Digital Flow Switch (Integrated display type)

. -55No.PF-OMJ0006-J Piping port specifications Model 01 02 N01 N02 F01 F02 C4 C6 C8 N7 4 8 6 1/4 (5/32") (5/16") Thread type (Port size) Rc Rc NPT NPT G G OneOneOneOne1/8 1/4 1/8 1/4 1/8 1/4 touch fitting touch fitting touch fitting touch fitting Straight without flow adjustment valve 95 g 125 g 55 g Bottom entry without flow adjustment valve 105 g 135 g 65 g Weight Straight with flow adjustment

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

CXS10-45-XB19 45 117 100 CXS10-50-XB19 50 122 105 CXS10-60-XB19 60 132 50 115 CXS10-70-XB19 70 142 125 CXS10-75-XB19 75 147 130 5 Series CXS-XB19 Dimensions CXS15--XB19 S ZZ 12 7 6 18 20 1 30 Z SS 2-3 x 16l AW (spring pin) 12 2-4.3 through 2-8 counter bore depth 4.4 45 0.2 50 0.2 45 0.2 48 25 56 58 6.3 5 2.1 M4 x 0.7 x 14.5l and M4 x 0.7 (hexagon bolt) (hexagon nut) 2-M5 x 0.8 (through)

Compact Cylinder with Air Cushion and Lock Series RLQ

0.8 (Manual unlocking unit) PL unlocking port Unlocks when pressurized Dust cover Rod end male threads M14 x 1.5 8 20.5 23.5 28.5 Rod end nut 7 Compact Cylinder with Air Cushion and Lock Series RLQ Dimensions/40 (Emergency Stop) Foot/RLQL40 34 17 44 + Stroke Special cap bolt 33 64 4 64 78 4-6.6 3.2 7 7 62 + Stroke 102.2 + Stroke 11.2 11.2 Rod end nut 38.5 Front flange/RLQF40 40 54 8 17 95

SMC Pneumatic Clean Series

When determining particle generation grades, the 95% upper confidence limit of the average particle concentration (average value), when each specimen is operated at a specified number of cycles Note 2) is considered. The plots in the graphs indicate the 95% upper confidence limit of the average particle concentration of particles with a diameter within the horizontal axis range.

RLQ

100 110 120 145 170 100 105 110 120 130 155 180 120 130 140 165 190 125 135 145 170 195 Mounting bolt 8 CL C Spring washer D CL1 Note) When mounting 50 to 63 cylinders from the rod side, be sure to use the attached flat washers because the bearing surface is limited.

LX

(A contact) 50 75 100 125 150 50mm 75mm 100mm 125mm 150mm Use a driver with CE marking. N.O.

LX

(A contact) 50 75 100 125 150 50mm 75mm 100mm 125mm 150mm Use a driver with CE marking. N.O.

2–4

15, 20, 25, 30, 35, 40, 45, 50, 75, 100 50 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Manufacture of Intermediate Stroke Description Intermediate stroke range Bore size (mm) Intermediate stroke range (mm) Spacers are installed in a standard stroke cylinder. 12, 16 1 to 29 20, 25 1 to 49 Description Bore size (mm) 32 12 to 32 1 to 99 Available in 1 mm stroke increments 40, 50 40, 50 5 to 95

Adsorption Plate

Adsorption surface size SP1130 SP1230 SP1330 SP1430 SP1530 SP1630 50 x 50 55 40 10 Related Products 100 x 100 95 50 10 P2 P3 P2 P3 150 x 150 120 75 10 200 x 200 145 100 10 Rc 1/8 Rc 1/8 P3 P3 250 x 250 170 125 10 300 x 300 195 150 10 Square Rc 1/8 Rc 1/8 P1 P2 Base part no.

OMU0023

15 10 Commands for virtual I/O operation by serial communication 195 30 15 110 20 10 Reading of alarm history (4 words) 215 30 15 120 20 10 Clearing of alarm history 245 35 15 135 20 10 Confirmation of communication connection 165 25 10 95 15 10 The communication response time does not include the processing time of the upper level device.

5 Port Solenoid Valve Series SQ1000/2000

0.7MPa (High pressure type: 1.0MPa) Single 2 position 3 position 4 position 4.5 (0.25) SQ1131 15 or less 80 Rubber seal 20 or less 0.1MPa 0.15MPa Single 3.2 (0.18) SQ1230 15 or less 80 Metal seal 0.18MPa 0.18MPa Double (latching) Double (latching) Minimum operating pressure 4.5 (0.25) SQ1231 20 or less 80 Rubber seal 0.1MPa 0.1MPa Double (double solenoid) 3.2 (0.18) SQ1230D 10 or less 95

Solid State Auto Switches

D-M5NT D-M5PT Auto switch model 3 m (L) 60 Lead wire length 5 m (Z) 95 Ex.) Cylinder speed 1000 mm/sec. PLC response time 0.1 sec. Detecting point dispersion Within 100 mm (= 1000 mm/sec. x 0.1 sec.) Take PLC response time into consideration when using.

