Digital Flow Switch

to 1000 L/mim 20 to 2000 L/mim Instantaneous flow 5 to 525 L/mim 10 to 1050 L/mim 20 to 2100 L/mim Set flow rate range Accumulated flow 0 to 999,999,990 L Instantaneous flow 1 L/min Flow Minimum setting unit Accumulated flow 10 L Accumulated volume per pulse (Pulse width = 50 msec.) 1 L/pulse 10 L/pulse Accumulated value hold 2 Every 2 minutes or every 5 minutes Rated pressure range 0 to

EXxx-OMK0006

Baud rate Max. bus cable length 1 Mbit/s 25 m 800 kbit/s 50 m 500 kbit/s 100 m 250 kbit/s 250 m 125 kbit/s 500 m 50 kbit/s 1000 m 20 kbit/s 2000 m 10 kbit/s 5000 m -10No.EX-OMK0006-C Bus cable and termination resistors The cables, connectors, and termination resistors used in CANopen networks shall meet the requirements defined in ISO 11898.

MLGC

model Bore size (mm) 40 32 25 20 D-B7/B80 D-B73C/B80C D-C7/C80 D-C73C/C80C D-B5/B64 8 10 9 10 8 10 9 10 8 13 8 10 13 10 9 14 9 10 14 10 D-B59W D-G79/K79/K79C D-H7BAL D-H7/H7W/H7NF 4 4 4.5 5 7 8.5 9 10 D-H7C D-G5/K59 D-G5W/K59W D-G5NTL/G5BAL 4 4 4.5 5 6 45 D-G59F D-G5NBL 5 35 5 40 5.5 40 Since this is a guideline including hysteresis, not meant to be guaranteed.

MLGC

model Bore size (mm) 40 32 25 20 D-B7/B80 D-B73C/B80C D-C7/C80 D-C73C/C80C D-B5/B64 8 10 9 10 8 10 9 10 8 13 8 10 13 10 9 14 9 10 14 10 D-B59W D-G79/K79/K79C D-H7BAL D-H7/H7W/H7NF 4 4 4.5 5 7 8.5 9 10 D-H7C D-G5/K59 D-G5W/K59W D-G5NTL/G5BAL 4 4 4.5 5 6 45 D-G59F D-G5NBL 5 35 5 40 5.5 40 Since this is a guideline including hysteresis, not meant to be guaranteed.

Special Specifications:

Specifications Specifications AFF2B to 75B Applicable model AFF2B to 37B Applicable model Refer to How to Order for standard specifications on pages 14-20-10, 16, 23, 31, 37 and 43. Refer to How to Order for standard specifications on pages 14-20-3, 10 and 16.

SI unit for DeviceNet ®

No.5 No.6 No.7 No.8 No.9 No.10 32 16 8 4 2 1 0 0 0 0 0 0 0 1 0 0 0 0 0 1 MAC ID 2 0 0 0 0 1 0 : : : : : : : 62 1 1 1 1 1 0 63 1 1 1 1 1 1 Communication speed setting (switches No. 3 to 4) The DeviceNet communication speed is binary coded and can be set to 125 kbps, 250 kbps and 500 kbps. : Factory default setting is 125 kbps. 0: OFF 1: ON Switch No.

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

Stations L1 L2 L3 L4 2 135.5 125 105 15 3 4 5 6 7 8 9 10 160.5 150 137 11.5 185.5 175 153 16 210.5 200 185 12.5 235.5 225 201 17 260.5 250 233 13.5 148 137.5 121 13.5 198 187.5 169 14.5 248 237.5 217 15.5 Stations SS5Y5-45GDBC4 C6 C8 Stations L1 L2 L3 L4 2 148 137.5 123 12.5 3 4 5 6 7 8 9 10 185.5 175 155 15 210.5 200 187 11.5 235.5 225 203 16 260.5 250 235 12.5 285.5 275 251 17 198 187.5

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

. 3 4 5 6 7 8 9 10 2 Stations L1 L2 L3 L4 148 198 248 135.5 125 105 15 160.5 150 137 185.5 175 153 16 210.5 200 185 235.5 225 201 17 260.5 250 233 137.5 121 187.5 169 237.5 217 13.5 11.5 14.5 12.5 15.5 13.5 Stations SS5X5-45GUBC4 C6 C8 Stations L1 L2 L3 L4 2 148 3 4 5 6 7 8 9 10 173 198 248 185.5 175 155 15 210.5 200 187 235.5 225 203 16 260.5 250 235 285.5 275 251 17 137.5 123 162.5 139

PFxx-OMP0001CN

L/min 10 L ON OFF ON ()OFF () 0 -12No.PF-OMP0001CN-F , ,2 5 10 L/min 5 ,51050 L ON-OFF () 1 L/min ,101112 1 L/min SI SI ON-OFF ON 0 ripple -13No.PF-OMP0001CN-F 4 0.50.7 Nm ,, M4(4) (67) M4 -14No.PF-OMP0001CN-F (3.0,4 ) (67 ) 0.50.7 Nm ,, (3.0) -15No.PF-OMP0001CN-F IN8cm 2F.S.

