Table of Contents

Series IR1000/2000/3000 Precision Regulator. Series Variations. Features. Precautions. Series IR1000/2000/3000 Precision Regulator. Specifications. How to Order. Construction. Dimensions . Made to Order Specifications. Series IRV1000/2000/3000 Vacuum Regulator. Features. Precautions. Series IRV1000/2000/3000 Vacuum Regulator. Specifications. How to Order. Construction. Dimensions .

1

Note) Except SI Unit Manifold Solenoid Valves Manifold Solenoid Valves Series SY3000/5000 Series SV1000/2000/3000 Series S0700 Series VQC1000/2000/4000 IP67 IP40 IP67 IP67 Note) The SY3000/5000, S0700, and VQC1000/2000/4000 are not UL-compatible.

Precision Regulator

0.1 0.194 0.1 0 1000 2000 3000 4000 5000 6000 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 6000 0 1000 2000 3000 4000 5000 1.0 Flow rate (L/min (ANR)) Relief flow rate (L/min (ANR)) Supply pressure P1 (MPa) 818 IR1000/2000/3000 Series Made to Order Please contact SMC for detailed dimensions, specifications, each part number and lead times.

V

Note 4) Grommet type (G) is also available for C-kit, single type of VQ0/1000/2000.

Table of Contents

Note 2) Strokes over 2000 mm are available as made-to-order. (Refer to -XB11 on page 10-21-1.)

IR1000/2000/3000

1 Precision Regulator Series IR1000/2000/3000 G F.R.L.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Note 3) Weight without sub-plate 1.12-35 VQZ1000/2000/3000 Base Mounted Construction: VQZ1000/2000/3000 Metal seal Rubber seal 4 3 2 1 4 3 2 1 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 2 position double 2 position double (B) 2 (A) 4 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 (1) 3 position closed

Uniaxial Electric Actuator Series LJ1

W: Work load (N) L1, L2, L3: Amount of overhang to work piece center of gravity (mm) a: Table acceleration (mm/s) Mounting position Direction of load movement Model LJ1H10 LJ1H20 LJ1H30 Horizontal/Lateral Horizontal/Lateral Vertical Lateral Horizontal a M1 2000 a=1000 a=1000 2000 2000 a=1000 L1 mm L1 mm L1 mm Pitching W a=2000 a=2000 a=3000 a=3000 a=2000 1000 1000 1000 L1 a=3000 0 2 4 6 8

Series VQ Base Mounted Metal Seal/Rubber Seal

VQ 1000/2000 Plug-in Unit Base Mounted VQ2000 The broken lines indicate DIN rail mounting style [D].

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Socket Hook 1.12-4 VQZ1000/2000/3000 Body Ported Mounting 3 Port Valves on 5 Port Manifolds(VQZ 82 , N.C.

AC Servo Motor Driver (CC-Link Type ）

Position data Speed Dwell Auxiliary Model adaptive control 1 1000 1000 80 80 0 0 Speed control 2 2000 2000 100 100 0 0 3 4000 2000 70 60 500 1 4 500 2000 60 70 1000 1 5 2000 80 80 0 0 1000 6 2000 1000 80 80 0 0 Position 7 1000 1000 80 80 0 0 control LEC-MR-J3BAT 8 1000 1000 100 100 0 0 MR-J3BAT 1000 1000 100 100 0 0 (Note 3) CN4 255 2000 2000 80 80 0 0 Position Optional battery (for absolute

HRX-OM-W002

Facility water temp. 2000 2000 2000 2000 Facility water temp. Facility water temp. 2000 2000 Cooling capacity[W] Cooling capacity[W] Facility water temp.

Mechanically Jointed Rodless Cylinders

However, when exceeding 2000 mm stroke, add -XB11 to the end of the model number. Refer to Made to Order on page 40.

Ionizer

0 0 100 200 300 400 500 600 1000 Distance (mm) Distance (mm) Air purge: Yes Supply pressure: 0.1 MPa (7 L/min (ANR) per nozzle) Air purge: Yes Supply pressure: 0.05 MPa (3.5 L/min (ANR) per nozzle) 45 25 40 35 20 Discharge time (s) Discharge time (s) 60 Hz 30 15 25 1 Hz/60 Hz 20 1 Hz 10 15 Sensing DC Sensing DC 10 5 5 00 500 1000 1500 2000 00 500 1000 1500 2000 Distance (mm) Distance (mm

AC

4 Note 1) Bowl guard (SPC) is attached to the bowl assembly of "AW3000" to "AW4000-06". 1.8-4 Filter Regulator AW1000 to 4000 Dimensions Options (AW3000/4000) AW1000/2000 Metal bowl With drain guide AC Drain cock style for AW1000/2000 is same as the standard. Without valve mechanism.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LEC Y 10 5 5 Motorless 0 0 500 1000 1500 2000 0 0 500 1000 1500 2000 2500 3000 LAT Speed [mm/s] Speed [mm/s] When the stroke of the LEJB40 series exceeds 1000 mm, the work load is 10 kg.

JXCx-OMT0023

2000 100 100 0 0 3 4000 2000 70 60 500 1 4 -500 2000 60 70 1000 1 Position 5 1000 2000 80 80 0 0 control 6 2000 1000 80 80 0 0 7 1000 1000 80 80 0 0 Position command creation USB I/F CN1 CN3 D I/O con trol Personal Servo-on Start Failure, etc. computer USB Note 1.

IR1000/2000/3000

Setting point 0.4 0.5 0.198 0.4 0.3 0.3 0.196 0.2 0.2 0.1 0.194 0.1 0 1000 2000 3000 4000 5000 6000 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 6000 0 1000 2000 3000 4000 5000 1.0 Relief flow rate l/min (ANR) Flow rate l/min (ANR) Supply pressure P1 MPa 7 Series IR1000/2000/3000 Order Made Specifications Contact SMC regarding detailed dimensions, specifications and delivery times.

90

-A 0.47 0.64 IR3000-A SRF ITV * Compared with the current IR1000/2000/3000 IC ITVH ITVX Mist Separator Precision Regulator Air Filter PVQ VY1 Digital pressure switch standardized VBA VBAT AP100 789 Precision Regulator IR1000-A/2000-A/3000-A Series Reduction in air consumption Air consumption is reduced with a new original structure.

Slider Type Ball Screw Drive/11-LEFS Series

0 4 8 12 16 20 24 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] LEC SS-T 2000 2000 2000 2000 1500 1500 1500 1500 LEC Y L4 [mm] L4 [mm] L4 [mm] L4 [mm] L4 1000 1000 1000 1000 X Motorless 500 500 500 500 LAT 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 LZ Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000