Air-hydro Unit

800 400 30 Capacity of converter (cm3) 300 CC CC 25 600 500 400 100 CRA1H100-180 200 20 CRA1H100-90 300 300 100 CRA1H80-180 200 200 150 CRA1H80-90 50 CRA1H63-180 100 100 80 CRA1H63-90 CRA1H50-180 60 50 40 50 CRA1H50-90 30 Selected model of rotary actuator 160 100 63 40 20 100 200 300 400 500 600 700 800 Nominal size of converter (mm) Cylinder stroke (mm) How to read the graph (ex: when using

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRQ2 MSQ MRQ D20PAT.

CJP

Without rod end thread Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Width across flats) Auto switch Mounting nut (Refer to page 6-2-13.)

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

MTS MY CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX Caution Particulate Generation Characteristics Caution 1. A sine cushion (smooth start-up, soft stop) function is included in the standard specifications.

DOC1023125

Applicable stroke table Size Stroke [mm] 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100 1200 25 32 40 25 - .

JXCx-OMU0026

600 700 800 600 700 800 Max. speed [mm/s] 500 250 100 900 630 550 500 420 330 250 230 180 0 Min. speed [mm/s] (Independent and interpolation) 10 5 20 12 6 Min. speed [mm/s] (Speed tuning control) 17 9 33 20 10 Model LEFS32 Lead symbol H A B Lead [mm] 24 16 8 Stroke (mm) 600 700 800 900 1000 800 900 1000 800 900 1000 Max. speed [mm/s] 1200 930 750 610 500 500 410 340 250 200 170 Min. speed

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

1,200 0.4 MPa 0.4 MPa 1,000 1,000 MHK 800 0.3 MPa 0.3 MPa 800 600 0.2 MPa 0.2 MPa 600 MHS 400 400 0.1 MPa 0.1 MPa 200 200 MHC 0 0 20 20 100 100 40 40 60 60 120 120 Gripping point L (mm) Gripping point L (mm) 80 80 MHT MHY MHW -X MRHQ MA D557 Series MHS3 Dimensions MHS3-16D to 25D CB 7 P (Finger opening port) P (Finger closing port) WA depth 1.5 22.5 AA 6 x M3 x 0.5 thread depth TB Thread

CXS

Compact Type: CXSJ Vertical mounting L L Mounting orientation m m Maximum speed (mm/s) up to 600 up to 800 up to 400 up to 200 Stroke (mm) All strokes 6 10 Selection graph 1 2 3 4 Horizontal mounting L Mounting orientation m m Refer to the caution notes below. up to 800 up to 400 up to 800 up to 400 up to 400 up to 800 up to 400 up to 800 up to 50 up to 75 up to 10 up to 30 Stroke (mm) Maximum

Direct Operated Precision Regulator Modular Style Series ARP3000 1

900 1000 0 0 100 200 300 400 500 600 700 800 900 1000 AU Flow rate (/min (ANR)) Flow rate (/min (ANR)) AF AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ARX21-01 ARX21-02 0.35 0.35 IR 0.30 0.30 Outlet pressure (MPa) Outlet pressure (MPa) VEX 0.25 0.25 0.20 0.20

VCL

Note 2) The weight is the value for the grommet type. 17-2-33 6 Series VCL Construction q w e r Component Parts t Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Description Material No.

VCS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 VXA Clip type VN Ease of maintenance has been improved. Changing of the coil is made easy by means of clip design.

70pvvna

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Warning Piping 1.Air bleeding Series VNA valves have no air bleeding port. Bleed air comes from the middle piping.

VNC

(P1) port (P2) port In the case of 32A to 50A Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com N.C.

VXD21/22/23

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 VXA VN LVC LVA LVH N.O. LVD Variations LVQ Valve Electrical entry LQ OUT Grommet Conduit DIN terminal Conduit terminal LVN Normally closed (N.C.) IN TI/ TIL OUT Normally open (N.O.)

Series SV

MB 63 10% 30% 50% 600 Stroke mm 70% 30% AS3201F -02-12 400 200 70% 50% 10% 0 800 MB 80 600 Stroke mm AS5000-02 AS420-02 400 200 0 AN300 -KM12 T1209 800 MB 100 600 Stroke mm AS5000-02 AS420-02 400 200 0 800 CS1 125 600 Stroke mm AS5000-02 AS420-02 400 200 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY Box type (Built-in silencer) Body ported ZQ EXH SUP ZF ZP Two types are available in the series: the box type with a silencer exhaust, and the body ported type, with an individual exhaust. ZCU AMJ Misc.

Thermo-chiller

Required installation space 8 e r o m r o m m 0 0 Required installation space for ventilation and maintenance 400 mm or more 800 mm or more 800 mm or more 400 mm = 15.7 inch 800 mm = 31.5 inch 800 mm or more Piping Caution 78.7 inch (2000 mm or more) 1.

Thermo-con

Cooling Capacity HEC002 HEC006 Circulating fluid: Clear water Circulating fluid: Clear water 800 1400 700 1200 Ambient temperature: 59 (15C) 600 1000 Cooling capacity (W) Cooling capacity (W) Ambient temperature: 59F (15C) 500 HRG HRS HRZ HRZD HRW HEC HEB HED Technical Data Related Products 800 Ambient temperature: 68F (20C) 400 600 Ambient temperature: 77F (25C) 300 Ambient temperature:

5 Port Solenoid Valve Series SV1000/2000/3000/4000

MB 63 10% 30% 50% SY 600 Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) 70% 30% AS3201F -02-12 SV 400 SYJ 200 70% 50% 10% SZ 0 MB 80 800 VP4 600 S0700 AS5000-02 AS420-02 400 VQ 200 VQ4 0 SV400 AN300 -KM12 T1209 VQ5 800 MB 100 VQC 600 AS5000-02 AS420-02 400 VQZ 200 SQ 0 VFS CS1 125 800 VFR 600 VQ7 AS5000-02 AS420-02 400 200 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500

AC Servo Motor Driver (CC-Link Type ）

Set "0" to send back data in less than 800 s or "1" to send back data in 800 s or more. Parameter No.PC21 RS-422 communication response delay time 0: Invalid 1: Valid, reply sent in 800 s or more (3) Station number setting Set the station number of the driver in parameter No.PC20. The setting range is station 0 to 31. 14 6 14.