VZ5000

4(A), 2(B) port Flow Characteristics Port size Manifold C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) 1(P), 5/3(R) port 2(B), 4(A) port VV5Z5-40 VV5Z5-41 VV5Z5-42-C6 VV5Z5-42-C8 1/8 1/8 C6 C8 0.59 0.55 0.52 0.53 0.23 0.30 0.23 0.26 2.5 2.2 2.2 2.2 0.51 0.50 0.38 0.46 0.28 0.30 0.32 0.24 2.1 2.0 1.5 1.9 1/4 1/4 1/4 1/4 VZ54 Note) Value at

HRX-OM-I051

of Model Label . 1-7 1.5 Safety Measures . 1-8 1.5.1 Safety Precautions . 1-8 1.5.2 Safety Interlock system . 1-9 1.5.3 Lockout/Tagout . 1-10 1.5.4 Protective equipment . 1-12 1.6 Emergency Measures. 1-13 1.6.1 Emergency off [EMO] switch . 1-13 1.7 Waste Disposal . 1-15 1.7.1 Disposal of refrigerant and compressor oil. 1-15 1.7.2 Circulating fluid disposal. 1-16 1.7.3 System disposal . 1

Mini Free Mount Cylinder

(Compared with the CU series cylinders, double acting, without magnet) CU Dimensions (Without Magnet) (mm) CUJ Bore size (mm) A(a) B(b) C(c) 4 6 8 10 12 16 20 10 ( ) 13 (13) 13 ( ) 13.5 (15) 17 ( ) 21 (20) 25 (26) 15 ( ) 19 (22) 21 ( ) 22 (24) 26.5 ( ) 29.5 (32) 36 (40) 13 ( ) 13 (33) 13 ( ) 13 (36) 15.5 ( ) 16.5 (30) 19.5 (36) b B c + Stroke C + Stroke A ( ): Dimensions of the CU series

MU

depth 7.5 M5 x 0.8 depth 11 M6 x 1 depth 12 M6 x 1 depth 11 M8 x 1.25 depth 13 M8 x 1.25 depth 11 M10 x 1.5 depth 14.5 M10 x 1.5 depth 15 M12 x 1.75 depth 18 M12 x 1.75 depth 15 Rod End Female Thread (mm) (mm) MM M6 x 1 depth 12 M8 x 1.25 depth 13 M8 x 1.25 depth 13 M10 x 1.5 depth 15 M10 x 1.5 depth 15 H 14 14 15 18 21 ZZ 96 103 115 137 141 S 60 63 70 84 85 NY 26 28 36 42 46 NX 6 6.5 8

MU

depth 7.5 M5 x 0.8 depth 11 M6 x 1 depth 12 M6 x 1 depth 11 M8 x 1.25 depth 13 M8 x 1.25 depth 11 M10 x 1.5 depth 14.5 M10 x 1.5 depth 15 M12 x 1.75 depth 18 M12 x 1.75 depth 15 Rod End Female Thread (mm) (mm) MM M6 x 1 depth 12 M8 x 1.25 depth 13 M8 x 1.25 depth 13 M10 x 1.5 depth 15 M10 x 1.5 depth 15 H 14 14 15 18 21 ZZ 96 103 115 137 141 S 60 63 70 84 85 NY 26 28 36 42 46 NX 6 6.5 8

IDX-OM-W022

. 13 1 13 3 Remote operation . 13 2 13 4 How to connect the power and signal cable . 13 2 13 5 How to re-start the operation . 13 3 13 6 Electric circuit . 13 4 Chapter 14 Specification for Option V 14 1 Safety instructions . 14 1 14 2 Specifications . 14 1 14 3 How to perform maintenance . 14 2 14 4 Electric circuit . 14 2 Chapter 14 Service Record 15 1 Service Record . 15 1 Table of Contents

Speed Controller with Indicator

Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FS-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FS-01-03 (S) 5/32" 8.2 AS221FS-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FS-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FS-02-01 (S) 1/8" 1/8 13 (12.7) 7.2 20.9

JXCx-OMY0004

Caution (1) Do not connect any device other than the specified device (JXC-W2/W2A-C, LEC-W2/W2A-C, LEC-T1).

IDX-OM-W025

3 Chapter 13 Specification for Option T 13 1 Safety instructions . 13 1 13 2 Specifications . 13 1 13 3 Remote operation . 13 1 13 4 How to connect the power supply and signal cable . 13 2 13 5 How to re-start the operation . 13 2 13 6 Electric circuit . 13 3 Chapter 14 Service Record 14 1 Service Record . 14 1 Table of Contents 2 IDX-OM-W025 Air Dryer i Safety Instructions Safety Instructions

NCA1

(3.25") 1 3/4-16 1/2-13 1 1/2 1 3/8 2 7/16 2.34 4 1/4 2 5/8 5 53/64 0 1 7/8 3 3/4 3/8-24 7/8 1/2 1 1/2 1 1/2 3.9 5/8 1 1/8 1.18 1.57 1/2 2.76 2.72 400 (4") 1 3/4-16 2 1/4 4 1/2 3/8-24 7/8 1/2 1 1/2 1 1/2 4.7 1 1/8 1.18 1.57 1/2 0 3.32 2 5/8 5 53/64 2.72 5/8 1/2-13 2 1/16 1 3/8 2 7/16 2.34 4 1/4 Double Detachable Head Side Clevis Style: NCA1D (MP2 mounting style) 4-DD P + Stroke F Y 2-EE

