MLGP

) MLGPL20, 25 (5) 30 Stroke or Less V = 200 mm/s (6) Over 30 stroke V = 200 mm/s 20 20 25 10 10 20 Load weight m (kg) Load weight m (kg) 5 5 25 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 20 1 10 50 100 200 1 10 50 100 200 Eccentric distance l1 (mm) Eccentric

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

A Bore size (mm) 32 40 50 63 80 100 125 H 0.5 0 0.1 C DH7 FH11 L M N P 15 32.5 10.5 22 10 14 30 6.6 45 10.5 5.5 5 38 12 25 12 16 18 35 6.6 55 11 5.5 5 51 15 21 20 46.5 27 16 40 9 65 15 6.5 5 56.5 15 32 16 21 23 45 9 75 15 6.5 5 70 27 72 18 36 20 25 45 11 95 18 10 5 89 18 41 20 25 30 55 11 115 18 10 5 40 110 25 50 30 37 60 13.5 140 20 10 7 100 Black color 81 Series CP96/C96 Dimensions

2 Phase Stepper Motor/Without Motor Brake Series LXS

5 9 0 Transfer load m (kg) Refer to page 304 for deflection data. 276 5 Phase Stepper Motor/With Motor Brake Series LXS Dimensions/LXSH5BD Scale: 25% F G x I +0.030 0 depth 5 +0.030 0 depth 5 5H9 10 D-5.1 through Refer to Cross section C-C, bottom view.

MXS Series Air Slide Table

M8 X 1 MXS-AS12-X11 15 30 D F MXS-AS12-X12 25 40 MXS-AS16 5 24.5 MXS16 Mounted to table 16.5 M5 X 18 19 M5 X 18 12 5 21 14 37 11 MXS-AS16-X11 15 34.5 M10 X 1 MXS-AS16-X12 25 44.5 Q MXS-AS20 5 27.5 MXS20 M12 X 1.25 21 M6 X 20 24 M6 X 20 13 6 25 17 13 45.5 MXS-AS20-X11 15 37.5 I MXS-AS20-X12 25 47.5 J H MXS-AS25 5 32.5 MXS25 MXS-AS25-X11 15 42.5 25.5 M8 X 25 M8 X 25 17 6 31 19 26.5 M14 X 1.5

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

35 20 4 20 6 33.6 8.5 7 M5 x 0.8 x 5l 30 thread depth 7 thread depth 4.5 2-4.3 through 2-8 counterbore depth 4.4 2-M5 x 0.8 4-M4 x 0.7 2-M4 x 0.7 thread depth 6 M5 x 0.8 x 10l CXS15 9 10 58 20 56 18 2-M5 x 0.8 45 25 5 30 8 48 10 10 M6 x 1.0 x 5l 38.5 thread depth 8 thread depth 5 Dimensions by Stroke (mm) Symbol SS Z ZZ Stroke 10, 15 20, 25 30, 35, 40, 45, 50 60, 70, 75 90, 100 25 30 20 15

CJ2X/CUX/CQSX/CQ2X/CM2X

, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion

Modular F.R.L. Unit

AD38 AD38NNote 5) AD48 AD48NNote 5) AD48 AD48NNote 5) Float type Note 4) auto drain N.C. AD27 AD37 AD37NNote 5) AD47 AD47NNote 5) AD47 AD47NNote 5) With back flow mechanism Filter regulator Note 1) Assembly includes a bracket and set nuts. Note 2) in part numbers for a round pressure gauge indicates a type of connection thread.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

76.7> 70.7 3 R2 R1 5 X 12 P 1 (A, B port) 25 25 25 20 15.4 12 2.5 5 14.5 19.5 G 3/8 Electrical entry 39.1 5 x 1/4" 1(P), 4(A), 2(B), 5(R1), 3(R2) port 43.8 53.6 < >: AC Note) When using this valve for IP65, mount a seal connector to the electrical entry. 560 VQ1000/2000 1021Semi-standard Different Number of Connector Pins F and P kits with the following number of pins are available besides

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

76.7> 70.7 3 R2 R1 5 X 12 P 1 (A, B port) 25 25 25 20 15.4 12 2.5 5 14.5 19.5 G 3/8 Electrical entry 39.1 5 x 1/4" 1(P), 4(A), 2(B), 5(R1), 3(R2) port 43.8 53.6 < >: AC Note) When using this valve for IP65, mount a seal connector to the electrical entry. 560 VQ1000/2000 1021Semi-standard Different Number of Connector Pins F and P kits with the following number of pins are available besides

F

26 14.5 2.3 6.3 1/8 10-32UNF KJH01-32 7 18.5 15.5 2.3 2.1 1/8 1/16 KJW01-33S 9.5 7.8 17 25 25 14.5 2.5 8.6 1/8 1/16 KJH01-33S 9.5 21.5 17.5 2.5 5.3 1/8 1/8 KJW01-34S 11.11 7.8 17 25 25 14.5 2.5 10.5 1/8 1/8 KJH01-34S 11.11 16.5 12.5 2.5 5 5/32 10-32UNF KJW03-32 7 8.9 17.5 25.5 27 14.5 2.3 6.4 5/32 10-32UNF KJH03-32 8 18.5 15.5 2.3 2.4 5/32 1/16 KJW03-33S 9.5 8.9 17.5 25.5 26 14.5 2.5 8.7

