IZx-OMT0049

n(pc.)

MY1

When exceeding the air cushion stroke ranges shown on page 28, the piston speed should be 100 to 200mm/s. 1500 Max. operating frequency (cycle/min) 70 45 25 80 Extended 4.22 6.86 8.34 1.96 Spring force (N) Note 2) The piston speed is 100 to 1000mm/s for centralized piping.

CRQ2

io n ge io at of at ot ot R an R e n r ng tio ra ta n Ro io at ot R Unit Used as Flange Mount The L dimensions of this unit are shown in the table below.

Digital Flow Switch (Integrated display type) ( compatible)

PD intercept b F32 N 2012 0x07DC 0 R Temp. peak value S16 0 N 0xFF9C to 0x044C (-100 to 1100) Can be displayed only when a temperature sensor is connected. 2013 0x07DD 0 R Temp. bottom value S16 0 N Accumulated PDAccumulated value conversion factor = Current accumulated flow value 2021 0x07E5 0 R Accumulated PD U16 0 N 0x0 to 0x270F (0 to 9) -82No.PF-OMW0010-D 1: "R" means Read and "W" means

2 Phase Stepper Motor/Without Motor Brake Series LXP

Allowable lateral load (F) Allowable plate rotation torque (T) Load (N) Torque (Nm) Stroke 50 75 100 125 150 175 200 Stroke 50 75 100 125 150 175 200 L L 42 2.87 m m 42 2.47 40 2.17 42 2.38 32 2.16 24 1.98 17 1.82 50 to 200mm stroke F T 10 Load weight m (kg) F 125 to 200mm stroke Plate non-rotating accuracy () 50 to 100mm stroke Non-rotating accuracy () 0.09 1 + 0.1 10 50 100 Eccentric distance

MK

RS Q G Theoretical Output Rotary Angle (N) RS H A Operating pressure (MPa) Piston area (cm2) Bore size (mm) Rod size (mm) Operating direction 1.0 0.7 0.5 0.3 RZQ Release (Extended stroke end) 80 to 100 (90 10) Counterclockwise (L) Release (Extended stroke end) 80 to 100 (90 10) Clockwise (R) 80 56 40 24 0.8 R 12 6 110 77 55 33 1.1 H MI W S 150 105 75 45 1.5 R 16 8 200 140 100 60 2 H CEP1

Programless controller Step motor (servo 24 VDC)

LES8 / LESH8 LES16 / LESH16 LES25 / LESH25 J K J K J K Low 4 6 15 23.5 43 77 Pushing force [N] Middle 7 10.5 25 39 71.5 128.5 High 10 15 35 55 100 180 Pushing force accuracy is 20%F.S. Refer to the operation manual of the electric actuator for details.

4-channel Flow Monitor ( compatible)

) 0x1F88 (8072) 1 R Rated range lower limit N S16 2 R Rated range upper limit N S16 3 R Measurable range lower limit N S16 0x1F9A (8090) 0x1F9B (8091) 0x1F9C (8092) 0x1F9D (8093) 4 R Measurable range upper limit N S16 5 R Settable range lower limit N S16 6 R Settable range upper limit N S16 1: "R" means Read and "W" means Write.

energy saving effect

HRS 100/150 HRSH 090 The product will be delivered in the packaging shown below.

240

force [%] Duty ratio [%] Continuous pushing time [minute] 70 100 LEY -X5 80 70 10 11LEFS 100 50 5 11LEJS LEPY10 (Basic) LEPY10L (Compact) 25A50 60 LEC 50 LEC S 40 Lead 5 (LEPY10K) Lead 5 (LEPY10LK) LEC SS-T 40 30 Force [N] Force [N] LEC Y 30 20 Motorless Lead 10 (LEPY10J) Lead 10 (LEPY10LJ) 20 10 LAT 10 LZ 0 0 60% 70% 80% 90% 100% 50% 60% 70% 80% 90% 100% LC3F2 Set value of pushing force

PFxx-OMY0005

(Page 77) 8200 0x2008 0 R Temperature PD conversion equation: a F32 N 8210 0x2012 0 R Temperature PD conversion equation: b F32 N 8220 0x201C 0 R Flow peak value S16 N 0xFF9C to 0x0258 (-100 to 600) 8230 0x2026 0 R Flow bottom value S16 N 8400 0x20D0 0 R Pressure PD conversion equation: a F32 N Refer to "Inclination and intercept to the unit specification".

