XLA- ∗ -F7NJ ∗ - ∗ Series

Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E. I. du Pont de Nemours and Company. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. Auto switch mounting bracket For the auto switch D-F7NJ*, the mounting bracket XLA25-100 is used. 3.

XL-OMV0002

Kalrez R Chemraz R VMQ PLASMA ARMOR R No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 1) Barrel Perfluoro R Kalrez R dupont dupont Chemraz R Greene Tweed & Co ULTIC ARMOR R Nippon Valqua Industries, Ltd. 6 XL-OMV0002 3. 3-1.

XL-OMY0002

R R R EPDM PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 1) Barrel Perfluoro Kalrez R R Greene, Tweed Technologies, Inc.

XLF Series

Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E. I. du Pont de Nemours and Company. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. 3.

High Vacuum L Type Valve

Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E. I. du Pont de Nemours and Company. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. 6 XL*-OMI0011-E 3.

XLG Series

Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E. I. du Pont de Nemours and Company. Chemraz R is a registered trademark of Greene, Tweed & Co., ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD. 7 XL*-OMI0010-E 3. Specifications 3-1.

Clean Room Rodless Cylinder Series CYP ø15, ø32

Data L R S Piping Port Locaition Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

End Lock Cylinder Series CBG1

Rear trunnion type (mm) With front lock/R Bore size (mm) Rear trunnion type/CBG1T (with front lock-R only) Z (rear trunnion) ZZ (rear trunnion) With rod boot With rod boot Without rod boot Without rod boot 124 + l 145 + l 20 125 104 131 + l 152 + l 25 130 109 133 + l 157 + l 32 135 111 147 (154) + l 175 (182) + l 40 155 (162) 127 (134) 168 (179) + l 200 (211) + l 50 180 (191) 148 (159) Z

Micro-Mist Separator with Prefilter Series AMH

-~-Micro-Mist Separator '-Made to order s ecifications" J Drain guide 1/48 female thread R IN OUT reversal 250 1/4 T Element service indicator 350 3/8 450 1/2 550 3/4 650 850 11/2 Thread B Bracket C N.C. auto drain(AMH150-550) o N.O. auto drain Rc (plj F GlPFl .. Refer to the table below for combination N NPT of accessories and optional specifications.

ZSM1-115/121

First characteristic numeral First Characteristics: Degrees of protection against solid foreign objects Non-protected 0 Protected against solid foreign objects of 50 mm and greater 1 Voltage drops at the value of x r.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Data L R S Piping Port Locaition Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

1 $1 #0 r MY2H16 MY2HT16 $5 !4 @5 !9 @3 !5 #1 @4 $4 !2 $3 #3 #5 #6 @0 #4 #7 !7 #2 @6 @7 Component Parts Note No.

IP8101 Series

)1/0.96 (740) = qo50 Quick opening 50:1 (R=50) Y=(1-R-X)1/0.98 (750) = USEr Users definition11 polygonal line settings The default value at shipping is (700) = (Lin) Linear.

CYP

L R S Piping port position Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model.

CYPSeries

L R S Piping port position Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model.

CYPSeries

L R S Piping port position Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model.

Mounting: Basic Style, Bore Size: 50mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 350mm, Option: w/o Rear Plate, Auto Switch: C73--Reed, DC Volt >5 <24, AC Volt <100, LED, Lead Wire, Lead Wire or Prewired Connector: 3m, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Mounting: Basic Style, Bore Size: 50mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 350mm, Option: w/o Rear Plate, Auto Switch: H7BA--Solid State, Water Resist., 2 Wire, Lead Wire, Lead Wire or Prewired Connector: 3m, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Mounting: Basic Style, Bore Size: 50mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 350mm, Option: w/o Rear Plate, Auto Switch: C73--Reed, DC Volt >5 <24, AC Volt <100, LED, Lead Wire, Lead Wire or Prewired Connector: -, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Mounting: Basic Style, Bore Size: 50mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 350mm, Option: w/o Rear Plate, Auto Switch: C73C--Reed, DC Volt >5 <24, LED, Connector, Lead Wire or Prewired Connector: -, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -