Table Accuracy: H (High Precision), Size: 10, Max. Rotation Torque: J (Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6), Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: S (Standard Cable), Actuator Cable Length: 1 (1.5), Controller Type - LEC, JXC: C91 (JXC91, EtherNet/IP™ Direct Input Type), I/O Cable Length for LEC: w/o Cable

Table Accuracy: Basic, Size: 10, Max. Rotation Torque: High Torque, LER10: 0.3; LER30: 1.2; LER50: 10, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Standard Cable, Actuator Cable Length: 1.5, Controller Type - LEC, JXC: JXC91, EtherNet/IP™ Direct Input Type, I/O Cable Length for LEC: w/o Cable, Controller Option: DIN

Table Accuracy: Basic, Size: 30, Max. Rotation Torque: High Torque, LER10: 0.3; LER30: 1.2; LER50: 10, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Standard Cable, Actuator Cable Length: 1.5, Controller Type - LEC, JXC: JXC91, EtherNet/IP™ Direct Input Type, I/O Cable Length for LEC: w/o Cable, Controller Option: DIN

Table Accuracy: Basic, Size: 30, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Standard Cable, Actuator Cable Length: 1.5, Controller Type - LEC, JXC: JXC91, EtherNet/IP™ Direct Input Type, I/O Cable Length for LEC: w/o Cable, Controller Option: DIN Rail

Table Accuracy: Basic, Size: 10, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Standard Cable, Actuator Cable Length: 1.5, Controller Type - LEC, JXC: JXC91, EtherNet/IP™ Direct Input Type, I/O Cable Length for LEC: w/o Cable, Controller Option: DIN Rail

Table Accuracy: High Precision, Size: 10, Max. Rotation Torque: Basic, LER10: 0.2; LER30: 0.8; LER50: 6.6, Rotation Angle: LER10: 310°; LER30/LER50: 320°, Motor Cable Entry: Basic, Entry on the Right Side, Actuator Cable: Standard Cable, Actuator Cable Length: 1.5, Controller Type - LEC, JXC: JXC91, EtherNet/IP™ Direct Input Type, I/O Cable Length for LEC: w/o Cable, Controller Option

Oscillation Angle A: 320°, Torque (Range)(N⋅m): Less than 1, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: High Rigidity, High Accuracy, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 0.8, Size: 30, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Standard cable, Actuator cable

XLA Series

H 4 S y m b o l Initial power/ Power 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 consumption (W) Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

XLA- ∗ -F7NJ ∗ - ∗ Series

H 4 S y m b o l Initial power/ Power consumption (W) 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

XL-OMV0002

/ AC200V 2400/150 3200/220 4800/350 Ass'y XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 Ass'y 2 3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1)/ 2)16 PTC() 200V 200 PTC 150 100V PTC Ass'y 0 5 10 15 20 25 30 Ass'y ( Ass'y 30 8 XL-OMV0002 4 4-1.162540 Assy SUS304 SUS316L ( SUS304) ( A6063) C D C E E (KF ) Fn J H B A G A mm A B C D E Fn G H J XLC

XL-OMY0002

/ AC200V 2400/150 3200/220 4800/350 XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 2 3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0002 . 1 S 12 ( SUS304 M 3 M SUSU316L 8 11 SUS304 2 7 A6063 6 9 6 9 10 9 5 SUS304 4 5 10 4 10 S O S O XLD-25 XLD-40,XLD-50,XLD-160 XLD-63

IP8001 Series

.: Alarm output 1> Power supply voltage 24V DC and load resistance 1k (+ internal resistance 350), Load current = 24V DC / (1k + 350) = Approx. 18mA DC 4: Determination of load resistance of alarm output for intrinsic safety type of explosion protected construction specification.

IP8101 Series

.: Alarm output 1> Power supply voltage 24V DC and load resistance 1k (+ internal resistance 350), Load current = 24V DC / (1k + 350) = Approx. 18mA DC C 4: Determination of load resistance of alarm output for intrinsic safety type of explosion protected construction specification.

JXCx-OMT0002

Product Specifications 4.1 Basic Specifications Item Specifications Number of axes per controller Max. 4-axis Controlled motor Step motor (servo 24 VDC ) Encoder Incremental phase A / B (Encoder resolution 800 pulse / rotation) Main control power supply Power supply voltage: 24VDC+/-10% Max. current consumption: 350 mA Power supply specification Note1) Motor drive and motor control power

CEx-OMB0060

Counting after reset shall be done after 350 ms or more has passed since the reset input. Input of reset signal from PLC/ PC shall be between 10 ms and 100 ms. For longer input time, processing takes approximately 150 ms from startup of reset signal and it increases total reset processing time.

XLF Series

H 4 S y m b o l Initial power/ Power consumption (W) 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

High Vacuum L Type Valve

H 4 S y m b o l Initial power/ Power 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 consumption (W) Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

XLG Series

H 4 S y m b o l Initial power/ Power consumption (W) 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

MHZ

0.5 MPa Gripping force (N) Gripping force (N) 15 0.5 MPa 0.5 MPa 0.6 MPa 0.5 MPa MHW 150 0.4 MPa 0.4 MPa 10 0.4 MPa 0.3 MPa 0.2 MPa 0.4 MPa 0.3 MPa 0.3 MPa 0.3 MPa MRHQ 100 L 0.2 MPa 0.2 MPa 0.2 MPa 5 Misc. 50 D0 10 20 30 40 50 0 50 100 150 Gripping point L (mm) Gripping point L (mm) 20MHZ2-16D/MHZL2-16D MHZ2-40D 400 Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa 50 350

3

Additional Weight Ensuring Safety Unit: g Caution 12 13 16 32 20 100 25 100 32 200 40 200 50 350 63 350 Bore size (mm) With arm Rod flange (including mounting bolt) If one side of the piston is pressurized by supplying air with the clamp arm attached, the piston will move vertically while the clamp arm rotates.