Water-cooledThermo-chiller

Pump Capacity HRW002-H HRW002-HS Circulating fluid: Fluorinated fluids Circulating fluid temperature: 68F (20C) HRW008-H/015-H/030-H HRW008-HS/015-HS/030-HS Circulating fluid: Fluorinated fluids Circulating fluid temperature: 68F (20C) 0 1 2 4 3 5 gpm 145 4 2 8 6 gpm 10 14 12 145 Outlet pressure [60 Hz] 130 130 Circulating fluid pressure (psi) 120 120 100 100 Outlet pressure [50 Hz] 90 90

High Vacuum Angle Valve

Heater assembly quantity 200/40 400/70 400/80 600/130 800/180 1200/300 1600/400 100V H5 120C 800/40 1600/80 1600/80 2400/130 3200/180 4800/300 6400/400 200V The inrush current of the heater flows for several ten seconds when using 100V while it flows for several seconds when using 200V. However, this inrush current decreases momentarily.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

D-A59W Same side 20 115 115 125 130 140 150 1 pc. 15 Different sides 10 2 pcs. D-F5/J5 Same side 10 115 115 120 130 140 150 1 pc. 10 Different sides 10 2 pcs. D-F5W/J5W D-F5BAL Same side 10 120 120 120 135 140 150 1 pc. 10 Different sides 10 2 pcs.

IIIIIII

-N01-34 NVMl20-N01-33 130-N01-33 F .

Mechanical Valves Series NVM, NVFM, NVZNI

-N01-34 NVMl20-N01-33 130-N01-33 F .

Magnetically Coupled Rodless Cylinder

20 10 9.2 30 56 74 76 35 PA (NB) (NA) (N) MM ta M tb Q PW PB P Z TT T QW NN W RW Model CY1L15 CY1L20 CY1L25 CY1L32 CY1L40 Shock absorber 45 RB0805 0.5 M5 x 0.8 M8 x 1.0 8 1.0 90 95 70 M5 x 0.8 112 22.5 12.5 30 92 15 17 27 8.5 DRc 1/8 50 RB1006 M6 x 1.0 10 105 120 90 130 25.5 16.5 40 M10 x 1.0 117 28 20 29 10.5 Rc 1/8 60 RB1411 0.5 M6 x 1.0 10 1.0 105 130 100 130 25.5 16.5 50 M14 x 1.5

Basic type / Direct mount type Series CY3B/CY3R

The increased particle generation will lower gradually if operation continues for a while. 130

LJ1H

Not required. a=3000 Mey a 0 10 20 30 Transfer load m (kg) Refer to page 45 for deflection data. 6 Standard Motor/Horizontal Mount Specification Series LJ1H20 Dimensions/LJ1H20PA 12.5 9.5 Work piece mounting reference plane 110 4 x M6 x 1 thread depth 15 67 20 4 x M8 x 1.25 thread depth 20 8H10 depth 10 Cable entry side Body mounting reference plane 8H10 depth 8 Z section detail 130 52 52.5

Electric Grippers

Series LEHF Series LEHS Stroke/ both sides [mm] Stroke/ diameter [mm] Gripping force [N] Gripping force [N] Size Size Basic Compact 10 10 2.2 to 5.5 3 to 7 1.4 to 3.5 16 (32) 4 20 20 9 to 22 11 to 28 7 to 17 24 (48) 6 32 32 36 to 90 32 (64) 48 to 120 8 40 40 40 (80) 12 52 to 130 72 to 180 ( ): Long stroke Step Motor (Servo/24 VDC) Controller/Driver Step data input type Pulse input type

Step Motor Controller

120 130 120 CN1 CN1 CN3 CN3 CN2 CN2 6 6 5 5 6 5.5 LECSAm-S4 40 6 Mounting hole (Bearing surface thickness 4) 6 135 (170: LECSBm-S8) LECSBm 156 6 6 CN6 CN5 CNP1 CN3 CNP2 161 168 CN1 CNP3 CN2 CN4 6 Battery1 (14) 57 1 Battery included.

Cylinder with Lock Series CLS

(Different surfaces, Same surface), 1 pc. 20 115 120 125 130 D-Y7BAL 115 + 45 (n4) 2 120 + 45 (n4) 2 125 + 45 (n4) 2 130 + 45 (n4) 2 20 + 45 (n2) 2 n pcs.

