MTS

Refer to graph (16) based on horizontal mounting, the maximum speed of 600 mm/s, and 125 stroke.

0.4

Enter EX250-compliant S kit only. Valve stations Input block specification (Enter EX250-compliant S kit only.)

CG1

Up to 600 Up to 750 Up to 750 With rod boot ZZ Bore (mm) Applicable pin part no.

NCA1

Stainless steel w/ composite tube Item No from CHART 1 to reference Par t required M O U N T I N G S T Y L E H O W T O O R D E R S E R I E S NCA1 S E A L K I T NCA1PS B O R E S I Z E R O D T H R E A D R O D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 100010 120012 140014 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8

VZ100/300/500

DXT170-176-2-01 DXT170-176-2-02 DXT170-176-2-03 DXT170-176-2-04 DXT170-176-2-07 DXT170-176-3-51 DXT170-176-3-06 DXT170-176-3-05 DXT170-176-3-53 For Series VZ300/500 With light/surge voltage suppressor With surge voltage suppressor 100 VAC 200 VAC 110 VAC 220 VAC 240 VAC 6 VDC 12 VDC 24 VDC 48 VDC S E For VZ120 Indicator light is not available for grommet type.

JXCx-OMU0026

9 5 24 12 6 24 12 6 Min. speed [mm/s] (Speed tuning control) 22 12 6 26 13 7 34 17 9 34 17 9 Supplement 1.2 Initial setting of LEFS series Model LEFS16 LEFS25 Lead symbol A B H A B Lead [mm] 10 5 20 12 6 Stroke (mm) 500 500 500 600 700 800 600 700 800 600 700 800 Max. speed [mm/s] 500 250 100 900 630 550 500 420 330 250 230 180 0 Min. speed [mm/s] (Independent and interpolation) 10 5 20

Nozzle Type Ionizer

Blow Velocity Distribution (Supply Pressure: 0.3 MPa) qEnergy saving static neutralization nozzle IZN10E-01 wHigh flow rate nozzle IZN10E-02 0 0 100 100 Distance [mm] Distance [mm] 200 200 4 m/s 14 m/s 300 300 11 m/s 3 m/s 400 400 8 m/s 2 m/s 500 30 30 20 10 0 10 20 500 30 30 20 10 0 10 20 Distance (Horizontal) [mm] Distance (Horizontal) [mm] 8 IZN10E Series Flow Rate Characteristics qEnergy

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

0.43 0.73 0.63 0.73 0.2 JSX21-S Cm503 320 360 7.1 3.15 0.44 0.88 0.76 0.88 0.1 JSX21-S Cm703 320 360 3/8 1/4 4.0 2.02 0.48 0.52 0.45 0.52 1.0 JSX31-S Cm402 450 490 5.6 2.62 0.43 0.73 0.63 0.73 0.5 JSX31-S Cm502 450 490 7.1 3.15 0.44 0.88 0.76 0.88 0.2 JSX31-S Cm702 450 490 30 3/8 4.0 2.02 0.48 0.52 0.45 0.52 1.0 JSX31-S Cm403 450 520 5.6 2.62 0.43 0.73 0.63 0.73 0.5 JSX31-S Cm503 450 520

Direct Operated

terminal B2 B1 J K J K J K M J K M N Q R S T N.C., N.O., COM.

Rotary Clamp Cylinders

= 1 + 2 = (1.6 + 3.0) x 104 = 4.6 x 104 kgm2 Stroke time Note 2) Series MK MK2 Average piston speed Note 1) Stroke total Max. piston speed 120 mm/s 200 mm/s 75 mm/s 125 mm/s 0.35 sec. 0.2 sec. 25 mm Note 1) Average piston speed = Maximum piston speed 1.6. Note 2) Please use the stroke speeds indicated above.

