7 VXZ 5.5 A B G1/2 VXS b a OUT IN VXB 2 x P Port size F 4.5 L K D f J I VXE 4.5 VXP Conduit d e C VXR E U 280 VXH 23 VXF 1.2 7.5 VX3 G1/2 T 5.5 A b a VXA IN OUT B 2 x P Port size f J F I L K D 4.5 4.5 Flat terminal C e d U E 11 1.2 7.5 T 5.5 A b a IN OUT B 2 x P Port size I F J 4.5 L K D 4.5 f (mm) Electrical entry One-touch fitting P A B D E F I J K Model Conduit terminal Conduit Flat
Co., Ltd. 1-3-12 13 Cassette Type Manifold Plug-in Type Series SZ3000 Manifold Electrical Wiring Type 60F D-sub Connector Type (25 pins) Without Power Supply Terminal With Power Supply Terminal Positive common Negative common 13 13 13 Common Positive pin (Common) Positive pin SOL.B Station 12 12 25 12 25 12 25 SV SOL.A Light/Surge voltage suppressor Negative pin Negative pin (Common) 24
Controller ID: 1 Function code: 05h Start address: Y30 Data value to be written: "FF00h" (i) Request Example 1 Start code 2 ID 0 Controller ID: 1 3 1 4 Function code 0 Function code: 05h 5 5 6 0 Address No. of 7 0 contact to be Start address: Y30 8 3 written 9 0 Data 10 F 11 F Data value to be Data value to be written: "FF00h" written Note 1) 12 0 13 0 Calculated 14 value Checksum(LRC) 15
Nil V Standard For vacuum X505 Series VPA500 Port size Symbol Port size VPA300 1/8 1/4 3/8 1/2 VPA500 VPA700 01 02 03 04 Bracket Nil F Without bracket With bracket Thread type Type of actuation A B N.C. (Normally closed) N.O. (Normally open) Nil F N T Rc G NPT NPTF Series VPA700 Specifications Fluid Air Type of actuation N.C. or N.O.
20 25 31 ED 60 74 94 EA 10 12 15 h 3.5 4.5 4.5 Applicable cylinder ML2B25 ML2B32 ML2B40 10-13-15 13 Series ML2B Dimensions Side support A MY-SA 2-G F E 2-H C D A B Side support B MY-SB 2-J C D A B (mm) A 61 70 87 B 75 84 105 C D E F G H J Part no.
137.5 118 15 160.5 150 128.5 16 173 162.5 139 17 173 162.5 149.5 12 185.5 175 160 13 123 112.5 97 13 135.5 125 107.5 14 External Pilot Manifold L Dimension n: Stations (n1 + n2) L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L1 L2 L3 L4 135.5 125 107.5 14 148 137.5 118 15 160.5 150 128.5 16 173 162.5 139 17 173 162.5 149.5 12 185.5 175 160 13 198 187.5 170.5 14 210.5 200 181 15 223
G F E 3.5 Note 1) Distance within which the table can move when it returns to origin.
R V Rod side flange style (F): CG5FNS GA GB 2-Rc P FT H1 Width across flats B1 D I MM AL A Width across flats NA K KA 8-J 4-FD C0.1 FX0.15 S + Stroke ZZ + Stroke H M B Stroke range A Bore size (mm) AL B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA P S ZZ 20 Up to 350 18 15.5 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 29 1/8 83 121 25 Up to 400 22 19.5 17 50 18.5 10 36 5.5
R V Rod side flange style (F): CG5FNS GA GB 2-Rc P FT H1 Width across flats B1 D I AL A MM Width across flats NA K KA 8-J 4-FD C0.1 FX0.15 S + Stroke ZZ + Stroke H M B Stroke range A Bore size (mm) AL B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA P S ZZ 20 Up to 350 18 15.5 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 29 1/8 83 121 25 Up to 400 22 19.5 17 50 18.5 10 36 5.5
Symbol 07 11 13 19 25 1/4 3/8 1/2 3/4 1 Note) Refer to page 540 for How to order fitting parts. Select the fittings of the same size as the one at the valve side.
B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62
25 31 ED 60 74 94 EA 10 12 15 h 3.5 4.5 4.5 Applicable cylinder ML2B25 ML2B32 ML2B40 10-13-15 Series ML2B Dimensions Side support A MY-SA 2-G F E 2-H C D A B Side support B MY-SB 2-J C D A B (mm) A 61 70 87 B 75 84 105 C D E F G H J Part no.
ModelZPGU-7A-X2 (Suction cup formFlat type) ModelZPGC-7A-X2 (Suction cup formFlat type with ribs) Dimensions Model A B D E F Y ZPG10U-7A-X2 10 12 ZPG13U-7A-X2 13 15 ZPG16U-7A-X2 16 18 18 22.5 3.5 ZPG20U-7A-X2 20 23 ZPG25U-7A-X2 25 28 ZPG32U-7A-X2 32 35 20 24.5 4.5 Dimensions Model A B D E F Y ZPG10C-7A-X2 10 12 1.7 ZPG13C-7A-X2 13 15 1.8 ZPG16C-7A-X2 16 18 18 22.5 1.2 ZPG20C-7A-X2 20 23 1.7
Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FSG-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FSG-01-03 (S) 5/32" 8.2 AS221FSG-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FSG-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FSG-02-01 (S) 1/8" 1/8 13 (12.7) 7.2
Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K
Bellows seal C Double acting Bellows seal F Single acting (N.C.)
AW-OMX0057-A PRODUCT NAME Filter Regulator MODEL / Series / Product Number AW20(K)-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AW30(K)-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AW40(K)-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AW40(K)-(F,N)06(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AW60(K)-(F,N)06(F,N)10(B,C,
or less 13 or less VQZ1220 0.13 0.26 0.54 0.13 0.20 0.54 Metal seal Double 10 or less 13 or less 13 or less VQZ1221 0.19 0.40 0.71 0.26 0.40 0.90 Rubber seal 20 or less 26 or less 40 or less VQZ1320 0.08 0.25 0.50 0.13 0.29 0.55 Metal seal Closed center VQZ1000 25 or less 33 or less 47 or less VQZ1321 0.18 0.39 0.68 61 0.23 0.38 0.87 Rubber seal 20 or less 26 or less 40 or less 3 position