4/5 Port Solenoid Valve

Station n L1 L2 Station 2 35.5 28.5 Station 20 224.5 217.5 3 46 39 4 56.5 49.5 5 67 60 6 77.5 70.5 7 88 81 8 98.5 91.5 9 109 102 10 119.5 112.5 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 17 Series SYJ3000 C4 N3 Type 32 Manifold: Side Ported/SS5YJ3-32Stations -M5, [ ]: AC (Lead wire length) 91.7 [96.1] Approx. 300 C4

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

m a = 3000 Mey a 0 10 20 30 Transfer load m (kg) Refer to page 145 for deflection data. 50 Non-standard Motor/Horizontal Mount Specification Series LJ1H20 Dimensions/LJ1H202PA(X10) Scale: 10% 12.5 9.5 Work piece mounting reference plane 110 67 20 4-M6 x 1 thread depth 15 4-M8 x 1.25 thread depth 20 8H8 depth 10 Cable entry side Body mounting reference plane Z section detail 8H8 depth 8 130

Suction Guard (Produced upon receipt of order) FHG Series

130 130 150 150 150 190 190 65 65 65 75 75 75 85 85 90 90 90 115 115 115 145 145 6 6 6 6 6 6 8 8 72 72 72 86 86 86 106 106 110 110 110 130 130 130 170 170 195 195 195 245 245 245 19 19 19 19 19 19 20 20 10 10 10 10 10 10 20 20 63 63 63 63 63 63 76 76 14 14 14 17 17 17 17 17 90 90 90 126 126 126 197 197 30 30 30 60 60 80 120 120 177 177 177 227 227 227 285 285 110 110 110 130 130 130 150

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 400/70 400/80 600/130 800/180 1200/300 1600/400 100V H5 120C 800/40 1600/80 1600/80 2400/130 3200/180 4800/300 6400/400 200V The inrush current of the heater flows for several ten seconds when using 100V while it flows for several seconds when using 200V. However, this inrush current decreases momentarily.

CY1

12 35 76 74 56 30 9.2 (N) (NA) (NB) PA MM ta M P PB PW Q tb NN QW T TT Z RW W Model CY1L15 CY1L20 CY1L25 CY1L32 CY1L40 Shock absorber 45 RB0805 M5 x 0.8 0.5 M5x0.8 8 70 95 90 1.0 M8 x 1.0 30 12.5 22.5 112 7.5 27 17 15 92 50 RB1006 M6 x 1.0 Rc(PT)1/8 10 90 120 105 M10 x 1.0 40 16.5 25.5 130 10 29 20 28 117 60 RB1411 M6 x 1.0 0.5 10 100 130 105 1.0 Rc(PT)1/8 M14 x 1.5 50 16.5 25.5 130 11

REA/REB

W Z tb T TT ta S Model Q QW RW REAL15 REAL20 REAL25 REAL32 REAL40 112 0.5 1.0 92 22.5 15 77 12.5 30 90 117 130 16.5 25.5 88 105 40 28 130 0.5 1.0 127 25.5 22 88 16.5 50 105 157 149 1.0 18.5 28.5 0.5 102 121 60 33 194 1.0 1.0 187 35.5 35 138 20.5 84 159 10-2-46 46 Sine Rodless Cylinder Slider Type: Ball Bushing Bearing Series REAL Proper Auto Switch Mounting Position (Detection at stroke

Electric Actuator

) 12 29.2 (130) 47.2 (210) Note) ( ): Long stroke Features 8 Controller Controller Step data input type For step motor Step data input type For servo motor Programless type Pulse input type Series LECP1 Series LECPA Series LECP6 Series LECA6 Control motor Control motor Control motor Control motor Step motor Servo motor Step motor Step motor (Servo/24 VDC) (24 VDC) (Servo/24 VDC) (Servo/

New

Flow-rate characteristics Max. operating pressure differential (MPa) AC DC Port size (Nominal diameter) Orifice diameter (mm) Min. operating pressure differential Note 1) (MPa) Body material Model Max. system pressure (MPa) Weight Note 2) (g) Av x 106 m2 Cv 1/4 (8A) 1.9 46 VXZ232 10 600 0.7 3/8 (10A) 2.4 58 C37, Stainless steel VXZ242 VXZ252 VXZ262 0 1.0 1.5 1/2 (15A) 15 5.3 720 130 3/4 (

Sine Rodless Cylinder Series REA/REB

RHC W Z tb T TT ta S Q QW RW PW Model PB REAL15 REAL20 REAL25 REAL32 REAL40 112 0.5 1.0 92 22.5 15 77 12.5 30 70 95 90 RZQ 117 130 16.5 25.5 88 105 40 28 120 90 130 0.5 1.0 127 25.5 22 88 16.5 50 100 130 105 157 149 1.0 18.5 28.5 0.5 102 121 60 33 160 120 D194 1.0 1.0 187 35.5 35 138 20.5 84 140 190 159 -X Individual -X 975 Series REAL Auto Switch Proper Mounting Position (Detection at