 34 175 63 126 92 0.5 40 3 x 1 1/4 96 43 64.5 167.5 24 60.5 104 49 34 179.5 63 126 92 5 44.5 3 x 1 1/4 113 48 65.5 171.5 24 66.5 115 56 38 183.5 70.5 141 109 41.5 P Q R S T U Model SGH130-10 SGH230-3015 SGH230-7015 SGH330-3020 SGH330-7020 SGH430-3025 SGH430-7025 For M5 M5 186.5 20.8 145.7 81.1 For M5 M5 188.5 20.8
Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Standard type Nil PNote 1) Axial piping type Note 1) The combination of axial piping type and both ends adjusters or retraction end adjusteris not
300 500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.
VAC Grommet Flange type with surge voltage suppressor 110 VAC A B C D Direct piping type 200 VAC Flange type 230 VAC 80A 6 Flange body I type 24 VDC Flange body II type 24 VDC DIN terminal with surge voltage suppressor 100 VAC 7 8 90A B Flange type 110 VAC 100A 200 VAC 230 VAC 24 VDC Conduit terminal 100 VAC with surge voltage suppressor 110 VAC 200 VAC 230 VAC 24 VDC Conduit with surge