5 Port Solenoid Valve Series VQZ1000/2000/3000

VQZ1000 VQZ2000 VQZ3000 Symbol Port size (A) 4 (A) 4 (B) 2 3 9 Nil Without sub-plate Rc 1/8 Rc 1/4 Rc 3/8 01 02 03 1 (P) 3 (R2) 5 (R1) 1 (P) 5 (R1) 3 position exhaust center (A) 4 (B) 2 Note) For inch sizes, refer to page 966. 4 5 (R1) 1 (P) 3 (R2) Electrical entry G: Grommet (DC specification) L: L-type plug connector with lead wire LO: L-type plug connector without connector M: M-type plug

0.4

B A B A B A B A B A A LERR.

Proposals for Energy Saving

(A) 2 L: L type (VQ20 only) 1 Directional Control Equipment 1 (P) Note) Consult SMC for N.O. type. Note) Specify "LF" for L type with bracket.

0.4

L7 L6 L5 VV5Q11 (L1) 28 (n-1) x 10.5 1.5 A FG + + 0V 24V SMC S E R I A L U N I T MODEL SC (SI No.EX120-STA1) 2 93.5 66 64 ERR T/R RUN 0 1 DIP SW. Drawing shows a SC case.

Compact 5-Port Solenoid Valve

formula for L dimensions (Station n) (Station 1) L = 16 x n + 41.5 n: Manifold stations 86.7 D D 75.7 73.2 E 3/5 3/5 E S 2 B 2 B 2 B 2 B 2 B 1 P P 1 A 4 A 4 A 4 A 4 A 4 * These figures show the JJ5SY5-10F2-05DR-C12.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

A A A A SX 27.6 (GZ, GS: 28.3) [29.3] VK 4-Rc(PT)1/8 (P, R port) (Lead wire length) P=16 (Pitch) 13.5 G: 300 H: 600 VZ L2 4.5 L1 VF Built-in speed controller VFR (Non-locking) Manual override VP7 54 [60.5] VP4 5.5 47.5 41.6 A A 35 MAX: 13.5 18.5 24 B B 13 5.5 2n-M5 X 0.8 (A, B port) VQ (Pitch) P=16 VQ4 VQZ [ ] for AC VQD L plug connector (L) M plug connector (M) VZS VFS VS 107 0.6 0.6

Compact Manifold Regulator Series ARM5

Construction (Individual Supply Type Regulator Block) P U S H OUT IN L O C K A A A-A Component Parts Replacement Parts Material Material Part no. Description No. Description No.

ZP

Thus, if the leakage volume is 30 L/min (ANR) the L type can attain a higher vacuum pressure, and if the leakage volume is 5 L/min (ANR), the S type can attain a higher vacuum pressure.

15

Change the speed setting to a speed that does not cause vibration. Body fixed A L Model Screw size Max. tightening torque [Nm] A [mm] L [mm] LEFl25 M4 1.5 4.5 24 LEFl32 M5 3.0 5.5 30 LEFl40 M6 5.2 6.6 31 Maintenance Warning Maintenance frequency Perform maintenance according to the table below.

A

I f a p re s s u re g re a t e r t h a n t h e s e t p re s s u re i s re a c h e d , t h e u n i t w i l l o p e n , c l o s i n g w h e n p re s s u re i s l e s s t h a n s e t pressure.

ZP

a ZQ sl or an l f ea te d ZF id wo pe rk ZP ty su nt ZCU oi rf ac l j AMJ al e s B Misc.

Table of Contents

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 2 Cuts air consumption by operating the return stroke at a reduced pressure.

