Refrigerated Thermo-chiller

Operating time Operating time 0.5s 1s 2s Min. 0.05s 0.1s 0.2s 0.01s 0.02s 100 200 400 600 1000 2000 4000 130 300 500 700 1500 3000 Technical Data Related Products Current (% for chiller main breaker volume) HRZ008-L HRZ008-L1 HRZ010-WS HRZ010-W1S HRZ010-W2S 4h 2h 1h 5s 10s 20s 30s 1min 2min 4min 6min 10min 14min 20min 30min Max.

Miniature Regulator Series ARJ210

Inch size ARJ310F-N01 5/32" 1/4" 03 07 14-4-11 Series ARJ310 Flow Characteristics Inlet pressure: 0.7 MPa ARJ310-01 ARJ310F-01-04 ARJ310F-01-06 0.7 0.7 0.7 0.6 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0.0 0.0 0.0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow rate

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Note 2) When compressor discharge concentration is 30mg/Nm Specifications Models Model AMG150 AMG250 Drain Catch Series AMG Compressed air 1.0MPa Fluid Maximum operating pressure Rated flow rate Note) l/min (ANR) 300 750 Note) 0.05MPa Min. operating pressure Proof pressure The AMG series is installed in air pressure lines to remove water droplets from compressed air.

HAW

Model/Standard Specifications AT Model HAW2 HAW7 HAW22 HAW37 HAW55 HAW75 HAW110 Screw type compressor IDF IDU 110 55 2.2 75 7.5 22 37 Applicable compressor (kW) Reciprocating type compressor Screw type compressor 75 37 2.2 55 7.5 15 22 IDFA 18000 8600 300 12000 1000 3300 5700 (1) Air flow rate l/min (ANR) IDFB Reciprocating type compressor 11000 5600 300 8000 1000 2100 4300 ID Rated performance

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

20 15 4(A) 4(A) 5 46 12.5 P=11 L plug connector (L) Dimensions n: Stations L n 19 226 218 20 237 229 13 160 152 15 182 174 17 204 196 5 72 64 6 83 75 7 94 86 9 116 108 11 138 130 L2 L1 2 39 31 3 50 42 4 61 53 16 193 185 18 215 207 10 127 119 12 149 141 14 171 163 8 105 97 601

Possible to transfer a workpiece at low-speed.

400 Displacement (m) Displacement (m) 250 350 200 300 40 30 20 10 0 30 25 20 15 10 5 0 Load (N) Load (N) MSQXB30A MSQXB50A 350 300 300 250 Displacement (m) Displacement (m) 250 200 200 150 150 100 100 50 40 30 20 10 0 100 80 60 40 20 0 Load (N) Load (N) 336 MSQX Series Low-Speed Rotary Table Rack & Pinion Type Construction CRB2 CRB1 MSU CRJ CRA1 o i @5 @6 t y !

Series HAW Water Cooled Aftercooler 1

HAW2 HAW7 HAW22 HAW37 HAW55 HAW75 HAW110 Model Screw type compressor Reciprocating type compressor Screw type compressor 2.2 55 110 7.5 75 22 37 Applicable compressor (kW) 2.2 37 75 7.5 55 15 22 300 8600 18000 1000 12000 3300 5700 (1) Air flow rate l/min(ANR) Reciprocating type compressor 300 5600 11000 1000 8000 2100 4300 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

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a 48.5 23 60 142 0 86 1 . 5 1 5 1 0 5 59 130 58 254 58 52 17.5 66 3/. 16 37 55 1 5 23 70 208 0 102 1 3 . 5 1 8 130 76 160 71 296 80 65 21.5 80 4D 56.5 1 5 25 80 226 0 1 6 1 3 . 5 1 8 1 5 0 92 180 3 1 5 80 65 2 1 . 5 81 $eries CLA lllmensio Rear Flange Type/CLAG with Rod Boot tvt14x1.5 M 1 8 X 1 . 5 rv18x1.5 M22)r.1.5 t\426X1.5 I n 2 0 27 ,/. 42 I I 20 45 153 8 60 9 1 2 80 42 100 5 1 2 1 6

EXxx-OMZ0016

(Manufacturer) Communication cable for CC-Link VA-4DCC-110 (Correns) CC100 (Woodhead Japan) 110 1/2 W PCA-1567720 (socket) PCA-1567717 (plug) CC-Link dedicated highperformance cable 130 1/2 W VA-4DCC-130 (Correns) -20No.EX-OMZ0016-C EXW1-RD* Appearance EXW1-RDX*B* No.

