3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

Option 4-16-5 2 Series VS3135/3145 Construction Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A-A cross section Component Parts !1 Solenoid Coil Assembly Part No.

Plate Cylinder

Thread size 4.9 to 5.9 M5 x 0.8 8.28 to 10.12 M6 x 1 19.8 to 24.2 M8 x 1.25 39.6 to 48.4 M10 x 1.5 68.4 to 83.6 M12 x 1.75 2 Series MU Theoretical Output (N) Operating pressure (MPa) Piston area (mm2) Rod size (mm) Size Operating direction 0.7 0.6 0.5 0.4 0.3 0.2 344 295 246 196 147 98 491 OUT 25 12 265 227 189 151 113 76 378 IN 563 482 402 322 241 161 804 OUT 32 14 455 390 325 260 195 130 650

Magnetically Coupled Rodless Cylinder

Example) CY1L25-650 (1) Maximum load mass = 20 kg (2) Load mass for 650 st = 13.6 kg 13.6 (3) = = 0.68 is the result. 20 1.

AR425 to 935

Bleed port AU AF Handle locking screw AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts Caution No.

Series GS40 Digital Pressure Sensor 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Light turns ON when pressure drops below the set minimum. Operating display Set pressure display IR 15 mA (24 VDC when ON) or less SETPush button Normally, the LCD displays line pressure.

Pressure Control Equipment

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 14-4-11 Miniature regulator ARJ310 Small, compact Allows smaller mounting pitch Bracket Pressure gauge M5 0.2 to 0.7 1 8 / to 2 1 4 Pilot operated regulator AR425-925 AR435-935 Compact manifold regulator ARM10/11 / 14-4-15 Internal pilot type Relieving

VEA

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Basic Style Specifications: VEA250 High dither effect Uses a P.W.M. (pulse width modulation) system to achieve an effective dither, thus minimizing hysteresis of the electropneumatic proportional valve.

ZSM1-115/121

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Max. 15 kPa Max. 20 kPa Hysteresis 10% or less Repeatability ZSP 5 to 60C (No freezing) Ambient and fluid temperature ISA2 4.5 to 28 VDC 100 VAC/DC or less Supply voltage ON: When output is ON.

Safety Instructions

Mounting Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Warning 1. Instruction manual Install the products and operate them only after reading the instruction manual carefully and understanding its contents.

Air Suction Filter Series ZFA 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY Note 1) Please consult with SMC when INLET and OUTLET are to be prepared on the bottom of the case or if a vacuum switch is to be installed on the filter. Note 2) Avoid use under pressurization.

Air Suction Filter With One-touch Fittings Series ZFB 1

Restart operation. 4.2 hole Maintenance space ( l ) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Applicable tubing O.D.

MU

(mm) Size direction Fluid Air 0.2 0.3 0.4 0.5 0.6 0.7 Proof pressure 1.05MPa OUT 491 98 147 196 246 295 344 25 12 Max. operating pressure 0.7MPa IN 378 76 113 151 189 227 265 Min. operating pressure 0.05MPa OUT 804 161 241 322 402 482 563 32 14 Ambient and fluid temperature 10 to 60C IN 650 130 195 260 325 390 455 Lubrication Not required (Non-lube) OUT 1257 251 377 503 629 754 880 40 16

1.1

IDF-TR7000-8 IDF-TR14000-8 IDF-TR18000-8 Mass (kg) 360 400 650 450 300 350 13 40 152 400 650 450 300 350 13 40 179 32 Thermo-cooler Series HRG Dimensions [Foundations bolt set] HRG HRGC HRZ HRW HEC HEB HED Technical Data Related Products A Mounting hole diameter: 10.5 (mm) A Nominal thread size Applicable Thermo-cooler Part no.