NCA1

/8-16 1 1/4 1 1 15/16 1.75 3 3/4 2 3/8 4 7/8 3/4 3.1 1 1/8 1 1/8 3/8 9/16 5/16-24 0 3 1 1/2 3/8 19/32 1.3 1.06 2.48 2.19 325 (3.25") 1 3/4-16 1/2-13 1 1/2 1 3/8 2 7/16 2.34 4 1/4 2 5/8 5 53/64 1 1/8 3.9 1 1/2 1 1/2 1/2 7/8 3/8-24 3 3/4 1 7/8 0 1/2 1.57 1.18 5/8 2.72 2.76 400 (4") 1 3/4-16 1 1/8 4.7 1 1/2 1 1/2 1/2 7/8 3/8-24 4 1/2 2 1/4 0 1/2 1.57 1.18 5/8 1/2-13 2 1/16 1 3/8 2 7/16 2.34

energy saving effect

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 70 x 4.186 x 103 x 4.0 60 = = qm x C x (T2 T1) 860 Q = = 19535 [J/s] 19535 [W] = 19.5 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 19.5 [kW] x 1.2 = 23.4 [kW] 1 x 70 x 60 x 1.0 x 103 x 4.0 860 = Thermo-chiller T1: Outlet temperature Q: Heat generation amount 1680 [cal/h] 860 Users equipment = T = T2 T1

Compact Cylinder

4 pcs. 20 OA (4 positions) (The same four-place size) K 2 x 4 x RA (RB) M L B + Stroke E A + Stroke 25 Width across flats K M: Rod end male thread D H Hexagon width across flats B1 Rod end nut H1 C X L1 Rod End Male Thread (mm) Bore size (mm) B1 C D H H1 K L1 X 13 13 5 5 14 14 10 12 M8 x 1.25 M8 x 1.25 8 10 22 22 16 16 20 25 Basic Style (mm) Bore size (mm) A B C D E F H I K L M N OA OB Q

TABLE OF CONTENTS

O 5/32 P 3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 D No Option Ports T Metering (1/32 1/8 orif.)

IDX-OM-W023

. 10-1 10-2 . 10-2 10-3 . 10-3 10-4 . 10-3 11 R 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 12 S 12-1 . 12-1 12-2 . 12-2 12-3 . 12-2 2 13 T 13-1 . 13-1 13-2 . 13-1 13-3 . 13-1 13-4 . 13-2 13-5 . 13-3 14 V 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 15 15-1 . 15-1 3 IDX-OM-W023 i i i-1 () 3 i 1 1 3 IDU Series i-1 i-1 IDX-OM-W023 i

Fluoropolymer Piping Equipment

Class Class No. 1 1 2 2 2 2 2 2 3 3 3 3 3 3 3 3 3 3 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1 2 1 2 C 3 4 F 1 2 3 4 5 6 7 E 9 10 1 2 3 4 5 6 F 9 1 2 3 4 5 7 8 9 1 2 3 4 5 6 1/8" A A B C D E F A B C D E F A B C D E F G A B C D E F G H A B C D E F 1 2 2 2 2 2 2 3 3 3 3 3 3 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1/8" 1/8" 1/8" Branch tee female Run tee male Run tee female 1/4" A A 1/4

Fieldbus System

Note 4) Not applicable for dual 3-port valves 2-position double (Rubber) 4-position dual 3-port valve (C) 2(B) 4(A) 2(B) (A)4 C: Locking type (Manual) Note) C (R1)5 1 (P) 3(R2) 1(P) 5(R1) 3(R2) N.C. N.O.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

Cylinder series Applicable bore size (mm) 10 16 20 25 32 40 50 63 6 BJ2-006 BJ3-1 CDJ2 BJ2-010 BJ3-1 BJ2-016 BJ3-1 CDVJ3/5, CDJ2X CDBJ2, CDLJ2 CDM2, CDBM2 CDM2X, CDM2Y CDLM2, CDVM3/5 CDG1, CDBG1 CDG1Y, MGG RHC MGC CDLG1, CDNG MLGC, REC CKG1 BM2-020 BJ3-1 BM2-032 BJ3-1 BM2-025 BJ3-1 BM2-040 BJ3-1 BMA2-063 BJ3-1 BMA2-050 BJ3-1 BMA2-020 BJ3-1 BMA2-032 BJ3-1 BMA2-025 BJ3-1 BMA2-040 BJ3-1 BMA2

51

MB1 CA2 CS1 CS2 a (1) BJ-1 is a set of a and b. BJ4-1 (Switch bracket: White) BJ5-1 (Switch bracket: Transparent) (2) BMA2-A(S) is a set of c and d. Band (c) is mounted so that the projected part is on the internal side (contact side with the tube).

Micro Mechanical Valve Series VM1000

(R) 1 (P) Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 13 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)