Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Light weight & compact Series XMA with KF(NW) flange Model Weight kg A mm B mm Conductance l/s XMA-16 5 0.33 40 103 XMA-25 XMA-40 XMA-50 14 0.61 50 113 B 45 1.40 65 158 80 2.00 70 170 A 160 XMA-63 XMA-80 3.60 196 88 200 6.20 90 235 : Common to all series.

MGP

5.49 6.14 6.69 7.24 7.79 9.02 10.12 11.2 12.3 63 MGP63 4.66 5.60 6.20 6.85 7.61 8.28 8.95 9.61 11.1 12.4 13.7 15.1 80 MGP80 8.88 9.63 10.45 11.3 12.1 12.9 13.7 15.6 17.3 18.9 20.5 100 MGP100 13.7 14.9 16.0 17.2 18.4 19.6 20.8 23.4 25.7 28.1 30.4 6-3.MGPS-( (kg) (mm) (mm) 25 50 75 100 125 150 175 200 50 MGPS50 3.90 4.68 5.74 6.52 7.30 8.08 8.86 9.64 80 MGPS80 9.21 10.7 13.0 14.5 15.9 17.9

High Vacuum L Type Valve

H 5 Initial power / Power 100 VAC 200/40 400/70 400/80 600/130 200 VAC 800/40 1600/80 1600/80 2400/130 consumption (W) Item XL-80 XL-100 XL-160 Rated voltage of the heater 90 to 240 ACV Heater assembly number XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 1 pc. 2 pcs. 3 pcs.

CG5-S

, 100 80, 100 e t q o i r y t !

0.5

400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 0 0 0 0 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] Installation distance [mm] Installation distance [mm] Installation distance [mm

energy saving effect

fluid flow rate [L/min] IDH HRSH250/300-A-20/4090 0.9 Usable flow rate range Circulating fluid pressure [MPa] 80 0.8 0.7 70 Pump head [m] 0.6 60 Outlet 0.5 50 0.4 40 0.3 30 0.2 20 Return port 0.1 10 0 0 125 0 20 40 60 80 100 120 140 160 180 Circulating fluid flow rate [L/min] 171 HRSH Series Inverter Type Dimensions HRSH100/150/200-A-20 (Air-cooled 200 V type) HRSH100/150/200-A-40 (Air-cooled

Direct Operated

Also, add 60 g for VX31, 80 g for VX32 and VX33 respectively for bracket option. Refer to Glossary on page 31, for details on the max. operating pressure differential and the max. system pressure.

ZP

-75kPa -80kPa -85kPa 100 Pad diameter (mm) 80 63 50 40 10 30 50 70 100 200 5 7 Lifting force (N) How to read Example: Work load 20 kg (Lifting force: 196 N) Conditions:Desired number of pads 5 pcs.

1.1

VAC (50 Hz) 200 to 220 VAC (60 Hz) 3-phase single HRG0057 kVA 6 HRG01014 kVA 440, 460 VAC (50 Hz) 440 to 500 VAC (60 Hz) HRG0157 18 kVA 3-phase double 220, 240, 380, 400, 415, 440 VAC (50/60 Hz) 8 200 VAC (50/60 Hz) Note) Refer to page 32 for dimensions.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

210.5 7 108 128 187.5 198 6 97.5 117.5 175 185.5 5 87 107 162.5 173 4 76.5 96.5 150 160.5 3 66 86 150 160.5 2 55.5 75.5 137.5 148 L1 L2 L3 L4 34.5 54.5 112.5 123 Dimensions: Side Entry Connector [-FS] n L 1 137.5 148 2 150 160.5 3 162.5 173 4 175 185.5 5 187.5 198 6 200 210.5 7 200 210.5 8 212.5 223 9 225 235.5 10 237.5 248 11 250 260.5 12 262.5 273 13 262.5 273 14 275 285.5 15 287.5 298

Basic Type/Direct Mount Type

, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 3000 32 40 3000 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1) Long stroke type (XB11) applies to the strokes exceeding 2000 mm.