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

[38.5] Max. 10 57.5 16.1 46.2 31.1 M8 x 1 36 18.5 Approx. 300 (Lead wire length) 42.6 [49.6] 2 x 3.2 (For mounting) 2 x 3.2 2 x 3.2 2 x 3.2 (For mounting) (For mounting) 127.2 [131.6] 107.6 [112] (For mounting) 125.4 145.4 147.2 110.6 97.6 65.6 35 35 35 35 21 21 25 21 25 21 Pg7 28 25 28 25 Applicable cable O.D. 3.5 to 7 28 28 Refer to page 375 for dimensions with connector cable. 347 5

HRX-OM-X037

HRL Series 5.4 Description of the Screen 5-55 HRX-OM-X037 Chapter 5 Display and Setting of Various Functions (1) (2) (3) (4) (5) (6) Serial communication setting Table 5.4-25 Setting of serial communication No.

CXS

(2) V = 400 mm/s Graph (1) V = 200 mm/s 20 50 CXSM CXSL CXSM CXSL 10 10 Weight m (kg) Weight m (kg) 32 32 25 25 1 1 20 20 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang l (mm) Overhang l (mm) Graph (4) V = 800 mm/s Graph (3) V = 600 mm/s 6 5 3 32 2 Weight m (kg) Weight m (kg) 32 25 25 1 1 20 20 CXSM CXSL CXSM CXSL 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang l (

CXS

= 800 mm/s Graph (3) V = 600 mm/s 6 5 3 32 2 Weight m (kg) Weight m (kg) 32 25 25 1 1 20 20 CXSM CXSL CXSM CXSL 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang l (mm) Overhang l (mm) Graph (5) V = 1000 mm/s 3 CXSM CXSL 32 2 Weight m (kg) 25 1 20 0.6 5 10 20 30 40 50 100 Overhang l (mm) 8-28-16 16 Model Selection Series CXS Horizontal Mounting Graph (6) V = Up to 800 mm/s; Up to

Compact

High speed transfer Workpiece direct mounting Long stroke Light load transfer Combining with external guide Long stroke LEC S LEC SS-T Size Work load [kg] Size Work load [kg] Size Work load [kg] Size Work load [kg] 25 25 25 25 6 10 10 10 LEC Y 32 32 32 32 11 20 20 20 Motorless LAT LZ Size Size Size Size 25 32 25 32 25 32 25 32 LC3F2 Stroke [mm] Stroke [mm] Stroke [mm] Stroke [mm] 2000

High Vacuum Angle Valve, XL Series

Electrical entry G Grommet C Conduit T Terminal D DIN terminal XLS 25 5 G Without control power supply XLS 25 P 1 G With control power supply High vacuum angle valve Bellows pressure balance, 2 stage voltage switching type Valve size Electrical entry G Grommet 16 25 KF16 KF25 Voltage 1 2 100VAC 200VAC Control power supply 5 24VDC P With control power Warning (1) In case there is no control

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Component parts Cable length 1.5 m 3 m 5 m 8 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 Plug MIL standard Number of terminals: 25 Cable: 25 cores x 0.3 mm2 Applicable base VV5Z3-45F For details, refer to page 3-3-8.

C95

27 32 36 41 5 5 5 5 5 5 12 15 15 20 20 25 5.5 5.5 6.5 6.5 10 10 30 35 40 45 45 55 10 12 12 16 16 20 9.5 12 12 16 16 20 6.6 6.6 9 9 11 11 6.5 6.5 8.5 8.5 11 12 48 56 64 75 95 115 45 52 60 70 90 110 26 28 32 40 50 60 32 40 50 63 80 100 C85 C76 CG1 Rear Sngle Clevis DS MB MB1 Bore (mm) E B1 H B2 B3 L3 L1 TG1 T d1 FL d2 d3 CN XD 45 55 65 75 95 115 14 16 21 21 25 25 5 5 5 5 5 5 11.5 12 14 14

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators Grommet (G), (H): 10-SY9 40(R)03 04 3 4 5 G H 3/8, 1/2 [4(A), 2(B) port] 29 30 17.5 (Light/surge voltage suppressor) 2 x 5.4 (For mounting) 60 86.5 5 25 27 Manual override 4 A 2 B PE 57 47 + + A B X EB 3 P 1 EA 5 27 25 96.2 23.7 1/8 (Pilot EXH port) 45.9 [48.1] 164.3 [168.7] G: Approx. 300 H: Approx. 600 1/8 (External

Mechanically Jointed Rodless Cylinder Series MY2

1 $1 #0 r $5 !4 @5 !9 @3 !5 #1 @4 $4 !2 $3 #3 #5 #6 @0 #4 #7 !7 #2 @6 @7 Component Parts Note No.