Compact Cylinder with Solenoid Valve/

-100 135 x 135L M8 x 60L 60 15 CVQM405 45 M5 x 45L x 65L 65 20 10 50 x 50L x 70L 70 25 15 55 x 55L x 75L 75 30 20 60 x 60L x 80L 80 35 25 65 14.5 x 65L x 85L 85 40 30 70 x 70L x 90L 90 7.5 45 35 75 x 75L x 95L 95 50 40 80 x 80L x 100L 100 75 45 85 x 85L x 125L 125 -100 50 90 x 90L x 150L 150 75 115 x 115L -100 140 x 140L Plate Non-rotating Accuracy Plate Allowable Rotational Torque Non-rotating

CQM

30, 35, 40, 45, 50, 75, 100 50 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 -X Manufacture of Intermediate Stroke 20Description Intermediate stroke range Data Bore size (mm) Intermediate stroke range (mm) Spacers are installed in a standard stroke cylinder. 12, 16 1 to 29 20, 25 1 to 49 Description Bore size (mm) 32 12 to 32 1 to 99 Available in 1 mm stroke increments 40, 50 40, 50 5 to 95

CS1

Air Cylinder Series CS1 125, 140, 160, 180, 200, 250, 300 Variations CJ1 Basic style Standard variations Bore size (mm) Series Action Style Copper free Rod boot Page CJP CJ2 Standard Series CS1 125 140 160 180 200 250 300 Lube CM2 C85 Single rod Series CS1 Non-lube 1.10-2 CG1 (125 to 160 Only) 125 140 160 MB Air-hydro Series CS1 C95 Double acting CA1 125 140 160 180 200 250 300 Lube CS1 Double

ZPT/ZPX

EPR 40 50 63 80 100 125 40 161 1 0 +1 +10 39 160 2 0 +1 +19 89 158 3 0 +2 +37 56 156 6 0 +2 +61 55 396 12 1 +4 +121 155 347 22 3 +7 +228 121 345 120 580 118 531 116 529 How to Order A14 HB N 40 ZPX Vacuum entry/Mounting thread diameter Pad diameter (mm) 40 40 40, 50 63, 80 100, 125 50 50 A14 M14 x 1 63 63 A16 M16 x 1.5 80 80 B8 M 8 x 1.25 100 100 B10 M10 x 1.5 125 125 B12 M12

MXS Series Air Slide Table

0 50 100 150 200 160 120 80 40 200 0 0 100 150 200 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 20 20 20 Lr=122mm 0.040 0.05 0.10 0.035 MXS20-125 MXS20-150 MXS20-100 MXS20-150 MXS20-75 MXS20-50 MXS20-40 MXS20-30 MXS20-20 MXS20-10 0.04 0.08 MXS20-125 MXS20-150 MXS20-100 MXS2075 MXS2050 MXS2040 MXS20-125 MXS20-100 0.030 Table deflection mm Table deflection mm Table

Base Mounted Metal Seal/Rubber Seal Series VQ

135.5 76 104 125 135.5 86.5 114.5 137.5 148 97 125 150 160.5 107.5 135.5 162.5 173 118 146 175 185.5 128.5 156.5 187.5 198 139 167 187.5 198 149.5 177.5 200 210.5 160 188 212.5 223 170.5 198.5 225 235.5 181 209 237.5 248 191.5 219.5 250 260.5 202 230 250 260.5 212.5 240.5 262.5 273 2-4-156 Base Mounted Series VQ1000/2000 Plug-in Unit VQ2000 L10 = L3 + 50 L11 = L4 + 50 100 L8 = 16n + 118.5

5 Port Solenoid Valve

133.5 142 150.5 159 167.5 176 184.5 193 201.5 210 112.5 112.5 125 137.5 137.5 150 162.5 162.5 175 187.5 187.5 200 212.5 212.5 225 237.5 123 123 135.5 148 148 160.5 173 173 185.5 198 198 210.5 223 223 235.5 248 40 Series EX260 Specific Product Precautions 1 Be sure to read before handling.

5 Port Solenoid Valve Series VQZ1000/2000/3000

Unless otherwise indicated, dimensions are the same as L-type plug connector (L). [ ]: AC Max. 16 stations Dimensions 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L n L1 L2 L3 L4 L5 323 310.5 260.5 273 298 248 185.5 210.5 223 173 135.5 135.5 160.5 135.5 135.5 300 312.5 287.5 237.5 250 262.5 212.5 162.5 175 200 150 125 125 125 125 257 274 291 240 189 206 223 172 121 138 155 104 104 104 104 16 16.5