Vacuum Filter AFJ Series

rating: 40 m Large flow type Nominal filtration rating: 40 m 0 0 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min (ANR)] 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min (ANR)] 80 m 80 m AFJ20-02-80-S/AFJ30-03-80-S/AFJ40-04-80-S AFJ20-02-80-T/AFJ30-03-80-T/AFJ40-04-80-T 12 12 AFJ20-02-80-T AFJ30-03-80-T AFJ20-02-80-S AFJ30-03-80-S AFJ40-04-80-S 10 10 Pressure drop [kPa] Pressure

Rotary Actuator

Size Current model [kg] Reduction rate [%] CRA1 [kg] Angle adjustable type 30 50 63 80 100 0.3 10 0.27 Size: 50, 63, 80, 100 Size: 50, 63, 80, 100 1.5 13 1.3 D50 to 100 50 to 100 Rotating angle 2.5 12 2.2 90, 180, 100, 190 90, 180, 100, 190 4.3 10 3.9 8.5 14 7.3 With solenoid valve Size: 50, 63, 80, 100 Size: 50, 63, 80, 100 Mounting interchangeable with the current model 50 to 100 50 to

Cylinder with Lock Series CNS

CL1 200 MLGC CNG 100 500 400 300 200 100 100 500 400 300 200 100 MNB Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNA Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 2000 600 CNS 500 160 160 CLS 140 400 1000 140 700 800 900 CLQ 125 320 Load mass: m (kg) Load mass: m (kg) 125 300 RLQ 600 500 MLU 400 200 300 MLGP ML1C 200 280 100 100 100 500 400 300 200 100 500 400 300 200

CJ2

Order Made Made to Order Refer to p.5.4-1 for made to order products of series CJ2K. 1.3-36 Non-rotating Rod: Single Acting Spring Return/Extend Series CJ2K Copper Free Weight/Spring Return ( ): Spring extend (g) 10 16 Bore size (mm) Mounting Bore size Stroke Port location on head cover 20-CJ2K Action 15 Stroke 28 (28) 63 (64) Copper free 30 Stroke 35 (34) 80 (80) To eliminate influences

XLA Series

H 5 Initial power / Power 100 VAC 200/40 400/70 400/80 600/130 200 VAC 800/40 1600/80 1600/80 2400/130 consumption (W) Item XL-80 XL-100 XL-160 Rated voltage of the heater 90 to 240 ACV Heater assembly number XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 1 pc. 2 pcs. 3 pcs.

XLA- ∗ -F7NJ ∗ - ∗ Series

H 5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 200 VAC 800/40 1600/80 1600/80 2400/130 Item XL-80 XL-100 XL-160 Rated voltage of the heater 90 to 240 ACV Heater assembly number XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 1 pc. 2 pcs. 3 pcs.

VQC

CAT.ES11-80 A 5-Port Solenoid Valve Series VQC NEW CONCEPT Connector Type Manifold Series VQC1000/2000/4000 Outstanding response times and long life Conforming to IP67 for protection from dust and moisture (Metal seal: Single type with light and surge suppressor) VQC1100: 10ms 2ms; 200 million cycles VQC2100: 20ms 2ms; 200 million cycles VQC4100: 17ms 3ms; 100 million cycles (Based on IEC529

ZP

-75kPa -80kPa -85kPa 100 Pad diameter (mm) 80 63 50 40 10 30 50 70 100 200 5 7 Lifting force (N) How to read Example: Work load 20 kg (Lifting force: 196 N) Conditions:Desired number of pads 5 pcs.

V

www.stevenengineering.com I 2.82 SOLENOID VALVES SERIES VQZ100/200/300 BODY PORTED 3 PORT SOLENOID VALVE BODY PORTED / PLUG LEAD TYPE SERIES VQZ100/200/300 T E C H N I C A L SPECIFICATIONS S E R I E S VQZ100/200/300 Type Of Seal Metal Seal Rubber Seal Fluid Air, Inert Gas Air, Inert Gas Maximum Operating Pressure 0.7MPa / 102PSI (High Pressure Type 0.8MPa / 116PSI) Valve Specifications Solenoid