MQQ

to 1000 mm/s (Refer to page 10-5-7.) (3) Piston speed H (High speed/High frequency type) 5 mm/s to 3000 mm/s (Refer to page 10-5-7.)

VFS

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 40 50 63 80 100 125 140 160 180 200 Average speed (mm/s) System VK 1000 Perpendicular, upward actuation Horizontal actuation 900 800 700 600 500 400 300 200 100 VZ A VF VFR 0 1000 VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco,

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

) (1000) (1000) MY1MW20 MY1MW20 MY1MW20 (1000) (900) (1000) (900) (1000) (900) MY1CW20 MY1CW20 MY1CW16 MY1MW16 MY1MW16 MY1MW16 MY1CW16 MY1CW16 (900) (900) (900) Caution 20 20 10 10 1.

SL5200

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

High-precision Digital Pressure Switch ( compatible)

value (upper limit of window comparator) 1025 0x0401 0 R/W U16 3400 Y (580 ~ 5200) ISE71: 0x02E2 ~ 0x1450 (738 ~ 5200) Setting range ISE70: 0x03E8 ~ 0x0CEE WH2 (Window comparator hysteresis) Setting of OUT2 hysteresis (window comparator hysteresis) U16 1400 Y 1026 0x0402 0 R/W (1000 ~ 3310) ISE71: 0x03E8 ~ 0x0C9E (1000 ~ 3231) Setting of OUT2 delay time at ON 0.01 s increment 1027 0x0403

MXQ

75 60 605 610 670 735 835 1000 55 + 0.2 S 2350 2650 2900 310 130 65 120 65 80 170 115 1100 1100 1100 1200 1400 1750 166 + 0.5 S 3450 4300 4700 560 200 110 140 110 130 220 180 1750 1750 1750 1950 2400 2750 240 + 0.5 S Option Specifications Stroke Adjustment Range of Adjuster Option (Identical for extension and retraction ends) Optional wide adjustment range adjuster are available with rubber

5-Port Solenoid Valve

Valve size Valve size 50 50 DOWN DOWN At 300 mm/s Can drive cylinders of Existing up to 50 2 Valve size Valve size 63 63 Existing DOWN DOWN (80 at 100 mm/s) Can drive cylinders of up to 63 2 80 (125 at 100 mm/s) Can drive cylinders of up to 80 2 (160 at 100 mm/s) 2 Values based on comparison with the existing SMC model For details, refer to page 13.

Cylinder with Lock Series CNG

1000 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 200 200 100 100 40 32 30 40 50 30 40 50 25 40 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 [Example] 25 10 10 20 5 4 5 4 3 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 1000 1000 Maximum speed: V(mm/s) Maximum speed: V (mm/s) Graph 7 Graph 4 0.5MPaP 0.5MPaP 200 200 40 100 100

C95Series

1l'" Immj 32 -700 50 7 5 10 64 72 32 36 79 90 25 31 ", 40 -800 55 9 7 10 Cushi()(\ vl\lve Port 4 50 -1000 70 9 12 12 90 45 50 110 120 36,S 39.5 63 1000 80 9 12 12 100 80 1000 100 12 14 16 126 63 153 45.5 J()a, -1000 120 14 1 6 I. 150 75 176 54 FE FT Head Iionge/ (G) Head flange 101m) ' ~," BoreSiW .

ZP

Note) ;in the table indicates the pad material "N, S, U, F, GN, GS." Note) ;in the table indicates the pad material "N, S, U, F, GN, GS." Note) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

HRX-OM-M090

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-M090 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

Mitsubishi Electric Corporation Yaskawa Electric Corporation LJ1H202NA 100W to 500 LJ1H303SE 200W to 500 to 500 to 500 LJ1H202PC 100W to 1000 to 740 to 930 to 600 to 500 LJ1H202NC 100W to 740 to 930 to 600 to 500 to 1000 LJ1H303PD 200W to 1000 to 1000 to 1000 to 700 to 500 LJ1H303ND 200W to 1000 to 1000 to 700 to 500 to 1000 LJ1H102PH-K 100W to 400 LJ1H102NH-K 100W to 400 LJ1H202PF-K 100W

Single Axis Electric Actuator Series LJ1

Mitsubishi Electric Corporation Yaskawa Electric Corporation LJ1H202NA 100W to 500 LJ1H303SE 200W to 500 to 500 to 500 LJ1H202PC 100W to 1000 to 740 to 930 to 600 to 500 LJ1H202NC 100W to 740 to 930 to 600 to 500 to 1000 LJ1H303PD 200W to 1000 to 1000 to 1000 to 700 to 500 LJ1H303ND 200W to 1000 to 1000 to 700 to 500 to 1000 LJ1H102PH-K 100W to 400 LJ1H102NH-K 100W to 400 LJ1H202PF-K 100W

Electric Actuators

LJ1H202NC 14 56 to 740 to 930 to 600 to 500 to 1000 LJ1H303PD to 1000 to 1000 to 700 to 500 18 60 to 1000 126 114 108 LJ1H303ND 20 62 to 1000 to 1000 to 700 to 500 to 1000 LJ1H102PH-K 24 66 to 400 104 110 LJ1H102NH-K 28 70 to 400 LJ1H202PA-K 34 76 to 500 106 112 LJ1H202NA-K 38 80 to 500 LJ1H102PB-K 26 68 to 600 145 104 110 LJ1H102NB-K 30 72 to 600 LJ1H202PF-K 32 74 to 250 106 112 LJ1H202NF-K

Compressed Air Preparation Filter

Bracket B Line filter Mist separator Micro mist separator Bracket A Mounting screws Specific Product Precautions Bracket mounting view 14 AFF/AM/AMD Series Dimensions AFF/AM/AMD20 AFF/AM/AMD30 AFF/AM/AMD40 M D J U J D M S U N T S N T 2 x P (Port size) 2 x P (Port size) R Q Q R V C V C B G IN OUT IN OUT B G Maintenance space A Maintenance space E A AFF/AM/AMD50 AFF/AM/AMD60 J M D N T U S 2

PFxx-OMX0002

(OUT2 switch output does not exist in the output specification of this model) Press the S button for 1 to 3 seconds. Press the S button for 3 to 5 seconds. Press S button once.

CV/MVGQ

C J G5-S CV MVGQ Connection port A CC RB S + Stroke LS + Stroke ZZ + Stroke ZZ + l + Stroke h + l J Stroke range DBore size (mm) A AL B B1 C D E F H1 K LT J LD LH LS LX MM LZ (mm) 40 50 63 80 100 Up to 500 501 to 800 Up to 600 601 to 1000 Up to 600 601 to 1000 Up to 750 751 to 1000 Up to 750 751 to 1000 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 16 20 20 25 30 32 40 40 52 52 10

ML1C

Stroke Adjustment Unit Shock Absorber Model 25 32 40 RB1412 RB2015 RB2015 Port Port Shock Absorber Specifications 25 32 40 Applicable cylinder size (mm) RB1412 RB2015 RB2015 Shock absorber model Max. energy absorption (J) 19.6 58.8 58.8 Stroke absorption (mm) 12 15 15 Max. collision speed (mm/s) 1000 1000 1000 Max. operating frequency (cycle/min) 45 25 25 Extended 6.85 8.34 8.34 Spring force

Series KV2 Fittings

Green Gray Tan S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S S Color Indication Color S S S Color Black Red Green Blue White Yellow Orange Natural Silver Purple Brown Dk.