High-precision Digital Pressure Switch

ISE75G0x03160x1450 (7905200) P_1(n_1) (Selection of output set value) Setting of OUT1 output set value ISE76G0x03200x1450 OUT1 setting U16 3000 Y 1012 0x03F4 0 R/W (8005200) ISE77G0x03200x1450 (8005200) ISE78G0x03200x1450 (8005200) Setting range ISE70G0x03E80x15F4 (10005620) ISE75G0x03E80x1522 (10005410) H_1 (Setting of OUT1 hysteresis) Setting of OUT1 hysteresis ISE76G0x03E80x1518 U16 1200

LJ1H

Without driver Cable length A1 A2 B1 B2 Right Pulse input type (Incremental encoder) 100 V Pulse input type (Incremental encoder) 200 V 2 5 Left Top 2 m 5 m Axial entry Right entry Pulse input type (Absolute encoder) 100 V Pulse input type (Absolute encoder) 200 V Bottom entry A Bottom 10 m Cable entry direction Specifications 200 16.0 300 18.0 400 20.0 500 22.0 600 24.0 800 28.5 1000 1200

5

or less 1200 or less 1600 or less -XC68 Made of stainless steel (with hard chrome plated piston rod) -XC86 With rod end bracket Accessories/For details, refer to page 221.

Precision Regulator

/min (ANR)) Supply pressure P1 (MPa) Relief flow rate (L/min (ANR)) IR2020-02 IR2020-02 IR2020-02 Supply pressure: 1.0 MPa Back pressure: 1.0 MPa IC 1.0 0.8 0.204 ITVH 0.9 Set pressure P2 (MPa) Set pressure (MPa) 0.7 Set pressure (MPa) 0.8 0.6 ITVX 0.202 0.7 Set point 0.5 0.6 PVQ 0.200 0.5 0.4 0.4 0.3 VY1 0.3 0.198 0.2 0.2 VBA VBAT 0.1 0.1 0.196 0 200 400 600 800 0 200 400 600 800 1000 1200

Industrial Filters

23 46 50 56 50 63 06 FGDFB FGESA Note 2) 410 3000 45 90 120 140 100 160 10 FGELA Note 2) 410 3600 50 120 140 170 110 210 20 FGETA FGESB Note 2) 800 3300 70 140 150 160 120 170 10 FGELB Note 2) 800 4200 90 170 180 210 140 230 20 FGETB FGESC Note 2) 1100 3400 83 150 160 170 120 170 10 FGELC Note 2) 1200 4400 120 190 200 220 150 230 20 FGETC FGGSB 160 270 300 320 290 360 FGGLB FGGSC 200

CLA

I , ~ R. t:l' t y X BN N X Y 1 S + Stroke H LS + Stroke ZZ + Stroke Long Stroke Bore size Stroke ) (mm) range (mm) RT RV 40 501-800 50 601 1000 1001 1200 30 76 , 63 601-1000 1001-1200 40 92 80 751-1000 1001 1400 45 112 100 7511000 . . .

AZ1000

AZ1300 150 psig (1.0 MPa) 75 psig (0.52 MPa) Inlet pressure: 100 psig (0.69 MPa) 40 0.28 140 0.97 35 0.24 120 0.83 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) Delivery pressure (psig) 30 0.21 100 0.69 25 0.17 80 0.55 20 0.14 60 0.41 15 0.10 40 0.28 10 0.07 20 0.14 5 0.03 0 0.00 0 0.00 0 100 200 300 400 500 600 700 Flow rate (slpm, N2) 0 200 400 600 800 1000 1200

C95Series

1200 1 ,4QO , 80 25, 50, 7~ 100, 1 25, 150. 1 7~20~ 250,300, 350, 400,450.500, 600, 700, 800 100 1500 25, 50.75, 100, 125, 150,175,200, 250,300, 350,400,450,500,600,700,800 Intermediate strokes are available.

