Vacuum Module Series ZX

Vacuum pressure switch Vacuum pressure switch 15 55 Vacuum Pressure Switch: ZSE2-0X15 55 Grommet: ZSE2-0X15 55 Connector: ZSE2-0XC Indicator light (Red) Pressure setting trimmer Indicator light (Red) JIS Symbol Pressure setting trimmer 20 20 35.6 7 35.6 7 Lead wire length Lead wire length Vacuum port (V) M5 (or M6) 600 9.5 50 600 2 50 Vacuum pressure SUP port (PV) M5 (or M6) 57.6 18 6.5 6.5

Series SY100 3 Port Solenoid Valve Rubber Seal

Specifications Air Fluid Max. 50C Ambient and fluid temperature (C) Response time (ms) (1) 10ms or less Base mounted 20 Max. operating frequency (Hz) Manual override Non-locking push, Locking slotted, Push-locking slotted, Push-locking lever Not requited Lubrication JIS Symbol Free Mounting position Impact/Vibration resistance (m/s2) (2) 150/30 SY11 (A) 3 4 SY12 (A) 3 4 Dust-proof Enclosure

VZS2000

0.27 0.17 1.1 0.21 0.23 0.90 1 8 VP4 Exhaust center 3 position VZS2450 22 or less 600 0.2 0.31 0.13 1.3 0.25 0.12 1.1 1 8 VZS Pressure center VZS2550 600 22 or less 0.2 0.33 0.19 1.4 0.26 0.12 1.2 1 8 VFS Double check VZS2650 500 26 or less 0.3 0.81 0.71 1 8 VS4 Note 1) Min. operating cycle is based on JIS B 8375 (One time per 30 days).

4

Non-locking push type Unrestricted 150/50 m/s2 Make sure that dust and/or other foreign materials do not enter the valve from the unused port (e.g. exhaust port).

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Without lead wire: (with connector and 2 of sockets only) SY100-30-A Rated voltage Lead wire length 5 6 V S R 1 2 Electrical entry 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Nil 6 10 15 20 25 30 50 G H L LN LO M MN MO W0 Grommet, 300 mm lead wire Grommet, 600 mm lead wire

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Without lead wire: (with connector and 2 of sockets only) SY100-30-A Rated voltage Lead wire length 5 6 V S R 1 2 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Electrical entry G H L LN LO M MN MO W0 Grommet, 300 mm lead wire Grommet, 600 mm lead wire

3 Port Solenoid Valve Series SYJ300/500/700

S Z Without lead wire: (with connector and 2 of sockets only) SY100-30-A Rated voltage R Lead wire length U 5 6 V S R 1 2 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm For AC voltage valves there is no S option.

IZx-OMT0049

Handling Caution 1) Do not apply excessive external force or shock (100m/s2 or more) to the product Even if the there are no problems with the appearance of the controller, high voltage power supply module or bar, the damage of the internal components may cause malfunction. 2) When the bar length exceeds 820mm, hold the both ends and the middle of the bar so that moment load is not applied

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Example) Obtain the air flow rate for P1 = 0.4 [MPa], P2 = 0.3 [MPa], T = 20 [C] when a solenoid valve is performed in C = 2 [dm3/(sbar)] and b = 0.3. 293 According to formula 1, the max. flow rate = 600 x 2 x (0.4 + 0.1) x = 600 [L/min (ANR)] 273 + 20 0.3 + 0.1 Pressure ratio = = 0.8 0.4 + 0.1 Based on Graph (1), it will be 0.7 if the pressure ratio is 0.8 and the flow rate ratio is b

0.4

Bore size MB, CA2 series Pressure 0.5 MPa Load factor 50% Stroke 500 mm CM2 series Pressure 0.5 MPa Load factor 50% Stroke 300 mm CJ2 series Pressure 0.5 MPa Load factor 50% Stroke 60 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQC1101 800 700 600 500 400 300 200 100 0 VQC2101 It

MVGQ

Built-in magnet for auto-switches CE1 CE2 Maximum Driving Speed of Cylinders ML2B 1000 1000 900 900 C J G5-S Load factor: 10% Load factor: 50% 800 800 Cylinder speed (mm/s) Cylinder speed (mm/s) 700 700 600 600 CV 500 500 400 400 MVGQ 300 300 200 200 CC 100 100 0 0 12 16 20 25 32 40 50 63 80 100 RB SYJ3000 VZ3000 VZ5000 VF3000 Bore size (mm) J Series Variations DDetailed specifications

S070

With the 0.1 W specification, the vibration and impact resistance is 10/50 m/s2 or less. Note 3) With the low vacuum specification, the operating pressure range is 1.33 102 Pa to the maximum operating pressure.

S070

With the 0.1 W specification, the vibration and impact resistance is 10/50 m/s2 or less. Note 3) With the low vacuum specification, the operating pressure range is 1.33 102 Pa to the maximum operating pressure.

3 Port Solenoid Valve

With the 0.1 W specification, the vibration and impact resistance is 10/50 m/s2 or less. Note 3) With the low vacuum specification, the operating pressure range is 1.33 102 Pa to the maximum operating pressure.

Step Motor Controller

A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Pulse output (Specifications: Maximum load current of 10mA; Maximum applied voltage of 30V) Output Voltage output Note 5) 1 to 5V within the flow rate range Analog Linearity: 2%F.S. or less, allowable load resistance: 100k or more specifications output Current output Note 6) 4 to 20mA within the flow rate range Linearity: 2%F.S.or less, allowable load resistance: 300 or less with 12VDC, 600

Multi-Axis Step Motor Controller

Step Axis Movement mode Speed Position Acceleration Deceleration Pushing force Trigger LV Pushing speed Moving force Area 1 Area 2 In position Comments mm/s mm mm/s2 mm/s2 mm mm mm Axis 1 ABS 500 100.00 3000 3000 0 85.0 50 100.0 10.0 30.0 0.5 Axis 2 ABS 500 100.00 3000 3000 0 85.0 50 100.0 10.0 30.0 0.5 0 Axis 3 ABS 500 100.00 3000 3000 0 85.0 50 100.0 10.0 30.0 0.5 Axis 1 INC 500 200.00

IZx-OMX0087

600 5m/s 800 800 2m/s 2m/s 1000 1000 3) Flow rate : 250L/min 6) Flow rate : 180L/min 75 50 25 0 25 50 75 Installation distance from ionizer to workpiece [mm] 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 -75 -50 -25 0 25 50 75 0 0 mm ionizer to workpiece [mm] Installation distance from mm 200 200 20m/s 400 400 2m/s 20m/s 2m/s 600 600 10m/s 800 800 10m/s 5m/s 1000 1000 1200 5m/s 1400 5-4.

ZSE1/ISE1

(3000) 56.5 600 (3000) 49 8.5 47 47 3.5 3.5 8.5 2-3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 M5 x 0.8 depth 5 Piping port M5 x 0.8 depth 5 Piping port 2-3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 13 13 16-6-5

Ejector Valve Unit Series ZYY/ZYX 1

Do not drop, bump or apply excessive impact (1000 m/s2) when handling. Even if the switch body is not damaged, the switch may suffer internal damage that will lead to malfunction. 3. Hold the product from the body side when handling. The tensile strength of the power cord is 49 N, and pulling it with a force greater than this can cause failure. Hold by the body when handling. 4.