Step Motor Controller

Shield Brown Black Red Black Orange Black 12 13 7 6 9 8 3 Vcc GND A A B B B-4 A-4 B-5 A-5 B-6 A-6 I/O cable LEC CN5 1 Controller side PLC side (Terminal no.) (8.9) B1 A1 A1 Cable length (L) [m] 1 3 5 A13 B1 (22.4) 1.5 3 5 (14.4) L B13 B13 A13 Dot color Dot mark Insulation color Connector pin No.

o

(H) : NVJ3340O-OiiOO.Ms NVJ34400-OMOO-M5 NVJ35400-OMOO-M5 L Type Plug Connec{or (L) : NVJ3340O-OLOO-M5 NVJ34400-OLOO-M5 NVJ35400-OLOO-M5 0.37 (22) 012 (3) @ Tupe 2O Manifold: Top Ported/NVV5J3-20,@ inch(mm) Grommet (G) , (H) M3X0.5 2n a a : I ;l q L l5i < F : 10-32 Nom (M5) 6 ports ManualOperator ,,, ', L Type Plug Connector (L) r a r . l r a & r M Type Plug Connector(M) (5) .a e q 2.03

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(H) : NVJ3340O-OiiOO.Ms NVJ34400-OMOO-M5 NVJ35400-OMOO-M5 L Type Plug Connec{or (L) : NVJ3340O-OLOO-M5 NVJ34400-OLOO-M5 NVJ35400-OLOO-M5 0.37 (22) 012 (3) @ Tupe 2O Manifold: Top Ported/NVV5J3-20,@ inch(mm) Grommet (G) , (H) M3X0.5 2n a a : I ;l q L l5i < F : 10-32 Nom (M5) 6 ports ManualOperator ,,, ', L Type Plug Connector (L) r a r . l r a & r M Type Plug Connector(M) (5) .a e q 2.03

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Nolel Avalable w1h o20 a a o a a a a a a a a a a a a a a a a a MGPE@H@tr{TN I-EE I I l I I I l t I I I O .A a!)

3

Sensor Flow range 0.5 L/min 2 L/min 5 L/min 20 L/min 40 L/min 250 L/min 140 L/min 100 L/min 350 L/min 0.5 L/min 4 L/min PF3W704 PF3W504 0.35 L/min 5.5 L/min 5.5 L/min 0.35 L/min 2 L/min 16 L/min PF3W720 PF3W520 1.7 L/min 1.7 L/min 22 L/min 22 L/min 5 L/min 40 L/min PF3W740 PF3W540 3.5 L/min 3.5 L/min 55 L/min 55 L/min 10 L/min 100 L/min PF3W711 PF3W511 7 L/min 7 L/min 140 L/min 140 L/min

Basic type / Direct mount type Series CY3B/CY3R

Yaw moment M3 = W (L A) Roll moment M2 = W L (mm) Model CY1H10 CY1H15 CY1H20 CY1H25 CY1HT25 CY1HT32 A 15 17.5 19.5 23.5 0 L L A L M2 M1 0 M3 Since there are 2 guides, the guides central axis and the cylinders central axis are the same.

Digital Flow Switch ( compatible)

data) a: Inclination b: Intercept [Inclination and intercept to the unit specification] Series Unit Flow range Inclination a Intercept b 4 L 0.125 0 L/min 16 L 0.25 0 40 L 0.5 0 PF2MC7 4 L 0.004415 0 cfm 16 L 0.0088275 0 40 L 0.0176575 0 [Calculation example] (1) Conversion from the process data to the flow measurement value (For PF2MC7 series, unit L/min, flow range 1000 L and PD = 2500

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(H) : NVJ3340O-OiiOO.Ms NVJ34400-OMOO-M5 NVJ35400-OMOO-M5 L Type Plug Connec{or (L) : NVJ3340O-OLOO-M5 NVJ34400-OLOO-M5 NVJ35400-OLOO-M5 0.37 (22) 012 (3) @ Tupe 2O Manifold: Top Ported/NVV5J3-20,@ inch(mm) Grommet (G) , (H) M3X0.5 2n a a : I ;l q L l5i < F : 10-32 Nom (M5) 6 ports ManualOperator ,,, ', L Type Plug Connector (L) r a r . l r a & r M Type Plug Connector(M) (5) .a e q 2.03