CM2

mounting rail style 75 + 55 (n 2) n 2 2 -XC18 20 + 50 ( ) (n = 2, 4, 6) NPT finish piping port D-B59W 75 20 15 -XC20 Head cover axial port D-A3A D-G39A D-K39A D-A44A -XC22 Fluoro rubber seals -XC25 35 + 30 (n 2) 100 + 100 (n 2) 100 35 10 No fixed orifice of connecting port -XC27 Double clevis pin and double knuckle pin made of stainless steel -XC29 Double knuckle joint with spring pin -XC35

70astamb1

-XC35 With coil scraper -X846 Fastener strips mounted on switch mounting grooves Bore size (mm) 32 40 50 63 80 100 (1) MB-L03 MB-L04 MB-L05 MB-L06 MB-L08 MB-L10 Foot MB-F04 MB-F05 MB-F06 MB-F08 MB-F10 MB-F03 Flange Single clevis MB-C03 MB-C04 MB-C05 MB-C06 MB-C08 MB-C10 Double clevis MB-D03 MB-D04 MB-D05 MB-D06 MB-D08 MB-D10 Note 1) Order two foot brackets per cylinder.

MG

-XC6 Piston rod and rod end nut made of stainless steel -XC8 Adjustable stroke cylinder/Adjustable extension type Theoretical Output -XC9 Adjustable stroke cylinder/Adjustable extension type -XC22 Fluoro rubber seals OUT IN -XC35 With coil scraper (N) -XC69 With shock absorber Rod size (mm) Operating direction Piston area (mm2) Operating pressure (MPa) Bore size (mm) -XC79 Machining tapped

Environment options include the XC6 stainless steel piston rod, XC22 fluoro-rubber seals, XC35 coil scraper, and X130US stainless steel parts: piston rod, tie rod, tie rod nut, cushion valve needle.

Environment options include the XC6 stainless steel piston rod, XC22 fluoro-rubber seals, XC35 coil scraper, and X130US stainless steel parts: piston rod, tie rod, tie rod nut, cushion valve needle.

Environment options include the XC6 stainless steel piston rod, XC22 fluoro-rubber seals, XC35 coil scraper, and X130US stainless steel parts: piston rod, tie rod, tie rod nut, cushion valve needle.

Environment options include the XC6 stainless steel piston rod, XC22 fluoro-rubber seals, XC35 coil scraper, and X130US stainless steel parts: piston rod, tie rod, tie rod nut, cushion valve needle.

Electric Actuators

m (kg) 1000 a = 1000 to 3000 L2 500 Mer m 5 10 0 Transfer load m (kg) a 1000 Mey a = 1000 to 3000 500 m L3 5 10 0 Transfer load m (kg) Refer to page 304 for deflection data. 268 5 Phase Stepper Motor/Without Motor Brake Series LXS Dimensions/LXSH5BD Scale: 25% F G x I +0.030 0 depth 5 +0.030 0 depth 5 5H9 D-5.1 through Refer to Cross section C-C, bottom view.

Table of Contents

0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 2 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area

Compact 5-Port Solenoid Valve

Can be connected with the ZK2 series vacuum unit p. 7 JSY3000 JSY3000 Ejector System JSY1000 JSY5000 Vacuum Unit ZK2 JSY1000/3000/5000 Series CAT.ES11-110B a Plug-in Compact 5-Port Solenoid Valve JSY1000/3000/5000 Series Series Map JSY1000 JSY3000 JSY5000 Valve width 39% reduction 36% reduction 35% reduction 6.4 mm b 10 mm 10 mm b 15.5 mm 15 mm b 24.6 mm 29% reduction 32% reduction 59% reduction

LJ1H

0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 2 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area

5 Port Solenoid Valve Series VQZ1000/2000/3000

Note) VQZ2000/3000 DIN terminal rubber seal only (except external pilot). For details on IP65 enclosure, refer to page 966.

7.5

With linkage printed circuit board 27 Series SJ2000/3000 Manifold Electrical Wiring Type 60G: Flat ribbon cable (20 pins, PC wiring with power supply terminal) Terminal no.

AC Servo Motor Driver (Pulse input type/Positioning type ）

Also, if power is switched on at the servo motor speed of 3000 r/min or higher, position mismatch may occur due to external force or the like.

Electric Actuator with Integrated Guide

Model Allowable Moment (Nm) Allowable dynamic moment Model Mounting orientation Load movement direction LTF6 200 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a Mep L1 (mm) Pitching 100 m a=1000 a=2000 a=3000 L1 30 20 10 0 Transfer load m (kg) L2 200 a=1000 a=2000 a=3000 Mer L2 (mm) Rolling Yawing 100 m L2 Mer 30 20 10 0 m Transfer load m (kg) 200 a=1000 a=2000 a=3000 L3 (mm) 100

LJ1H

0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 2 3 Standard Motor/Horizontal Mount Specification Series LJ1H10 Dimensions/LJ1H101PB Scale: 15% 10 6 Work piece mounting reference plane

ITV

to Series ITV1000/2000/3000 are standardized.

Step Motor Driver （ Pulse input type ）

3000 3000 3000 3000 3000 Step data default Deceleration 3000 3000 3000 3000 3000 3000 Pushing force 50 50 50 50 50 50 Trigger LV 50 50 50 50 50 50 Pushing speed 20 30 20 30 20 30 Moving force 100 100 100 100 100 100 Area1 0.00 0.00 0.00 0.00 0.00 0.00 Area2 0.00 0.00 0.00 0.00 0.00 0.00 In position 0.50 0.50 0.50 0.50 0.50 0.50 102 - LER Basic parameter default Model LER10K LER10J LER30K

Integrated Controller

1000 1200 1400 3000 mm/s2 2 Work load: W [kg] Work load: W [kg] 3000 mm/s2 1.5 1 0.5 5000 mm/s2 10 mm/s2 0 1400 200 400 600 800 1000 1200 0 Speed: V [mm/s] Speed: V [mm/s] EQFS25HA/Ball Screw Drive Horizontal/Lead 12 Vertical/Lead 12 35 9 8 7 6 5 4 3 2 1 0 3000 mm/s2 30 Work load: W [kg] Work load: W [kg] 3000 mm/s2 25 20 15 10 10 mm/s2 5000 mm/s2 5 0 0 0 Speed: V [mm/s] 100 200 300 400

Electric Actuator/Slider Type

T1 = V/a1 = 300/3000 = 0.1 [s], a1 a2 T3 = V/a2 = 300/3000 = 0.1 [s] T = T1 + T2 + T3 + T4 [s] Time [s] T2 = L 0.5V(T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.