MHK2

-25S/C 0.49 MHKL2-25S MHKL2-25C M: Allowable moment (M = WL) 100 100 W 80 80 Gripping force (N) Gripping force (N) M Pressure 0.6 MPa Pressure 0.6 MPa 60 60 Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 0.5 MPa 40 40 L 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0 0 20 40 60 80 100 20 40 60 80 100 Gripping point L (mm) Gripping point L (mm) 12-6-11 11 Series MHK2 Dimensions MHK2-12: Standard type 9

MHK2

-25S/C 0.49 MHKL2-25S MHKL2-25C M: Allowable moment (M = WL) 100 100 W 80 80 Gripping force (N) Gripping force (N) M Pressure 0.6 MPa Pressure 0.6 MPa 60 60 Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 0.5 MPa 40 40 L 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0 0 20 40 60 80 100 20 40 60 80 100 Gripping point L (mm) Gripping point L (mm) 12-6-11 11 Series MHK2 Dimensions MHK2-12: Standard type 9

Wedge Cam Operation Slide Guide Series MHK2 Air Gripper/2-Finger Type ø12, ø16, ø20, ø25

point L (mm) Gripping point L (mm) W MHK2-25S MHK2-25C M 100 100 Gripping force (N) Gripping force (N) 80 80 Pressure 0.6 MPa L Pressure 0.6 MPa 60 60 0.5 MPa 0.5 MPa 0.4 MPa 40 40 0.4 MPa 0.3 MPa 0.3 MPa 20 20 0 0 20 40 60 80 100 20 40 60 80 100 Gripping point L (mm) Gripping point L (mm) 528 Series MHK2 Wedge Cam Operation Slide Guide Air Gripper/2-Finger Type Effective Gripping Force:

Low Friction Cylinders Series MQ

load W(N) 5 40 4 30 30 30 3 25 25 20 2 20 20 16 10 16 1 10 10 100 75 60 30 100 75 60 30 Stroke (mm) Stroke (mm) Note 1) The indicated allowable lateral load at the rod end is for the rod end female thread.

ZPT/ZPX

121 12 ZPT125HBNJ25-B01-A22 50-B01-A22 75-B01-A22 100-B01-A22 +7 +228 22 How to Order ZPT 40 HB N J 25 B01 A18 Mounting thread Pad diameter (mm) 40 50 63 80 100 125 M18 x 1.5 (40 to 80) 40 A18 50 M22 x 1.5 (100, 125) A22 63 80 Vacuum entry 100 B01 Rc 1/8 125 Applicable buffer stroke (Rotating) HB Pad type Material 40 50 63 80 100 125 Stroke 25 50 75 100 Large bellows pad N S U F E NBR Spring

Aluminum High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

Wedge Cam Operation Provides

-25C M 100 100 80 80 Holding force (N) Holding force (N) Pressure 0.6MPa L Pressure 0.6MPa 60 60 0.5MPa 0.5MPa 0.4MPa 40 40 0.4MPa 0.3MPa 0.3MPa 20 20 0 0 20 40 60 80 100 20 40 60 80 100 Holding point L(mm) Holding point L(mm) 2.4-10 Series MHK2 Wedge Cam Operation Slide Guide Air Gripper (2 Finger) Effective Holding Force: Series MHKL2 Single acting Indication of effective holding force

Wedge Cam Operation Gripper Series MHK2

30 0.4MPa 0.4MPa 30 0.3MPa 20 0.3MPa 20 10 10 0.2MPa 0.2MPa 0 0 20 40 60 80 20 40 60 80 Holding point L mm Holding point L mm MHK2-25D MHK2-25D 100 120 Pressure 0.6MPa 80 100 Pressure 0.6MPa Holding force N Holding force N 0.5MPa 80 60 0.5MPa 0.4MPa 60 0.4MPa 40 0.3MPa 0.3MPa 40 20 20 0.2MPa 0.2MPa 0 0 20 40 60 80 100 20 40 60 80 100 Holding point L mm Holding point L mm 14 14 14 14 14 14

MHZ2/MHZJ2

0.6MPa Gripping force N Gripping force N 30 0.5MPa 60 0.5MPa 0.4MPa 20 0.4MPa 40 L 0.3MPa 0.3MPa 10 20 0.25MPa Internal gripping 0.25MPa 0 20 40 60 80 100 0 20 40 60 80 100 MHZ2/Standard Gripping point L mm Gripping point L mm MHZ 2-25S MHZ 2-25C 140 Pressure 0.7MPa 80 120 Pressure 0.7MPa 0.6MPa 100 Gripping force N Gripping force N L 0.6MPa 60 0.5MPa 80 0.5MPa 0.4MPa MHZJ2/With dust cover