Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: S (-90 kPa), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8), Accessories: N (w/o Bracket, w/o Silencer)

Nozzle Diameter: 05 (ø0.5mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8)

Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: S (-90 kPa), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8)

Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8)

Nozzle Diameter: 05 (ø0.5mm), Vacuum Pressure: S (-90 kPa), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8)

Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8), Accessories: N (w/o Bracket, w/o Silencer)

Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: S (-90 kPa), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8), Accessories: N (w/o Bracket, w/o Silencer)

Nozzle Diameter: 05 (ø0.5mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N01 (Screw-in NPT 1/8), VAC: N01 (Screw-in NPT 1/8), EXH: N01 (Screw-in NPT 1/8), Accessories: N (w/o Bracket, w/o Silencer)

This is a legacy product, and replaced byZH05DSA-N01-N01-N01, VACUUM EJECTOR, 1/8 SUP, VACUUM SERIES, ZH VACUUM EJECTOR, AD, ZH NOZZLE SIZE 0.5, .10582 lb

MY2

Note 2) Refer to page 28 for lead wire length.

2/3 Port Valve

L 108 117 130 135 N 93 102 N 79.5 87.5 1 4 3 8 , 50 63 80 90 35 35 40 40 52 60 68 73 25.5 33 41 44 11 14 18 21 6 7 7 7 89 97 112 117 25 25 28 28 67 75 87 92 40 52 65 70 7.5 8.5 9 9 22 28 36 42 5.5 6.5 6.5 6.5 24 33 42 47 1.6 2.3 2.6 2.6 26 30 38 43 14 17 22 22 23 23 25.5 25.5 28 35 43 45 1 2 3 4 1 101.5 115.5 106.5 120.5 4.1-82 VXZ22/23 Conduit: C FN.C.E Normally closed EN.O.F Normally open

ZX

(For replacement) ZY Phillips screw (M2.5 x 28) Blanking plate assembly ZQ How to order (1) Valve unit (Supply valve: N.C.)

Speed Controller with Indicator

Number of pages increased from 12 to 28. SR Universal type added. Indicator window direction: 90 and 270 added. Number of pages increased from 28 to 36. TZ Edition B Edition C Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.

51

28 28 30 36 46 43.4 48 59.4 71.4 86 105.4 CS1 Up to 300 Up to 300 Up to 300 CS2 Up to 300 Up to 300 Use a thin wrench when tightening the piston rod.

SMC Pneumatic Clean Series

Application Relay, PLC Relay, PLC 24 VDC relay, PLC 24 VDC relay, PLC IC circuit, Relay, PLC IC circuit, Relay, PLC Type Load voltage 24 VDC, 100 VAC 24 VDC, 100 VAC, 200 VAC 24 VDC (10 to 28 VDC) 24 VDC (10 to 28 VDC) 28 VDC or less 28 VDC or less Load current range Indicator light Auto switch part no.

MHZ

Weight (g) End boss type (Symbol) Model H E M K MHZA2-6 28 28 28 28 MHZAJ2-6 29 29 29 29 12-2-24 24 Parallel Style Air Gripper Standard Type Series MHZ2 Size: 6, 10, 16, 20, 25, 32, 40 How to Order MHZ 6 MHZ2 D 6 M9B MHF MHL Number of auto switches Number of fingers 2 2 fingers Nil S 2 pcs. 1 pc.

CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

MHZ

Weight (g) End boss type (Symbol) Model H E M K MHZA2-6 28 28 28 28 MHZAJ2-6 29 29 29 29 12-2-24 24 Parallel Style Air Gripper Standard Type Series MHZ2 Size: 6, 10, 16, 20, 25, 32, 40 How to Order MHZ 6 MHZ2 D 6 M9B MHF MHL Number of auto switches Number of fingers 2 2 fingers Nil S 2 pcs. 1 pc.

VFS

x n + 47 L2 = 28 x n + 56 3 131 140 4 159 168 5 187 196 6 215 224 7 243 252 8 271 280 9 299 308 10 327 336 L L1 L2 L3 (MP) 278 306 334 362 390 418 446 474 L3 = 28 x n + 194 1(P), 3(R2), 5(R1) port L3 (AP) 319.5 347.5 375.5 403.5 431.5 459.5 487.5 515.5 L3 = 28 x n + 235.5 3-8-48 49 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VFS2000 Manifold Specifications

VQZ1000/2000/3000

(The standard valve has an individual exhaust for the pilot valve.) 2-7-27 28 28 Series VQZ Replacement Parts Body Ported One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size Model VQZ1000/2000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VQZ3000 VVQ1000-51A-C6 VVQ1000-51A-C8 VVQ1000-51A-C10 Note) Purchasing order is available in units of 10 pieces.