Large Size Vacuum Module: Series ZR ZR1-SR2-82-A(a set of four threads) For nozzle size 18, 20 ZR1-SR2-86-A(a set of four threads) For nozzle size 10, 13, 15 For nozzle size 18, 20 Standard (without options) With individual spacer For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate For nozzle size 18, 20 + with function plate For nozzle size 10, 13, 15 For nozzle size 18, 20 For
-X 20Stop Data 10-2-11 11 Series REA Dimensions REA25/32/40 Effective thread depth J L 0 0.1 B NN G 4-MM H G 2-port size X D I NB NB T N K W N S + Stroke F NA F R ZZ + Stroke (mm) B D F G H I K L MM x J N NA NB NN Model Port size REA25 REA32 REA40 Rc 1/8 46 27.8 13 8 20.5 34 10 70 M5 x 0.8 x 8 15 30 13 M26 x 1.5 Rc 1/8 60 35 16 9 22 40 15 80 M6 x 1.0 x 8 17 36 15 M26 x 1.5 Rc 1/4 70 43 16
SYJ7000-16-2 A Round head combination screw M3 x 47 Matt nickel plated (with spring washer) Gasket DXT199-21-13 ARBYJ7000-00-P Thread type SYJ7000-21-3A Round head combination screw M3 x 55 Matt nickel plated (with spring washer) Nil F N T Rc G NPT NPTF Round head combination screw M3 x 8 Matt nickel plated (with spring washer) A B Blanking plate SYJ7000-21-1 Gasket DXT199-21-13 Base mounted
Model A c o E F G H J K L M N 2F810105 26 53 54 22.5 12.5 24 17 -5 1 5 50 15.514.4 12.8 8,5 zFB101-07 242 17.7 114" zFB201-07 52 28 24.51 13.s1 27.21 19.71 t6 G1 17.5116.6115.21 1t4" 9.5 zFB301-11 30 70 27 14.5go.221.7 17 21.5 s 18.53A 11 zFuol-13 64.5 34 8?.
EX600-SEN1/2 13 Seal cap Mounted on the connectors (BUS OUT and PCI) at the time of shipment. !2 Note) MAC address name plate is not provided on the EX600-SEC. !1 !0 !3 u i o q EX600-SEN3/4 EX600-SECl EX600-SPNl Handheld Terminal No.
CG-020-24A CG-025-24A CG-032-24A CG-040-24A CNG-020-24 CNG-025-24 CNG-032-24 CNG-040-24 28 28 28 30 42 42 48 56 20 25 32 40 38.3 42.1 53.8 64.6 28 28 28 30 16 20 22 30 42 42 48 56 35.8 39.8 49.4 58.4 18.1 20.7 23.6 27.3 3.2 3.2 4.5 4.5 13 15 17 21 26 28 28 36 50 57 61.4 71.4 47.8 54.8 57.4 65.4 21.2 21.3 25.6 26.3 3.2 3.2 4.5 4.5 13 15 17 21 20 25 32 40 Knuckle Pin Rod End Nut Clevis Pin
Hex 1 Hex 2 Port 1 Port 2 A Port 2 PS49JMJM-4-4 2.99 2.59 1.29 1.89 1.20 .75 .56 9/16-18 9/16-18 76.0 mm 65.7 mm 32.5 mm 47.9 mm 30.5 mm 19.0 mm 14.3 mm UNF-2A UNF-2A DIA B PS69JMJM-6-6 3.27 2.76 1.40 2.05 1.29 .88 .69 11/16-16 11/16-16 83.0 mm 70.0 mm 35.6 mm 52.0 mm 32.8 mm 22.2 mm 17.5 mm UN-2A UN-2A Hex 1 Hex 2 C PS89JMJM-8-8 3.52 2.93 1.74 2.60 1.73 1.12 .88 13/16-16 13/16-16 89.5 mm
4 x 13 (748) (587) Port Size Port Size Part no.