HRX-OM-R005

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-R005 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

MVGQ

Built-in magnet for auto-switches CE1 CE2 Maximum Driving Speed of Cylinders ML2B 1000 1000 900 900 C J G5-S Load factor: 10% Load factor: 50% 800 800 Cylinder speed (mm/s) Cylinder speed (mm/s) 700 700 600 600 CV 500 500 400 400 MVGQ 300 300 200 200 CC 100 100 0 0 12 16 20 25 32 40 50 63 80 100 RB SYJ3000 VZ3000 VZ5000 VF3000 Bore size (mm) J Series Variations DDetailed specifications

3

Select from hysteresis mode or window comparator mode. 0.5 s/1 s/2 s (linked with the switch output) Voltage output: 1 to 5 V Output impedance: 1 k7 Voltage output Current output Analog output Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDC Hysteresis External input Display method Indicator light Power supply voltage Current consumption Variable Voltage

Pilot Operated

This is the same concept representing the easy to run through as sonic conductance C (effective area). (3) Formula of flow rate When P2 + 0.1 0.5, choked flow P1 + 0.1 293 Q = 120 x S (P1 + 0.1) (3) 273 + t When P2 + 0.1 > 0.5, subsonic flow P1 + 0.1 293 Q = 240 x S (P2 + 0.1) (P1 P2) (4) 273 + t Conversion with sonic conductance C: S = 5.0 x C(5) Q :Air flow rate[dm3/min(ANR)], dm3 (

Ionizer Nozzle type IZN10 Series IZS

Also, regularly check there is no deterioration due to ozone. 444 Technical Data IZN10 Series Blow Velocity Distribution (Supply Pressure: 0.3 MPa) IZS (1) Energy saving static neutralization nozzle/IZN10-01 (2) High flow rate nozzle/IZN10-02 IZN IZN IZF ZVB IZD IZE IZH 0 0 100 100 200 200 Distance [mm] Distance [mm] 3 [m/s] 14 [m/s] 300 300 2 [m/s] 11 [m/s] 400 400 1 [m/s] 9 [m/s] 500 30

VZ3000

actuation VFN VZ314--01 (Piping: 6 x 1 m) Speed controller/Silencer AS3301F-02-06/AN110-01 Bore size Series CA1 Pressure 0.5 MPa Load factor 50% Stroke 400 mm Average speed (mm/s) Series 100 40 50 63 80 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ314--01 (Piping: 6 x 1 m) Speed controller/Silencer AS3301F-02-06/AN110-01 800 700 600 500 400 300 200

e-Rodless Actuator

Acceleration [m/s 2] Speed Setting Switch No. Speed [mm/s] 1 1 100 0.49 2 2 200 0.74 3 3 300 0.98 4 4 400 1.23 5 5 500 1.47 6 6 600 1.96 7 7 700 2.45 8 8 800 2.94 9 9 900 3.92 10 10 1000 4.90 Note) The factory default setting for the switch is No.1 (100 mm/s).

KT10

Code Material Viton (Standard) Polyurethane Buna-N Ethylene propylene No code UE BN EP Relieving Relieving Code Self Relieving (Standard) Non relieving 1 0 Main valve seat material Material Ports Material Vespel (Standard) PEEK Code Pressure gauge unit 4) Body material Code Brass 300 SS series 316 SS Material Code S No code PK B C S Ports Code Unit psig/bar MPa B V C V No code MPA 4P 4PN

AC Servo Motor Driver (Pulse input type/Positioning type)

Example using a 20[mm] Lead Actuator with target travel speed of 500[mm/sec] Rotations per second Travel distance per second Travel distance per rotation Rotation Speed (rpm) = {Speed (mm/s) Lead (mm) }60 (S) = {500 (mm/s) 20 (mm) }60 (s) =1500 (rpm) The rotation speed must be a value between 0 and the allowable actuator speed. The actuator will not operate if set to 0.

VZ5000

Pressure 0.5 MPa Load factor 50% Stroke 500 mm VZS Average speed (mm/s) Series VFS VS4 40 50 63 80 100 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VQ7 VZ514--02 (Piping: 6 x 1 m) EVS VFN AS3301F-02-06/AN200-2 Speed controller/Silencer 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ514--02 (Piping: 8 x 1 m) AS3301F