Air Cylinder CLA Series Fine Lock Model

a 48.5 23 60 142 0 86 1 . 5 1 5 1 0 5 59 130 58 254 58 52 17.5 66 3/. 16 37 55 1 5 23 70 208 0 102 1 3 . 5 1 8 130 76 160 71 296 80 65 21.5 80 4D 56.5 1 5 25 80 226 0 1 6 1 3 . 5 1 8 1 5 0 92 180 3 1 5 80 65 2 1 . 5 81 $eries CLA lllmensio Rear Flange Type/CLAG with Rod Boot tvt14x1.5 M 1 8 X 1 . 5 rv18x1.5 M22)r.1.5 t\426X1.5 I n 2 0 27 ,/. 42 I I 20 45 153 8 60 9 1 2 80 42 100 5 1 2 1

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

Metric size Inch size 100 200 205 300 400 M5 standard 3.2 1/8 standard 23 04 06 08 10 12 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 1/4 standard 4 6 8 10 12 3/8 standard 1/2 standard With One-touch fittings Use 1/8" tube.

VQ20/30

310.5 266.8 241 231 261.5 273 229.8 204 194 225 235.5 192.8 167 157 187.5 198 155.8 130 120 150 160.5 118.8 93 83 112.5 123 81.8 56 46 75 85.5 44.8 17-2-91 Series VQ20/30 Single Unit Option Bracket assembly (with 2 mounting screws) For fixing this solenoid valve.

Rotary Actuator/Vane Style Series CRB1

mm) G: Lead wire length 300mm M: With lead wire (Wire length: 300 mm) D: With connector C: Locking C type (Manual) Light/surge voltage suppressor Nil S Z (1) Without light/surge voltage suppressor With surge voltage suppressor With light/surge voltage suppressor Note 1) GZ, HZ and DOZ are not available.

High Power Cylinder Series RHC

Solenoid valve ( ): Effective area [mm2] : Metal seal Speed controller D 36 to 45 E 64.8 to 67 F 102.6 to 120 G 180 to 300 C 16.2 to 21.6 Composed effective area (mm2) 2 Standard type 1 With One-touch fittings Elbow type 1-A Refer to System Selection table, and the appropriate solenoid valve, speed control valve and bore size may be selected.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Note 2) When compressor discharge concentration is 30mg/Nm Specifications Models Model AMG150 AMG250 Drain Catch Series AMG Compressed air 1.0MPa (145psi) Fluid Maximum operating pressure Rated flow rate Note) l/min (ANR) 300 750 Note) 0.05MPa (7psi) Min. operating pressure Proof pressure The AMG series is installed in air pressure lines to remove water droplets from compressed air.

High Power Cylinder Series RHC

Speed controller Maximum cylinder speed mm/s Composite effective area mm C group 16.2 to 21.6 VQ2000 (16.2) SY7000 (21.6) SX7000 (21.6) D group 36 to 45 VQ4000 (36.0) VQ4000 (39.6) VFR3000 (41.4) VFS3000 (36.0) E group 64.8 to 67 G group 180 to 300 VFR6000 (191) VFS6000 (180) VP70 (300) F group 102.6 to 120 2 Standard type 1 With One-touch fitting Select solenoid valves, speed control

Suction Filter with Case FH99 Series

170 150 268 180 80 120 106.4 61.9 61.9 106.4 21.5 10 21.5 3B 3 1/2B M16 x 2 Thread depth 30 M16 x 2 Thread depth 30 280 145 140 273 210 80 120 130 78 78 130 20 5 20 4B Weight (kg) S T U V W X Model Threaded without flange With flange FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 23 M8 x 1.25 Thread depth 8 35 6 84 180 2.4 3.4 28 35 M8 x 1.25 Thread

CE2

To use the system in a magnetic field that exceeds this value, use a magnetic material to shield the sensor unit. 63 50 50 40 40 YES 100 200 300 400 500 100 200 300 400 500 NO Does the mounted load exceed the load given in the diagram? Piston speed (mm/s) Horizontal mounting Piston speed (mm/s) Vertical mounting Selection O.K.

High Vacuum Angle Valve

800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.

Stability of suction position,

Qmax 55.5 C = Qmax: Max. suction flow rate [L/min (ANR)] C: Conductance [dm3/(sbar)] 397 Model Selection Vacuum Equipment Selection Example 7 P Transfer of Semiconductor Chips Selection conditions: (1) Workpiece: Semiconductor chips Dimensions: 8 mm x 8 mm x 1 mm, Mass: 1 g (2) Vacuum piping length: 1 m (3) Adsorption response time: 300 msec or less 1.