Vacuum Unit Ejector / Vacuum Pump System

R Supply valve: Self-holding release valve linked, Release valve: N.C.

15

Contents 6 CYS06-37 -AJ024-R CYS06-37AAJ024-R 10 CYS10-37 -AJ025-R CYS10-37AAJ025-R 15 Set of the nos. 25, 26, 33 Set of the nos. 34, 41 Set of the nos. 37 BMY3-016 20 CYS20-37 -AJ027-R CYS20-37AAJ027-R 25 DCYS25-37 -AJ028-R 32 CYS32-37 -AJ029-R CYS32-37AAJ029-R 40 -X Note 3) A switch spacer, as specified in the table above will be required if an auto switch is mounted afterward.

OMR0032

controller PP+B7 1k PPB8 Current limit resistor R NP+B9 1 k NPB10 Current limit resistor R (b) Upper level equipment is PNP type Power supply for pulse train signal Positioning Unit side Inside the controller PP+B7 1k PP-B8 Current limit resistor R NP+B9 1k NP-B10 Current limit resistor R 27 - ii.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

OFF level 70 r/min 1) Forward rotation direction 3) 2) 20 r/min (Hysteresis width) ON level 50 r/min [Pr. PC07] Servo motor speed 0 r/min [Pr.

Aluminum High Vacuum Angle Valve

N P R Port P (Pressure port) In case of double solenoid valve Port R (Exhaust port) Q K L M B EB EA P A In case of single solenoid valve Port R (Exhaust port) (mm) P K L M N Q R Model XLCV-50 XLCV-63 XLCV-80 12.5 9.5 9.5 1 1 23.5 52.6 17.4 9.5 9.5 1 1 18.6 62.3 23.5 9.5 9.5 1 1 12.4 70.8 Other dimensions are the same as the XLC.

mb1

3 r !5 u q y e t !2 w i A CJ1 CJP CJ2 A Cylinder tube sectional view A-A !0 o CM2 CG1 Component Parts MB No. q w e r t y u i o !0 !1 No.

70astamb1

The kinetic energy of load can be found using the following formula. 20 10 5 V M M 2 V 2 100 300 1000 2000 500 Ek = Ek: Kinetic energy (J) M: Weight of load (kg) V: Piston speed (m/s) Maximum drive speed (mm/s) Example) Load limit at rod end when air cylinder 63 is actuated with max. actuating speed 500 mm/s. at a maximum drive speed of 500 mm/s.

SI unit for DeviceNet ®

Data ID Byte offset bit7 bit0 +0 IN7 IN6 IN5 IN4 IN3 IN2 IN1 IN0 +1 IN15 IN14 IN13 IN12 IN11 IN10 IN9 IN8 17 +2 IN23 IN22 IN21 IN20 IN19 IN18 IN17 IN16 +3 IN31 IN30 IN29 IN28 IN27 IN26 IN25 IN24 +0 IN7 IN6 IN5 IN4 IN3 IN2 IN1 IN0 +1 IN15 IN14 IN13 IN12 IN11 IN10 IN9 IN8 +2 IN23 IN22 IN21 IN20 IN19 IN18 IN17 IN16 18 +3 IN31 IN30 IN29 IN28 IN27 IN26 IN25 IN24 +4 R R R R R R R R +5 R R R R DI_CHK

IR1000/2000/3000

IRV1000 IRV2000 IRV3000 P538010-6 P538020-3 P538030-5 q w e r t y u i o !0 !1 !2 !3 !4 !5 HNBR, etc.

Digital Flow Switch (Integrated display type) ( compatible)

U8 0 Y 1820 0x071C 0 R/W 1821 0x071D 0 R/W Line name 2nd letter U8 0 Y Refer to "Line name: communication data".

PFxx-OMX0007

Security code 1 R/W 2410 0x096A PinCode (Security code setting) Setting range 0x0 to 0x03E7 (0 to 999) 2 R/W U16 0 Y Line name 1st letter U8 0 Y 11 seg 1 R/W 2 R/W Line name 2nd letter U8 0 Y 7seg 3 R/W Line name 3rd letter U8 0 Y 7seg Lower level screen 4 R/W Line name 4th letter U8 0 Y 7seg Refer to "Line name: communication data".

Digital Flow Switch (Integrated display type) ( compatible)

0 Y 1820 0x071C 0 R/W 1821 0x071D 0 R/W Line name 2nd letter U8 0 Y Refer to "Line name: communication data".

10

500 500 500 6 VX240 1 8 145 (1.0) 8 VX250 2 10 10 VX260 3 12 Note) Weight of grommet type.

Multi-channel Digital Sensor Monitor ( compatible)

R/W Device access lock 0x0 Refer to "Device access lock parameter" on page 86. 0x000C 0x0010 (16) 0 R Vendor name SMC Corporation 0x0011 (17) 0 R Vendor text www.smcworld.com 0x0012 (18) 0 R Product name Example PSE202A 0x0013 (19) 0 R Product ID Example PSE202A 0x0014 (20) 0 R Product text MONITOR (21) 0 R Serial number Example "x" Initial value is indicated as 8-digit. 16 octets fixed character

VQ7-6/7-8

type Rubber seal type VQ7-6-FG-SVQ7-6-FG-S-R VQ7-6-FG-DVQ7-6-FG-D-R FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R VQ7-6-FPG-DValve replacement parts FHG FJG FIG FHG FJG FIG Description Material VQ7-6-FG-SVQ7-6-FG-DVQ7-6-FPG-DVQ7-6-FG-S-R VQ7-6-FG-D-R VQ7-6-D-R VQ7-6-DNo.

33

To circulating fluid return port e r Part no. Applicable model HRS-BP001 HRSE012-A-(-T) HRSE018-A-(-T) HRSE024-A-(-T) To circulating fluid outlet q r Parts List No.

Programless Controller Series LECP1

Decimal display 10 11 12 13 14 15 Hexadecimal display A b c d E F Note 4) Applicable to non-magnetizing lock. 65 Programless Controller Series LECP1 Precautions Model Selection Details of The Controller e r Details No.

CM2

With Rod Boot Data l Z Symbol h B3 e f Stroke Bore size (mm) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 36 17 30 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 160 173 185 198 223 248 273 25 36 17 32 72 85 97

C95Series

Rod Center Mounting Basic Fool ,r ' flange , trunn~~~ 1 !

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LEF How to Order LEJ 11 Vacuum type LEJS 11 40 S2 A 500 H LEL Clean series q w e r y u i o !0 !