VZ3000

210.5 200 184 13.5 Stations L1 L2 L3 L4 9 223 212.5 200 11.5 10 248 237.5 216 16 2 110.5 100 88 11.5 3 135.5 125 104 16 4 148 137.5 120 14 5 160.5 150 136 12.5 6 185.5 175 152 17 7 198 187.5 168 15 C4C C6C Separation lever (Push type) VV5Z3-45FU DStation B(2 to 10 stations) C4C C6C VV5Z3-45FUStation C4C C6C VV5Z3-45FBStation (11 to 20 stations) (Pitch) (Pitch) (mm) 8 223 212.5 200 11.5 Stations

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

[4(A), 2(B) port] Applicable tubing O.D.: 3.2 : 4 : 6 Thread size: M5 L n Formula L1 = 11.5n + 67 L2 = 11.5n + 96.5 n: Stations (Max. 16 stations) Dimensions 16 251 280.5 300 310.5 15 239.5 269 300 310.5 14 228 257.5 287.5 298 13 216.5 246 275 285.5 12 205 234.5 262.5 273 11 193.5 223 250 260.5 10 182 211.5 237.5 248 9 170.5 200 225 235.5 8 159 188.5 212.5 223 7 147.5 177 200 210.5 6 136

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Station (Max. 20) Dimensions L n 2 30.5 43.5 75 85.5 18 198.5 211.5 237.5 248 19 209 222 250 260.5 20 219.5 232.5 262.5 273 13 146 159 187.5 198 14 156.5 169.5 200 210.5 15 167 180 200 210.5 16 177.5 190.5 212.5 223 17 188 201 225 235.5 10 114.5 127.5 150 160.5 11 125 138 162.5 173 12 135.5 148.5 175 185.5 5 62 75 100 110.5 6 72.5 85.5 112.5 123 7 83 96 125 135.5 8 93.5 106.5 137.5 148 9

MHZ

Model Opening/ Closing stroke (Both sides) (mm) Gripping force (1) Bore size (mm) Gripping force per finger Effective value (N) Weight (2) (g) Action Model External Internal MHZ2-6D MHZ2-10D (N) MHZ2-16D (N) MHZ2-20D (N) MHZ2-25D (N) MHZ2-32D MHZ2-40D MHZ2-6S MHZ2-10S (N) MHZ2-16S (N) MHZ2-20S (N) MHZ2-25S (N) MHZ2-32S MHZ2-40S MHZ2-6C MHZ2-10C (N) MHZ2-16C (N) MHZ2-20C (N) MHZ2-25C (N) MHZ2

MHZ

9@0@1 Seal kit MHZ2-(N) MHZ2-(N)1 MHZ2-(N)2 MHZ2-3 MHZ2-D MHZ2-S MHZ2-C MHZ2-DW MHZ2-K MHZ2-M MHZ2-E rty!1!3 Mounting screw MHZ-A1002(N)-1 MHZ-A1602(N)-1 MHZ-A2002(N)-1 MHZ-A2502(N)-1 Finger assembly MHZ-A1002(N)-2 MHZ-A1002-3 MHZ-A1602(N)-2 MHZ-A1602-3 MHZ-A2002(N)-2 MHZ-A2002-3 MHZ-A2502(N)-2 MHZ-A2502-3 MHZ-A4003 MHZ-A3203 MHZ-A1003 MHZ-A1603 MHZ-A2003 MHZ-A2503 Piston assembly wo!0!

High Vacuum Angle Valve, XL Series

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

Transfer

Stroke adjusting unit 2000 1500 Piston speed (mm/s) 1000 Air cushion Adjusting Procedure 500 400 300 Lock nut for adjusting bolt Unit holding bolt Adjusting bolt 200 Lock plate holding bolt 0.5 100 10 20 30 40 50 100 200 300 400 500 W2 max. W1 max. W3 max. Allowable load (N) Shock absorber ML2B40 Horizontal collision: P = 0.5 MPa 2.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

Mounting style Number of auto switches Nil L F G D Basic style Transaxial foot style Rod flange style Head flange style Double clevis style Nil S n 2 pcs. 1 pc. n pcs.

AS

How to Order JIS Symbol 1F 12 400 AS Applicable tubing O.D. 2 Option Body size Nil None Hexagonal lock nut Electroless nickel plated K N 100 200 205 300 400 M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard If more than one option is required, write option part numbers in the order of K, N. Applicable tubing O.D.