Power Clamp Cylinder

Recommended shim thickness) Arm length L: 10 in 0.14 0.04 0.10 1600 1400 1200 1000 800 600 400 200 0 Clamping force (lbf) 0.7MPa 0.5 MPa 0.3 MPa 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 Shim thickness (in) 187 Model Selection 2 Slim-line power clamp cylinder mounting When using a hard stop Arm length L (Distance to a hard stop) Clamp arm Cylinder Shim q Upper hard stop Clamping block Clamp arm Unclamping

INFORMATION For material handling and clamping of small workpieces 34 mm Power Clamp Cylinder Compact Type New New ø25, ø32 Lightweight Compact 53 mm High clamping force Lock function Lightweight Weight : 580 g (ø25) 192.4 mm Width : 34 mm Compact Heigh

126 32 90 110 105 126 4 CKZT -X2797 -X2798 Dimensions: Clamp Arm CKZT25-A000 S-X2797 C R L L: Left 26 18 52 40 16 C: Center R: Right 200.1 2 x 4H7 through 200.02 (8) 28 2 x 6.5 through 93 44 10 200.1 5 CKZT -X2797 -X2798 Model Selection Relation between arm length and clamping force Arm length Clamp arm Shim Clamping block Extension arm Fulcrum Load cell Bore Size: 25 Bore Size:32 270 [1200

CP95

25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1400 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 1500 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 Intermediate strokes are available.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

101 45 88 75 IN 63 16 25 216 202 187 141 173 158 101 144 129 60 115 100 OUT 86 32 471 318 297 277 165 256 235 118 214 193 71 173 152 IN 131 576 20 40 597 413 390 367 220 344 321 157 298 275 94 252 229 OUT 206 717 50 951 659 622 586 264 550 514 189 477 441 113 405 369 IN 1139 25 63 1213 865 824 783 344 742 702 245 661 620 147 579 538 OUT 1424 80 2111 1539 1471 1404 422 1336 1268 302 1200

CV/MVGQ

Opening Range of Throttle Valve and Driving Speed Conditions: Operating pressure 0.5 MPa, Horizontal mounting, No load, Spring return side The speeds shown in the graph are for reference. 40 40 1400 50 50 1200 Piston speed (mm/s) Related things about auto switches and the mounting brackets part numbers are the same as these of Series CV3.

Low Profile Guide Type

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

20

Flow-rate Characteristics Note) Values when the main valve is fully open Male thread nozzle High efficiency nozzle 1500 1400 1300 1200 1100 1000 900 800 700 600 500 400 300 200 100 0 400 VMG1-R02-400:4 KNH-R02-200 VMG1-R02-350:3.5 350 VMG1-R02-300:3 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 300 KN-R02-250:2.5 KN-R02-200:2 250 KN-R02-150:1.5 KNH-R02-150 200 KN-R02-100:1 150 KNH-R02-100

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

conforming to international standards, visit us at www.smcworld.com. 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 Model VK 1 4/2 (P A/B) C [dm3/(sbar)] C [dm3/(sbar)] b Cv 4/2 5/3 (A/B R1/R2) Flow characteristics (1) Response time (ms) (2) Weight (kg) (3) Max. operating cycle (CPM) Port size Rc VZ Model Type of actuation b Cv VF 2 position VZS3150 1200

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.

CQ2

88 101 114 127 140 152 165 178 75 IN 45 75 106 16 25 86 115 129 144 158 173 187 202 216 100 OUT 60 101 141 32 131 173 193 214 235 256 277 297 318 471 576 152 IN 71 118 165 20 40 206 252 275 298 321 344 367 390 413 597 717 229 OUT 94 157 220 1139 50 405 441 477 514 550 586 622 659 951 369 IN 113 189 264 25 1213 1424 63 579 620 661 702 742 783 824 865 538 OUT 147 245 344 1064 1132 1200

REA/REB

to 60C Piston speed 70 to 600mm/s Lubrication Non-lube Stroke length tolerance 0 to 1.8mm Centralized piping Piping type Slider Type/Slide Bearing REAS Slider Type/Ball Bushing REAL Rc 1/8 M5 x 0.8 Piping port size Standard Strokes Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke (mm) Number of axes 150, 200, 300, 400, 500 750 15 1 axis 200, 300, 400, 500, 600, 800 25 1200

RSH

RSH20, 32 Graphq Graphw 1.0 RSH32 RSH32 RSH32 Bore size 50, 63, 80/ m =0 Bore size 50, 63, 80/ m =0.1 RSH20 RSH20 RSH20 0.9 Operating pressure : P (MPa) 1300 1300 0.8 80 0.7 1200 1200 0.6 1100 1100 0.5 1000 1000 0.4 900 900 0.3 63 80 800 800 0.2 50 Weight : W (kg) Weight : W (kg) 700 700 0.1 600 600 100 200 300 400 500 0 63 500 500 Lateral load: W (N) 50 400 400 RSH50, 63, 80 300 300 1.0