For details about auto switches with pre-wire connector, refer to page 10-20-66. 10-2-13 13 Series REAR Specifications Fluid Air Proof pressure 1.05 MPa Maximum operating pressure 0.7 MPa Minimum operating pressure 0.18 MPa Ambient and fluid temperature 10 to 60C Piston speed 50 to 300 mm/s Lubrication Non-lube Stroke length tolerance +1.0 0 +1.4 0 +1.8 0 0 to 250 st: , 251 to 100 st: , 1001
MGPM, MGPL Common Dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW 12 16 20 25 42 29 6 8 5 26 11 7.5 58 M4 13 13 18 M4 x 0.7 10 M4 x 0.7 4.3 8 4.5 M5 x 0.8 13 8 18 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 8 8 5 30 11 8 64 M4 15 15 22 M5 x 0.8 12 M5 x 0.8
AL47 13 Pump breaker trip AL48 Pump inverter error AL49 Air exhaust fan stoppage 14 12: Water-cooled type model does not generate this alarm. 13: Power supply "-20" specification model does not generate this alarm.
Setting range and default settings are shown in Table 5.4-13 Pump operation mode setting. (1) (2) (3) (4) (5) Pump operation mode setting Table 5.4-13 Pump operation mode setting No. Indication Item Setting range Explanation (4) The pump operation is controlled to maintain the set pressure when control mode (operation mode) is set to [ ].
5.12.2 Circulating fluid electrical conductivity . 5-13 5.12.3 Circulating fluid discharge pressur . 5-13 5.12.4 Circulating fluid flow rate . 5-13 5.12.5 Status flag . 5-13 5.12.6 Alarm flag. 5-13 5.12.7 Data display . 5-13 5.12.8 Circulating fluid set temperature . 5-13 5.12.9 Operation instruction . 5-14 5.12.10 Data instruction . 5-15 5.12.11 Product number . 5-15 5.12.12 Serial number
/LEHZ .10 2.1 LEHZ () . 10 2.1.1 . 10 2.1.2 . 11 2.1.3 . 12 2.2 LEHZJ () . 13 2.2.1 . 13 2.2.2 . 14 2.2.3 . 15 2.2.4 . 16 3./LEHF .17 3.1 . 17 3.2 . 18 3.3 . 19 4.
(1) (9) (10) (2) (3) (4) (15) (16) (7) (11) (8) (12) (5) (17) (18) (21) (19) (6) (20) (13) (14) OFF 1 PWR LED() ON 2 RUN LED() EtherNet/IP USB USB 3 USB USB LED() USB 4 ALM LED() 5 USB USB ) (+)(-) 6 C PWR (2 ) x100 7 x10 IP x1 x10 x100 IP 4Byte x1 8 MS, NS LED EtherNet/IP 9 ENC1 (16 ) 1 10 MOT1 (6 ) 11 ENC2 (16 ) 2 12 MOT2 (6 ) ) (+) 1 (+) 1 (+) 13 CI 1 2 2 (+)2 (+
13 7 stations 7 stations (+) () () (+) 14 14 J.S.T.
15 M4 X 0.7 4.3 4.3 5.6 5.6 M5 X 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 8 8 10 10 13 15 18 21 18 13 15 18 21 5 5 6 6 18 22 24 30 12 16 20 25 26 30 36 42 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 11 M5 X 0.8 M5 X 0.8 M5 X 0.8 15 10 19 MGC 53 37 10.5 M5 X 0.8 M5 X 0.8 Rc1/8 12.5 10.5
Model A c o E F G H J K L M N 2F810105 26 53 54 22.5 12.5 24 17 -5 1 5 50 15.514.4 12.8 8,5 zFB101-07 242 17.7 114" zFB201-07 52 28 24.51 13.s1 27.21 19.71 t6 G1 17.5116.6115.21 1t4" 9.5 zFB301-11 30 70 27 14.5go.221.7 17 21.5 s 18.53A 11 zFuol-13 64.5 34 8?.
15 14 13 11.5 17 15.5 14.5 13.5 12 17.5 16 15 13 14.5 15.5 16.5 11.5 12.5 14 57 Non-plug-in Individual Wiring Series SJ2000/3000 Manifold Exploded View Type 60 (Non-plug-in) manifold Note) Refer to page 50 for How to Add Manifold Stations.
Shield 12 13 7 6 9 8 3 Brown Black Red Black Orange Black Vcc GND A A B B B-4 A-4 B-5 A-5 B-6 A-6 Connector B terminal no.