Exhaust Cleaner for Vacuum Pump AMV Series

amount (L) AMV3-10 AMV6-14 AMV15-20 AMV37-20 AMV75-30 AMV160-40 1.6 3.0 5.9 10 43 59 0.3 0.5 1.0 1.0 10 10 360 650 1,500 3,700 7,500 16,000 360 650 1,500 3,700 7,500 16,000 1 1 1/2 2 2 80 (3B) JIS 10K FF flange 100 (4B) JIS 10K FF flange Construction Gasket Cover Element Tension bolt No Description Material Component Parts 1 2 3 4 Holder Case Cover Tension bolt Aluminum alloy Carbon steel

Series VS

1 73 56 35 53 2 20 150.5 4 68.5 71 30 45 2 20 175.5 n= NUMBER OF STATIONS (MIN. 2,MAX.10) LENGTH FORMULA L1= 43n + 72 L2= 43n + 84 LENGTH FORMULA L1= 56n + 90 L2= 71n + 90 L1= 71n + 66 LENGTH FORMULA L2= 56n + 106 LENGTH DIMENSIONS LENGTH DIMENSIONS LENGTH DIMENSIONS SIZE 1 SIZE 2 SIZE 3 n 3 2 n n 2 3 4 5 6 7 8 9 10 7 5 4 6 9 8 10 5 4 3 2 9 8 7 6 10 L L L L1 258 202 314 482 426 538 594 650

0.55

(462) VF5;44-02 1/4 8.1 0.35 2.1 7.4 0.33 1.9 Exhaust center 578 (390) 650 (462) [7.4] [0.34] [1.9] 3-position 8.0 0.35 2.1 Pressure center 5.6 0.31 1.5 578 (390) 650 (462) [2.9] [0.48] [0.85] Single 8.4 0.34 2.2 8.9 0.29 2.3 473 (297) 509 (333) 2-position Double 8.4 0.34 2.2 8.9 0.29 2.3 529 (352) 601 (424) Closed center 7.3 0.34 2.0 7.1 0.28 1.8 566 (390) 638 (462) VF5;44-03 3/8 14.0 0.26

0.55

650 2 3 (OUT EXH) 280 310 330 650 670 670 3 4 1 4 VP3165 1 2.0 1 1 4 1 1 4 1 VP3185 2.8 1 2 1 2 2 For grommet Conduit terminal +0.2 kg 1496 Large Size 3 Port Solenoid Valve Series VP3145/3165/3185 Construction/Internal Pilot As in the figure below, this pilot-operated solenoid valve consists of a compact 3 port solenoid valve as the pilot valve and a large 3 port valve as the main valve

Air Preparation Equipment

For AFF2C to 22C, 37B, 75B, AM150C to 550C, 650, and 850 The pressure drop reaches 0.1 MPa or two years have elapsed after operation start, whichever comes earlier. [The pressure drop can be checked using the equipment with the element service indicator (-T) or differential pressure gauge (made to order specifications).] b.

Profile Design ISO/VDMA Air Cylinder Series CP95

Allowable theoretical strokes (mm) Mounting type Accessories Pressure Bore (mm) [MPa] 32 40 50 63 80 100b L F (front) G (rear) 0.2 680 980 1220 1410 0.3 540 1020 790 980 1140 L 0.4 460 700 880 680 840 980 0.5 410 630 780 610 750 880 F (front) 0.6 370 580 710 550 680 800 0.7 340 520 650 500 620 730 0.8 310 480 600 460 580 680 0.9 290 450 570 430 540 630 1 270 420 530 400 510 590 0.2 580

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Applicable strokes: 150, 250, 350, 450, 550, 650, 750, 850, 950 Example) LJ1S1011SC-150-F2-X2 Allowable Moment (Nm) Allowable static moment Allowable dynamic moment Model Mounting orientation Load movement direction Pitching Rolling Yawing 1.3 1.5 0.7 LJ1S10 30 a = 500 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a = 1000 a L1 (mm) 20 a = 2000 Pitching Mep m m : Transfer load