PFxx-OMS0001CN

DC(+) (OUT) 2 OUT2// 3 DC(-) 4 OUT1 (IN) M8 M8 IN OUT (UP) (SET) (DOWN) () OUT1OUT2 ON (1 ) (UP) ON/OFF (SET) (DOWN) ON/OFF -11No.PF-OMS0001CN-A F.S. ( 15 V F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] 15 V 15 V 420 mA ON OFF () (0100)() 90 () (0100) ()90ON(OFF) 0 1 atm()[nor] () 10 L/min 10 L ON OFF ON OFF 0 -12No.PF-OMS0001CN-A , , 2 5 10 L/min 5 ,51050 L ON-OFF () 1 L

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

to 330 20 to 180 24 to 750 16 to 500 8 to 250 30 to 1140 20 to 760 10 to 350 range 801 to 900 24 to 610 16 to 410 8 to 200 30 to 930 20 to 620 10 to 280 Actuator specification 901 to 1000 24 to 500 16 to 340 8 to 170 30 to 780 20 to 520 10 to 250 1001 to 1100 30 to 660 20 to 440 10 to 220 1101 to 1200 30 to 570 20 to 380 10 to 190 10 Max acceleration/deceleration [mm/s2] 5000 Positioning

How to Order MB Series ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Air Cylinder: Standard Type Double Acting, Single Rod

400, 450, 500 CA2 Up to 1800 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper -XC5 Heat resistant cylinder (10 to 110C) -XC6 Made of stainless steel*3 *4 Up to 2700 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 -XC7 Tie-rod

Digital Flow Switch (Remote type monitor unit)

If the error cannot be reset after the above measures are taken, then please contact SMC. -66No.PF-OMN0012-H Specifications Specifications of the product Model PF3W30# Applicable sensor PF3W504 PF3W520 PF3W540 PF3W511 PF3W521 Rated flow range 0.5 to 4 L/min 2 to 16 L/min 5 to 40 L/min 10 to 100 L/min 50 to 250 L/min 3.5 to 45.0 L/min 1.7 to 18.0 L/min 0.35 to 4.50 L/min 20 to 280 L/min 7

SYJ300/500/700

N.O. 10-SYJ722M 10-SYJ714M 140(80) 1/8 Base mounted (With sub-plate) 10-SYJ724M 135(75) 136(76) 157(97) 10-SYJ714M 1/4 10-SYJ724M Note) Value for DC.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

stroke (mm) Double acting Bore size (mm) 32 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 C95 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CA1 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350

Compact Rotary Actuator Series CRQ2

MSZ 350 CRQ2X MSQX MRQ 200 300 30 25 20 15 10 5 0 40 30 20 10 0 Load (N) Load (N) MSQXB30A MSQXB50A 350 300 300 250 Displacement (m) Displacement (m) 250 200 200 150 150 D100 100 100 80 60 40 20 0 50 40 30 20 10 0 Load (N) Load (N) 329 Series MSQX Construction o i w@3 r !

High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Compact Cylinder Series CQS

, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 12 16 20 25 CQM MU 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20, 25 30, 35, 40, 45, 50 Double rod CQSW 560 12 16 20 25 5, 10 Double acting Single acting Return/Extend CQS 567 12, 16 20, 25 Non-rotating Rod Single rod CQSK 575 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20, 25 30, 35, 40, 45, 50 Double rod CQSKW 582 Anti-lateral Load

VFR

is D side mounting only. 10 Note) 10 stations Note) Base 01T/10/40: 2 to 10 stations Base 01C/01F: 2 to 8 stations Including stations of control unit.

ZP

10 to 16 (Thin section series) 2 to 8 10 to 16 20 to 32 40, 50 2 x 4, 3.5 x 7, 4 x 10 10 to 16 (Thin section series) 2 to 8 10 to 16 20 to 32 40 to 50 4, 6 Nylon tube, 4, 6 Urethane tube Vacuum entry Thread dia.