Parallel Style Air Gripper: Wide Type Series MHL2

-32D MHL2-32D 500 500 Pressure 0.6 MPa Pressure 0.6 MPa 300 300 Gripping force (N) Gripping force (N) Gripping force (N) Gripping force (N) Pressure 0.6 MPa Pressure 0.6 MPa 400 400 250 250 0.5 MPa 0.5 MPa 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 200 200 300 300 0.4 MPa 0.4 MPa 150 150 0.3 MPa 0.3 MPa 200 200 0.3 MPa 0.3 MPa 100 100 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MPa 100 100 50 50 0.1 MPa 0.1 MPa 0.1

HEC_001W-E

, but must be in the order F, N, L.

Hydraulic

sides n = 2, 3, 4 n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 2, 4, 6, 8 100 + 100 (n 2) 100 + 100 (n 2) n = 4, 6, 8 Same side n = 2, 3, 4 10 1 pc. 90 75 80 35 75 Different sides 80 90 55 75 Same side 80 90 35 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) 90 + 30 (n 2) Different sides D-A44 n = 2, 3, 4 n = 2, 4, 6, 8 n=2, 4, 6, 8 n = 2, 4, 6, 8 55 + 50 (n 2) 75 + 50 (n 2) 80 + 50 (n 2)

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Refer to the basic type for the female rod end. 732 1011Series CG1R-Z 20, 25, 32, 40, 50, 63 Direct Mount Cylinder How to Order 10 C D G 1 R N 25 100 Z M9BW N Type Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

CJ2X/CUX/CQSX/CQ2X/CM2X

Do not indicate suffix N for no lead wire on D-A3A/A44A/G39A/K39A models. 100 V Reed switch Solid state switch Relay, PLC 100 V, 200 V Connector 12 V Yes 2-wire 24 V PLC Terminal conduit 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector IC circuit 3-wire (NPN) 2-wire

CJ2X/CUX/CQSX/CQ2X/CM2X

Do not indicate suffix N for no lead wire on D-A3A/A44A/G39A/K39A models. 100 V Reed switch Solid state switch Relay, PLC 100 V, 200 V Connector 12 V Yes 2-wire 24 V PLC Terminal conduit 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector IC circuit 3-wire (NPN) 2-wire

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

MTS12-100 st 100 st 75 st 75 st 0.1 50 st 25 st 50 st 25 st 0 50 100 5 10 Lateral load (N) Lateral load (N) 40 16 0.3 0.3 MTS40-200 st 175 st 150 st 0.2 0.2 125 st 100 st 75 st 75 st MTS16-100 st 50 st 0.1 0.1 50 st 25 st 25 st 0 50 100 150 10 Lateral load (N) Lateral load (N) 20 0.5 Caution on Design MTS20-200 st 175 st 150 st Caution 1.

AC Servo Motor Driver (CC-Link Type)

. output 8 PT7 RY(n 2)9 Reserved RX(n 2)A RY(n 2)A Position/speed specifying system selection to Reserved RX(n 2)F selection RX(n 3)0 RY(n 2)B Absolute value/incremental value to Reserved RY(n 2)C RX(n 3)9 to Reserved RX(n 3)A Problem ALM 15 RY(n 2)F RX(n 3)B Remote station communication ready CRD RY(n 3)0 to Reserved RX(n 3)C RY(n 3)9 to Reserved RY(n 3)A Reset RES RX(n 3)F Note.

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D-A9 30 Note 1) 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 35 + 35 (n 2) 20 + 35 D-M9V 35 20 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 25 + 35 (n 2) 15 + 35 D-A9V 25 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-M9WV D-M9AV 35 + 35 (n 2) 20 + 35 35 20 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-C7 D-C80 60 + 45 (n 2) 20 + 45 60 20 5 (n = 2, 3, 4, 5

Lightweight and Compact

Pipe thread type Nil Rc F G (with Rc-G conversion fitting) N NPT (with Rc-NPT conversion fitting) Power supply 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 40 3-phase 380 to 415 VAC (50/60 Hz) Specifications Model HRS090-Al-20-l HRS090-Al-40-l Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge kg 1.15 Control method PID control Ambient temperature1

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NPT1) Tank drain port Rc1/4 (Symbol F: G1/4, Symbol N: NPT1/4) Pump capacity Fluid contact material Stainless steel, Copper (Heat exchanger brazing), Brass, Bronze, Carbon, Ceramic, PE, PVC, POM, PTFE, NBR, EPDM, FKM, PP Power supply 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) Allowable voltage range 10% (No continuous voltage fluctuation) 3-phase 380 to 415 VAC (50/60 Hz) Allowable